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    • 12. 再颁专利
    • Method and apparatus for optical inspection of substrates
    • 用于光学检查基板的方法和装置
    • USRE37740E1
    • 2002-06-11
    • US08373084
    • 1995-01-17
    • Curt H. ChadwickRobert R. SholesJohn D. GreeneFrancis D. Tucker, IIIMichael E. FeinP. C. JannDavid J. HarveyWilliam Bell
    • Curt H. ChadwickRobert R. SholesJohn D. GreeneFrancis D. Tucker, IIIMichael E. FeinP. C. JannDavid J. HarveyWilliam Bell
    • G01B1130
    • G01N21/95684G01N21/8806G01N21/956G01N2021/8908G01N2021/95638G01R31/311
    • Substrate inspection apparatus and methods, and illumination apparatus. The inspection apparatus and method includes memory for storing the desired features of the surface of the substrate, focussed illuminator for substantially uniformly illuminating a region of the surface of the substrate to be inspected. Additionally there is a sensor for imaging the region of the substrate illuminated by the illuminator, and a comparator responsive to the memory and sensor for comparing the imaged region of the substrate with the stored desired features of the substrate. The illumination apparatus is designed to provide substantially uniform focussed illumination along a narrow linear region. This apparatus includes first, second and third reflectors elliptically cylindrical in shape, each with its long axis substantially parallel to the long axes of each of the others. Fourth and fifth reflectors are also included with each being flat and mounted parallel to each other and at opposite ends of each of said first, second and third reflectors, and first, second and third linear light sources each mounted parallel to a corresponding one of said first, second and third reflectors with each of the light sources mounted so that it is at the first focus of the corresponding reflector and the illuminated linear region is at the second focus of each of the first, second and third reflectors. The questions raised in reexamination request No. 90/003,232, filed Oct. 29, 1993, have been considered and the results thereof are reflected in this reissue patent which constitutes the reexamination certificate required by 35 U.S.C. 307 as provided in 37 CFR 1.570(e).
    • 基板检查装置及方法及照明装置。 检查装置和方法包括用于存储基板的表面的期望特征的存储器,用于基本上均匀地照射待检查的基板的表面的区域的聚焦照明器。 另外还有一个传感器,用于对由照明器照射的衬底的区域进行成像,以及响应于存储器和传感器的比较器,用于将衬底的成像区域与存储的衬底的期望特征进行比较。 照明装置被设计成沿狭窄的线性区域提供基本均匀的聚焦照明。 该装置包括椭圆形圆柱形的第一,第二和第三反射器,每个反射器的长轴基本上平行于每个反射器的长轴。 还包括第四和第五反射器,每个反射器是平坦的并且彼此平行并且在每个所述第一,第二和第三反射器的相对端部安装,并且第一,第二和第三线性光源各自平行于所述第一, 第一,第二和第三反射器,其中每个光源安装成使得其处于相应反射器的第一焦点,并且被照射的线性区域处于第一,第二和第三反射器中的每一个的第二焦点。 已经考虑了1993年10月29日提交的第90 / 003,232号复审请求中提出的问题,其结果反映在该重新颁发专利中,该专利构成了35U.S.C.所要求的复审证书。 307如第37 CFR 1.570(e)条。
    • 13. 发明授权
    • Automated photomask inspection apparatus
    • 自动光掩模检测仪
    • US06363166B1
    • 2002-03-26
    • US09539672
    • 2000-03-30
    • Mark Joseph WihlTao-Yi FuMarek ZywnoDamon Floyd KvammeMichael E. Fein
    • Mark Joseph WihlTao-Yi FuMarek ZywnoDamon Floyd KvammeMichael E. Fein
    • G06K900
    • G03F1/84G01N21/95607G01N2021/95676
    • An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.
    • 一种自动化光掩模检查装置,包括用于在XY平面中的蛇形路径中传送被测试的基板的XY状态(12),包括激光器(30),透射光检测器(34)的光学系统(16) ,反射光检测器(36),限定参考光束路径的光学元件和激光器,衬底和检测器之间的照明光束路径,以及用于相对于照射和参考光束往复扫描照射和参考光束的声光束扫描器(40,42) 基板表面,以及用于控制平台和光学系统的操作以及用于解释和存储由检测器输出的信号的电子控制,分析和显示系统。 该设备可以以管芯到管芯的比较模式或管芯到数据库模式工作。
    • 15. 发明授权
    • Distance simulator
    • 距离模拟器
    • US4852983A
    • 1989-08-01
    • US99103
    • 1987-09-21
    • Michael E. Fein
    • Michael E. Fein
    • G01M11/00G01C15/00G02B13/22G02B27/00
    • G01C15/002G02B13/22
    • An optical system simulates the optical effect of traveling over a large distance on light traveling from a first reference surface to a second reference surface. The first and second reference surfaces are relatively closely spaced. A first afocal magnifying lens system receives light from the first reference surface and provides a magnification ratio of M.sub.1. A second afocal magnifying lens system, spaced from the first afocal magnifying lens system by a predetermined distance D, receives light from the from the first afocal magnifying lens system and transmits it to the second reference surface with a magnification ratio of M.sub.2. The length of the distance which is simulated is related to the magnification ratio M.sub.1 of the first afocal magnifying lens system and to the predetermined distance D. The scale of the output image is related to magnification ratio M.sub.2.
    • 光学系统模拟从第一参考表面到第二参考表面行进的光线上的大距离行进的光学效应。 第一和第二参考表面相对紧密地间隔开。 第一无焦放大透镜系统从第一参考表面接收光,并提供M1的放大倍数。 与第一无焦放大透镜系统间隔预定距离D的第二无焦放大透镜系统从第一无焦放大透镜系统接收光,并以M2的放大比率将其透射到第二参考表面。 模拟的距离的长度与第一无焦放大透镜系统的放大率M1和预定距离D有关。输出图像的比例与放大率M2相关。
    • 16. 发明授权
    • Gaseous display device
    • 气体显示装置
    • US4132982A
    • 1979-01-02
    • US630585
    • 1975-11-10
    • Bernard W. ByrumRoger E. ErnsthausenMichael E. Fein
    • Bernard W. ByrumRoger E. ErnsthausenMichael E. Fein
    • H01J17/49G06F3/14
    • H01J11/00
    • There is disclosed a gas discharge device containing at least two electrodes, at least one of the electrodes being insulated from the gas by a dielectric member. There is particularly disclosed a multiple gaseous discharge display/memory panel having an electrical memory and capable of producing a visual display, the panel being characterized by an ionizable gaseous medium in a gas chamber formed by a pair of opposed dielectric material charge storage members, each of which is respectively backed by an array of electrodes, the electrodes behind each dielectric material member being oriented with respect to the electrodes behind the opposing dielectric material member so as to define a plurality of discrete discharge units.At least one dielectric insulating member contains a predetermined beneficial amount of a source of at least one nonconductive, insulating inorganic nickel compound, said compound containing no oxygen atoms directly bonded to a nickel atom. The nickel compound may be incorporated into or on the dielectric by any suitable means, including being applied as a layer within the dielectric or on the surface thereof.
    • 17. 发明授权
    • Addition of helium to gaseous medium of gas discharge device
    • 向气体放电装置的气体介质添加氦气
    • US4081712A
    • 1978-03-28
    • US734561
    • 1976-10-21
    • Wolfgang W. BodeMichael E. Fein
    • Wolfgang W. BodeMichael E. Fein
    • H01J11/12H01J11/50H01J61/16
    • H01J11/12H01J11/50
    • There is disclosed a gas discharge display/memory device comprised of an ionizable gaseous medium and at least one electrode array dielectrically insulated from the gaseous medium. In the practice of this invention, helium is added to the gaseous medium in an effective amount sufficient to significantly improve the operating performance and characteristics of the device, as defined, for example, by decreased operating voltages and increased operating life. Prior to the addition of helium, the gaseous medium comprises about 90 percent to about 99.99 percent atoms of neon and about 10 percent to about .01 percent atoms of at least one member selected from argon, xenon, or krypton.
    • 公开了一种气体放电显示/存储装置,其包括可离子化气体介质和至少一个与气体介质介电绝缘的电极阵列。 在本发明的实践中,氦气以足以显着提高器件的操作性能和特性的有效量添加到气态介质中,例如通过降低的操作电压和增加的使用寿命来定义。 在添加氦气之前,气态介质包含约90%至约99.99%的氖原子和约10%至约0.01%的至少一种选自氩,氙或氪的成员的原子。
    • 18. 发明授权
    • Gas discharge device including transition metal element on internal
dielectric layer
    • 气体放电装置包括内部电介质层上的过渡金属元素
    • US3996489A
    • 1976-12-07
    • US630586
    • 1975-11-10
    • Bernard W. Byrum, Jr.Roger E. ErnsthausenMichael E. Fein
    • Bernard W. Byrum, Jr.Roger E. ErnsthausenMichael E. Fein
    • H01J11/12H01J11/38H01J61/35
    • H01J11/38H01J11/12
    • There is disclosed a gas discharge device containing at least two electrodes, at least one of the electrodes being insulated from the gas by a dielectric member. There is particularly disclosed a multiple gaseous discharge display/memory panel having an electrical memory and capable of producing a visual display, the panel being characterized by an ionizable gaseous medium in a gas chamber formed by a pair of opposed dielectric material charge storage members, each of which is respectively backed by an array of electrodes, the electrodes behind each dielectric material member being oriented with respect to the electrodes behind the opposing dielectric material member so as to define a plurality of discrete discharge units.At least one dielectric insulating member contains a predetermined beneficial amount of a source of at least one transition element selected from V, Nb, Ta, Cr, Mo, W, Mn, Tc, Re, Fe, Ru, Os, Co, Rh, Ir, Pd, and Pt.The selected element or elements may be utilized in any suitable form, such as a compound, mineral, and/or elemental. Likewise, such may be incorporated into the dielectric by any suitable means, including being applied as a layer within the dielectric or on the surface thereof.
    • 公开了一种包含至少两个电极的气体放电装置,至少一个电极通过电介质构件与气体绝缘。 特别公开了一种具有电存储器并且能够产生可视显示器的多重气体放电显示器/存储器面板,该面板的特征在于由一对相对的电介质材料电荷存储部件形成的气室中的可离子化气体介质, 其分别由电极阵列支撑,每个电介质材料构件之后的电极相对于相对介电材料构件后面的电极定向,以限定多个离散的放电单元。