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1. 发明申请

US20100316943A1 ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：照明光学系统，曝光装置和装置制造方法
公开(公告)号：US20100316943A1
公开(公告)日：2010-12-16
申请号：US12817271
申请日：2010-06-17
申请人： Osamu TANITSU , Naonori KITA
发明人： Osamu TANITSU , Naonori KITA
IPC分类号： G03F7/20 , G02B26/00 , G03B27/54
CPC分类号： G03F7/70116 , G02B17/0892 , G02B26/0833
摘要： There is disclosed an illumination optical system which illuminates an illumination target surface on the basis of light from a light source, said illumination optical system comprising, a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable, a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system on the basis of light having traveled via the spatial light modulator, and a control unit which integrally controls postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements.
摘要翻译：公开了一种照明光学系统，其基于来自光源的光照射照明目标表面，所述照明光学系统包括：空间光调制器，具有二维排列并且可单独控制的多个光学元件，分布基于经由所述空间光调制器行进的光，在所述照明光学系统的照明光瞳上形成预定的光强度分布的光学系统，以及根据形状一体地控制一组光学元件的姿势的控制单元在所述多个光学元件中形成在所述照明光瞳上的预定光强度分布。

2. 发明申请

US20090116093A1 ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：照明装置，照明方法，曝光装置和装置制造方法
公开(公告)号：US20090116093A1
公开(公告)日：2009-05-07
申请号：US12256055
申请日：2008-10-22
申请人： Osamu TANITSU
发明人： Osamu TANITSU
IPC分类号： G02B26/02
CPC分类号： G02B26/0833 , G02B26/02 , G02B27/0905 , G03F7/70058 , G03F7/70075 , G03F7/70108 , G03F7/70116
摘要： To optionally forming a multilevel light intensity distribution on an illumination pupil plane, the illumination apparatus implements Köhler illumination on an illumination target surface, using as a light source the light intensity distribution formed on the illumination pupil plane on the basis of light from a light source. The illumination apparatus has a spatial light modulator, a condensing optical system, and a control unit. The spatial light modulator has a plurality of reflecting surfaces which are two-dimensionally arranged and postures of which can be controlled independently of each other. The condensing optical system condenses light from the reflecting surfaces to form a predetermined light intensity distribution on the illumination pupil plane. The control unit controls the number of reflecting surfaces contributing to arriving light, for each of points on the illumination pupil plane forming the light intensity distribution, according to a light intensity distribution to be formed on the illumination pupil plane.
摘要翻译：为了在照明光瞳平面上可选择地形成多级光强度分布，照明装置在照明目标表面上实现Köhler照明，使用基于来自光源的光形成在照明光瞳平面上的光强度分布作为光源。照明装置具有空间光调制器，聚光光学系统和控制单元。空间光调制器具有二维布置的多个反射表面，并且可以彼此独立地控制其姿势。聚光光学系统将来自反射表面的光聚光，以在照明光瞳平面上形成预定的光强度分布。根据要在照明光瞳平面上形成的光强度分布，控制单元控制对于形成光强度分布的照明光瞳平面上的每个点有助于到达光的反射面的数量。

3. 发明申请

US20120178028A1 SPATIAL LIGHT MODULATOR UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：空调光调制器单元，照明光学系统，曝光装置和器件制造方法
公开(公告)号：US20120178028A1
公开(公告)日：2012-07-12
申请号：US13348990
申请日：2012-01-12
申请人： Osamu TANITSU
发明人： Osamu TANITSU
IPC分类号： G03F7/20 , G03B27/72 , G02B26/02
CPC分类号： G02B26/0833 , G03F7/70116 , G03F7/70191
摘要： According to one embodiment, a spatial light modulator unit is used in the illumination optical system for illuminating an illumination target surface with light from a light source and comprises: a spatial light modulator with a plurality of optical elements arrayed in a predetermined plane and controlled individually; a spatial light modulation element which applies spatial light modulation to the incident light from the light source and which makes rays of intensity levels according to positions of the respective optical elements, incident on the plurality of optical elements; and a control unit which individually controls the plurality of optical elements on the basis of information about the intensity levels of the rays incident on the respective optical elements.
摘要翻译：根据一个实施例，在照明光学系统中使用空间光调制器单元，用于利用来自光源的光照射照明目标表面，并且包括：空间光调制器，其具有排列在预定平面中的多个光学元件并被单独控制 ; 空间光调制元件，其对来自光源的入射光进行空间光调制，并且根据入射到多个光学元件上的各个光学元件的位置使强度水平的光线; 以及控制单元，其基于关于入射在各个光学元件上的光线的强度水平的信息单独地控制多个光学元件。

4. 发明申请

US20110037962A1 POLARIZATION CONVERTING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：偏光转换单元，照明光学系统，曝光装置和设备制造方法
公开(公告)号：US20110037962A1
公开(公告)日：2011-02-17
申请号：US12821742
申请日：2010-06-23
申请人： Osamu TANITSU
发明人： Osamu TANITSU
IPC分类号： G03B27/54 , G02B5/30 , G03B27/32 , F21V9/14
CPC分类号： G02B27/286 , G03F7/70566
摘要： According to one embodiment, a polarization converting unit configured to convert incident light into light in a predetermined polarization state has a first optical element and a second optical element. The first optical element has a plurality of first regions, and at least two adjacent first regions have respective different thicknesses so as to have different polarization conversion properties. Likewise, the second optical element also has a plurality of second regions, and at least two adjacent second regions have different polarization conversion properties. The first and second optical elements are arranged so that a light beam having passed through one first region is incident to two adjacent second regions, whereby the sum of thicknesses of the first and second optical elements is varied depending upon a passing position of light.
摘要翻译：根据一个实施例，被配置为将入射光转换成预定偏振状态的光的偏振转换单元具有第一光学元件和第二光学元件。第一光学元件具有多个第一区域，并且至少两个相邻的第一区域具有各自不同的厚度，从而具有不同的偏振转换特性。类似地，第二光学元件还具有多个第二区域，并且至少两个相邻的第二区域具有不同的偏振转换特性。第一和第二光学元件布置成使得已经穿过一个第一区域的光束入射到两个相邻的第二区域，由此第一和第二光学元件的厚度之和根据光的通过位置而变化。

5. 发明申请

US20120202157A1 OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：光学单元，照明光学装置，曝光装置和装置制造方法
公开(公告)号：US20120202157A1
公开(公告)日：2012-08-09
申请号：US13449115
申请日：2012-04-17
申请人： Osamu TANITSU
发明人： Osamu TANITSU
IPC分类号： G03B27/72 , G03F7/20
CPC分类号： G02B27/0927 , F21V9/14 , F21V13/02 , F21V14/003 , G02B27/0938 , G02B27/1086 , G02B27/126 , G02B27/286 , G03F7/70058 , G03F7/70116 , G03F7/70566
摘要： An illumination optical apparatus has an optical unit. The optical unit has a light splitter to split an incident beam into two beams; a first spatial light modulator which can be arranged in an optical path of a first beam; a second spatial light modulator which can be arranged in an optical path of a second beam; and a light combiner which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements arranged two-dimensionally and controlled individually.
摘要翻译：照明光学装置具有光学单元。光学单元具有分光器，将入射光束分成两束; 可以布置在第一光束的光路中的第一空间光调制器; 可以布置在第二光束的光路中的第二空间光调制器; 以及将通过第一空间光调制器通过的光束与经过第二空间光调制器的光束组合的光合并器; 第一空间光调制器和第二空间光调制器中的每一个具有二维排列并分别控制的多个光学元件。

6. 发明申请

US20120171627A1 INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR, ILLUMINATION OPTICAL SYSTEM, METHOD FOR ADJUSTING THE ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：用于空调光调制器的检查装置和检查方法，照明光学系统，用于调节照明光学系统的方法，曝光装置和装置制造方法
公开(公告)号：US20120171627A1
公开(公告)日：2012-07-05
申请号：US13417602
申请日：2012-03-12
申请人： Osamu TANITSU , Hirohisa TANAKA
发明人： Osamu TANITSU , Hirohisa TANAKA
IPC分类号： G03F7/20 , G03B27/54 , G01N21/88
CPC分类号： G01M11/005 , G03F7/70116 , G03F7/70591
摘要： An inspection device is for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually. The inspection device includes a Fourier transform optical system which is arranged optically downstream the spatial light modulator and which forms a Fourier transform plane optically in a Fourier transform relation with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the Fourier transform plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
摘要翻译：检查装置用于检查具有二维排列并单独控制的多个光学元件的空间光调制器。检查装置包括：傅里叶变换光学系统，其在空间光调制器的光学下游布置，并且与阵列中的多个光学元件的阵列平面以傅里叶变换关系形成傅里叶变换平面;具有检测表面的光电检测器布置在傅立叶变换平面上或其附近，以及检查单元，其基于光电检测器的检测结果来检查多个光学元件的光学特性。

7. 发明申请

US20110205519A1 POLARIZATION CONVERTING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：偏光转换单元，照明光学系统，曝光装置和设备制造方法
公开(公告)号：US20110205519A1
公开(公告)日：2011-08-25
申请号：US12835860
申请日：2010-07-14
申请人： Nobumichi KANAYAMAYA , Osamu TANITSU
发明人： Nobumichi KANAYAMAYA , Osamu TANITSU
IPC分类号： G03B27/72 , G02F1/29
CPC分类号： G02B27/286 , G02B5/3083 , G03F7/70566
摘要： According to one embodiment, a polarization converting unit, for converting incident light into light in a predetermined polarization state and emitting the converted light, has a first optically rotatory member having a first thickness distribution of thicknesses in an optical-axis direction different at a plurality of locations and a second optically rotatory member having a second thickness distribution, each of which is a member to rotate linearly polarized light incident thereto as propagating light, around the optical-axis direction. The first and second optically rotatory members are comprised of an optical material with an optical activity arranged so as to have a crystal axis coincident or parallel with the optical-axis direction. Particularly, the sum of respective thicknesses of superimposed regions in the first and second optically rotatory members is different from the sum of respective thicknesses of other superimposed regions in the first and second optically rotatory members when viewed along the optical-axis direction.
摘要翻译：根据一个实施例，用于将入射光转换成预定偏振态的光并发射转换的光的偏振转换单元具有第一旋光构件，其具有在多个不同的光轴方向上的厚度的第一厚度分布的位置和具有第二厚度分布的第二光学旋转构件，每个第二光学旋转构件是围绕光轴方向旋转入射到其上的线偏振光作为传播光的构件。第一和第二旋光构件由具有光学活性的光学材料构成，以使晶轴与光轴方向重合或平行。特别地，第一和第二光学旋转构件中的叠加区域的各个厚度的总和与沿着光轴方向观察时的第一和第二光学旋转构件中的其它叠加区域的各自厚度的总和不同。

8. 发明申请

US20110069305A1 INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR, ILLUMINATION OPTICAL SYSTEM, METHOD FOR ADJUSTING THE ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：用于空调光调制器的检查装置和检查方法，照明光学系统，用于调节照明光学系统的方法，曝光装置和装置制造方法
公开(公告)号：US20110069305A1
公开(公告)日：2011-03-24
申请号：US12952197
申请日：2010-11-22
申请人： Osamu TANITSU , Hirohisa Tanaka
发明人： Osamu TANITSU , Hirohisa Tanaka
IPC分类号： G01N21/00
CPC分类号： G01M11/005 , G03F7/70116 , G03F7/70591
摘要： There is disclosed an inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising, a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed, a photodetector having a detection surface arranged on or near the conjugate plane, and an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.
摘要翻译：公开了一种检查装置，用于检查具有二维排列并被单独控制的多个光学元件的空间光调制器，所述检查装置包括：共轭光学系统，其在空间光调制器的光学下游配置并形成共轭平面与排列多个光学元件的阵列平面光学共轭，具有布置在共轭平面上或附近的检测表面的光电检测器，以及基于检测结果检查多个光学元件的光学特性的检查单元通过光电检测器。

9. 发明申请

US20120236285A1 ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD 审中-公开
标题翻译：照明光学系统，曝光装置和曝光方法
公开(公告)号：US20120236285A1
公开(公告)日：2012-09-20
申请号：US13482491
申请日：2012-05-29
申请人： Osamu TANITSU , Hirohisa TANAKA , Kenichi MURAMATSU , Norio KOMINE , Hisashi NISHINAGA , Tomoyuki MATSUYAMA , Takehito KUDO
发明人： Osamu TANITSU , Hirohisa TANAKA , Kenichi MURAMATSU , Norio KOMINE , Hisashi NISHINAGA , Tomoyuki MATSUYAMA , Takehito KUDO
IPC分类号： G03F7/20 , G03B27/72 , F21V9/14
CPC分类号： G03F7/70566 , G03B27/42 , G03F7/70091
摘要： An illumination optical system illuminates an irradiated surface with light supplied from a light source. The illumination optical system includes a diffractive optical element disposed in an optical path of linearly polarized light supplied from the light source. The diffractive optical element forms a multipole illumination field. including a plurality of illumination fields. The illumination optical system also includes an optical integrator that forms a multipole light source including a plurality of planar light sources with light that has passed through the multipole illumination field. The illumination optical system also includes a polarization optical member disposed in an illumination optical path and that sets a polarization direction of light that has passed through the multipole light source to a predetermined polarization direction.
摘要翻译：照明光学系统用从光源提供的光照射被照射的表面。照明光学系统包括设置在从光源提供的线偏振光的光路中的衍射光学元件。衍射光学元件形成多极照明场。包括多个照明场。照明光学系统还包括光学积分器，其形成包括已经穿过多极照明场的光的多个平面光源的多极光源。照明光学系统还包括设置在照明光路中并将已经通过多极光源的光的偏振方向设定为预定偏振方向的偏振光学构件。

10. 发明申请

US20100253927A1 SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：空调光调制装置，照明光学系统，曝光装置及装置的制造方法
公开(公告)号：US20100253927A1
公开(公告)日：2010-10-07
申请号：US12817299
申请日：2010-06-17
申请人： Osamu TANITSU
发明人： Osamu TANITSU
IPC分类号： G03B27/54 , G02B26/00 , F21V3/04
CPC分类号： G03F7/70116 , G02B26/0808 , G02B26/0833 , G02B26/0883 , G02B27/42
摘要： There is disclosed a spatial light modulating unit comprising:a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually; and an angle varying unit which varies a relative angle between a diffracted light generating region to generate diffracted light around each of the plurality of optical elements, and incident light to the diffracted light generating region.
摘要翻译：公开了一种空间光调制单元，包括：空间光调制器，具有二维排列并分别控制的多个光学元件; 以及角度变化单元，其改变衍射光产生区域之间的相对角度，以在多个光学元件中的每一个周围产生衍射光，以及入射光到衍射光产生区域。

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