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11. 发明申请

US20110205514A1 MEASURING METHOD AND MEASURING APPARATUS OF PUPIL TRANSMITTANCE DISTRIBUTION, EXPOSURE METHOD AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：测量方法和测量装置的发射分布，曝光方法和曝光装置，以及装置制造方法
公开(公告)号：US20110205514A1
公开(公告)日：2011-08-25
申请号：US13011320
申请日：2011-01-21
申请人： Naonori KITA
发明人： Naonori KITA
IPC分类号： G03B27/54 , G01M11/00
CPC分类号： G03F7/70941 , G01M11/02 , G03F7/70133 , G03F7/70591 , G03F7/706
摘要： A measuring apparatus for measuring a pupil transmittance distribution of an optical system to be examined has a diffraction grating mounted on a first surface in an optical Fourier transform relation with a pupil of the optical system, an illumination optical system which makes a beam inclined relative to the optical axis, incident to a predetermined position on the first surface so that a +first-order diffracted beam, generated through the diffraction grating, passes through a first pupil partial region in an effective region of the pupil and so that a −first-order diffracted beam, generated through the diffraction grating, passes through a second pupil partial region, and a measuring unit which measures an intensity of the +first-order diffracted beam, and an intensity of the −first-order diffracted beam, and the measuring apparatus determines a ratio of a pupil transmittance in the first and second pupil partial regions.
摘要翻译：用于测量待检光学系统的光瞳透射率分布的测量装置具有安装在与光学系统的光瞳的光学傅立叶变换关系的第一表面上的衍射光栅，照明光学系统，其使光束相对于光轴入射到第一表面上的预定位置，使得通过衍射光栅产生的+一级衍射光束通过瞳孔的有效区域中的第一光瞳部分区域，并且使得第一 - 通过衍射光栅产生的三阶衍射光束通过第二光瞳部分区域，测量单位测量+一级衍射光束的强度和一级衍射光束的强度，以及测量设备确定第一和第二光瞳部分区域中的光瞳透射率的比率。

12. 发明申请

US20100316943A1 ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：照明光学系统，曝光装置和装置制造方法
公开(公告)号：US20100316943A1
公开(公告)日：2010-12-16
申请号：US12817271
申请日：2010-06-17
申请人： Osamu TANITSU , Naonori KITA
发明人： Osamu TANITSU , Naonori KITA
IPC分类号： G03F7/20 , G02B26/00 , G03B27/54
CPC分类号： G03F7/70116 , G02B17/0892 , G02B26/0833
摘要： There is disclosed an illumination optical system which illuminates an illumination target surface on the basis of light from a light source, said illumination optical system comprising, a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable, a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system on the basis of light having traveled via the spatial light modulator, and a control unit which integrally controls postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements.
摘要翻译：公开了一种照明光学系统，其基于来自光源的光照射照明目标表面，所述照明光学系统包括：空间光调制器，具有二维排列并且可单独控制的多个光学元件，分布基于经由所述空间光调制器行进的光，在所述照明光学系统的照明光瞳上形成预定的光强度分布的光学系统，以及根据形状一体地控制一组光学元件的姿势的控制单元在所述多个光学元件中形成在所述照明光瞳上的预定光强度分布。

13. 发明申请

US20060181690A1 Exposure apparatus, exposure method, and method for producing device 有权
公开(公告)号：US20060181690A1
公开(公告)日：2006-08-17
申请号：US11403922
申请日：2006-04-14
申请人： Hisashi Nishinaga , Ikuo Hikima , Mitsunori Toyoda , Masahiro Nakagawa , Tsuneyuki Hagiwara , Yasushi Mizuno , Naonori Kita , Osamu Tanitsu , Nozomu Emura
发明人： Hisashi Nishinaga , Ikuo Hikima , Mitsunori Toyoda , Masahiro Nakagawa , Tsuneyuki Hagiwara , Yasushi Mizuno , Naonori Kita , Osamu Tanitsu , Nozomu Emura
IPC分类号： G03B27/42
CPC分类号： G03F7/7015 , G03F7/70058 , G03F7/70341 , G03F7/706 , G03F7/7085
摘要： A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

14. 发明申请

US20060166142A1 Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method 失效
公开(公告)号：US20060166142A1
公开(公告)日：2006-07-27
申请号：US11352263
申请日：2006-02-13
申请人： Mitsunori Toyoda , Naonori Kita
发明人： Mitsunori Toyoda , Naonori Kita
IPC分类号： G03C5/00
CPC分类号： G03F7/70075 , G01M11/0207
摘要： There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.

15. 发明申请

US20100103398A1 OPTICAL INTEGRATOR, ILLUMINATING OPTICAL DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：光学整合器，照明光学装置，曝光装置和装置制造方法
公开(公告)号：US20100103398A1
公开(公告)日：2010-04-29
申请号：US12529614
申请日：2008-03-11
申请人： Naonori Kita
发明人： Naonori Kita
IPC分类号： G03B27/54 , G02B27/10
CPC分类号： G02B27/0905 , G02B27/0966 , G03F7/70075 , G03F7/70566
摘要： An optical integrator has a plurality of wavefront dividing elements two-dimensionally arrayed, and is so configured that a ray group obliquely incident to an optical-axis center of an entrance face of each wavefront dividing element is emitted in parallel with the optical axis from the wavefront dividing element. In each of a required number of wavefront dividing elements out of the plurality of wavefront dividing elements, at least one curved optical face of the wavefront dividing element is formed as inclined around an axis along a predetermined direction passing an optical-axis center of an entrance face of the wavefront dividing element and being perpendicular to the optical axis AXe.
摘要翻译：光学积分器具有二维排列的多个波阵面分割元件，并且被配置为使得倾斜入射到每个波阵面元素的入射面的光轴中心的射线组从光轴平行地发射波前分割元素。在多个波阵面分割元件中的所需数量的波前分割元件中的每一个中，波前分割元件的至少一个弯曲光学面形成为沿着通过入口的光轴中心的预定方向的轴线倾斜并且垂直于光轴ax。

16. 发明授权

US07618767B2 Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method 失效
标题翻译：照明分布评价方法，光学构件制造方法，照明光学装置，曝光装置和曝光方法
公开(公告)号：US07618767B2
公开(公告)日：2009-11-17
申请号：US11352263
申请日：2006-02-13
申请人： Mitsunori Toyoda , Naonori Kita
发明人： Mitsunori Toyoda , Naonori Kita
IPC分类号： H01L21/00
CPC分类号： G03F7/70075 , G01M11/0207
摘要： There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.
摘要翻译：公开了一种使用多项式来评价一维照明分布的评价方法，所述方法包括以下步骤：设置在闭合间隔中正交的一维多项式作为多项式; 并用功率多项式逼近一维照明分布，以获得功率多项式的各项的系数。

17. 发明授权

US09389519B2 Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method 有权
标题翻译：光瞳透射率分布的测量方法和测量装置，曝光方法和曝光装置以及装置制造方法
公开(公告)号：US09389519B2
公开(公告)日：2016-07-12
申请号：US13011320
申请日：2011-01-21
申请人： Naonori Kita
发明人： Naonori Kita
IPC分类号： G01B9/00 , G03B27/32 , G03B27/54 , G03B27/74 , G03F7/20 , G01M11/02
CPC分类号： G03F7/70941 , G01M11/02 , G03F7/70133 , G03F7/70591 , G03F7/706
摘要： A measuring apparatus for measuring a pupil transmittance distribution of an optical system to be examined has a diffraction grating mounted on a first surface in an optical Fourier transform relation with a pupil of the optical system, an illumination optical system which makes a beam inclined relative to the optical axis, incident to a predetermined position on the first surface so that a +first-order diffracted beam, generated through the diffraction grating, passes through a first pupil partial region in an effective region of the pupil and so that a −first-order diffracted beam, generated through the diffraction grating, passes through a second pupil partial region, and a measuring unit which measures an intensity of the +first-order diffracted beam, and an intensity of the −first-order diffracted beam, and determines a ratio of a pupil transmittance in the first and second pupil partial region regions.
摘要翻译：用于测量待检光学系统的光瞳透射率分布的测量装置具有安装在与光学系统的光瞳的光学傅立叶变换关系的第一表面上的衍射光栅，照明光学系统，其使光束相对于光轴入射到第一表面上的预定位置，使得通过衍射光栅产生的+一级衍射光束通过瞳孔的有效区域中的第一光瞳部分区域，并且使得第一 - 通过衍射光栅产生的次级衍射光束通过第二光瞳部分区域，测量单位测量+一级衍射光束的强度和一级衍射光束的强度，并确定瞳孔透射率在第一和第二光瞳部分区域中的比率。

18. 发明申请

US20080225257A1 Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：光学积分器系统，照明光学装置，曝光装置和装置制造方法
公开(公告)号：US20080225257A1
公开(公告)日：2008-09-18
申请号：US12068828
申请日：2008-02-12
申请人： Naonori Kita
发明人： Naonori Kita
IPC分类号： G03B27/54 , G02B27/30
CPC分类号： G03F7/70075 , G02B5/045 , G02B27/0927 , G02B27/0966 , G02B27/0972 , G03F7/7015
摘要： An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction, and a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, which are arranged in order from the entrance side of light. The first wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted in parallel with the optical axis. The second wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted obliquely to the optical axis.
摘要翻译：一种光学积分器系统包括：第一光学积分器，包括沿预定方向并列布置的多个第一波前分割元件;以及第二光学积分器，包括沿着预定方向并置布置的多个第二波阵面分割元件，从灯的入口侧订购。第一波前分割元件被构造成使得倾斜入射到入射表面的光轴上的中心的光线与光轴平行地发射。第二波前分割元件被构造成使得倾斜入射到入射表面的光轴上的中心的光线相对于光轴倾斜地发射。

19. 发明申请

US20080225256A1 Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：光学积分器系统，照明光学装置，曝光装置和装置制造方法
公开(公告)号：US20080225256A1
公开(公告)日：2008-09-18
申请号：US12068818
申请日：2008-02-12
申请人： Naonori Kita
发明人： Naonori Kita
IPC分类号： G03B27/54 , G02B27/10
CPC分类号： G02B27/0966 , G02B27/0927 , G03F7/70075
摘要： An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements two-dimensionally juxtaposed, and a second optical integrator including a plurality of second wavefront dividing elements two-dimensionally juxtaposed. Each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface are emitted in parallel with the optical axis. Each of the second wavefront dividing elements is also so constructed that rays obliquely incident to a center on an optical axis of an entrance surface are emitted in parallel with the optical axis. The system satisfies the condition of P2/(2×tan θ)
摘要翻译：一种光学积分器系统包括：第二光学积分器，包括多个第二波前分割元件，二维并置，第二光学积分器，包括多个第二波前分割元件二维并置。每个第一波前分割元件被构造成使得倾斜入射到入射表面的光轴上的中心的光线与光轴平行地发射。每个第二波前分割元件也被构造成使得倾斜入射到入射表面的光轴上的中心的光线与光轴平行地发射。该系统满足P2 /（2xtanθ）

20. 发明申请

US20080074631A1 Optical Integrator, Illumination Optical Device, Photolithograph, Photolithography, and Method for Fabricating Device 有权
标题翻译：光学积分器，照明光学装置，光刻，光刻和制造装置的方法
公开(公告)号：US20080074631A1
公开(公告)日：2008-03-27
申请号：US11793448
申请日：2005-12-09
申请人： Naonori Kita
发明人： Naonori Kita
IPC分类号： G03B27/72 , G02B27/10
CPC分类号： G02B27/0927 , G02B27/0961 , G03F7/70075
摘要： An optical integrator has characteristics to suppress influence of relative positioning error of a pair of optical members on an illuminance distribution and on a shape of an illumination field. The optical integrator is a wavefront splitting type optical integrator having a first optical member and a second optical member in order from the entrance side of light. The first optical member has first entrance surfaces having a refractive power in a first direction and substantially no refractive power in a second direction, and first exit surfaces having a refractive power in the first direction and substantially no refractive power in the second direction. The second optical member has second entrance surfaces having a refractive power in the second direction and substantially no refractive power in the first direction, and second exit surfaces having a refractive power in the second direction and substantially no refractive power in the first direction.
摘要翻译：光学积分器具有抑制一对光学构件的相对定位误差对照度分布和照明场的形状的影响的特性。光学积分器是从光入射侧起依次具有第一光学构件和第二光学构件的波前分割型光学积分器。第一光学构件具有在第一方向上具有折射力并且在第二方向上基本上不具有折光力的第一入射表面，以及在第一方向上具有折射力并且在第二方向上基本上没有折射光焦度的第一出射表面。第二光学构件具有在第二方向上具有屈光力并且在第一方向上基本上没有折光力的第二入射表面，并且第二出射表面在第二方向上具有折射光焦度，并且在第一方向上基本上没有折射光焦度。

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