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11. 发明授权

US08256289B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08256289B2
公开(公告)日：2012-09-04
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

12. 发明授权

US08253302B2 Surface acoustic wave element, method of producing the same, and method of changing resonation frequency of the same 失效
标题翻译：表面声波元件及其制造方法以及改变其谐振频率的方法
公开(公告)号：US08253302B2
公开(公告)日：2012-08-28
申请号：US12656523
申请日：2010-02-02
申请人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
发明人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
IPC分类号： H01L41/08 , H03H9/25
CPC分类号： H03H9/02645 , H03H9/02685 , H03H9/02708 , H03H9/02724 , H03H9/02748 , H03H9/02803
摘要： A surface acoustic wave element includes a piezoelectric member, a comb-teeth electrode, and a reflector. The comb-teeth electrode is arranged on the piezoelectric member. The reflector is arranged on the piezoelectric member. The reflector reflects a surface acoustic wave transmitted from the comb-teeth electrode. The reflector has a plurality of areas, and each of the areas has a frequency to make a reflection efficiency the largest. At least two of the frequencies of the areas are made different from each other.
摘要翻译：表面声波元件包括压电元件，梳齿电极和反射器。梳齿电极配置在压电元件上。反射器设置在压电元件上。反射器反射从梳齿电极传播的表面声波。反射器具有多个区域，并且每个区域具有使反射效率最大的频率。这些区域的至少两个频率彼此不同。

13. 发明授权

US08181521B2 Yaw rate sensor using surface acoustic wave 失效
标题翻译：偏航速率传感器采用表面声波
公开(公告)号：US08181521B2
公开(公告)日：2012-05-22
申请号：US12292709
申请日：2008-11-25
申请人： Kazuki Arakawa , Kazuhiko Kano , Akihiko Teshigahara
发明人： Kazuki Arakawa , Kazuhiko Kano , Akihiko Teshigahara
IPC分类号： G01P3/00
CPC分类号： G01C19/5698
摘要： A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate in a propagation direction. The weights are oscillated by the waves and excite a second surface acoustic wave, transmitted through the surface of the substrate in a detection direction orthogonal to the propagation direction, in response to a yaw applied to the weights. The detecting electrodes measure an intensity of the second surface acoustic wave to detect the yaw rate. The sets of exciting electrodes are symmetrically placed with respect to a driving axis extending straight along the propagation direction. The group of weights is symmetric with respect to the driving axis.
摘要翻译：横摆率传感器在压电基板的表面上具有两组激励电极，扰动重量和两组检测电极。励磁电极在传播方向上激发透过基板表面的第一表面声波。权重由波振荡，并且响应于施加到权重的偏航，激发在与传播方向正交的检测方向上透射通过基板的表面的第二表面声波。检测电极测量第二声表面波的强度以检测横摆率。激励电极组相对于沿着传播方向直线延伸的驱动轴对称地放置。重量组相对于驱动轴对称。

14. 发明申请

US20060053890A1 Capacitance type acceleration sensor 有权
公开(公告)号：US20060053890A1
公开(公告)日：2006-03-16
申请号：US11265281
申请日：2005-11-03
申请人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
发明人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814 , G01P2015/0817
摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

15. 发明授权

US06909158B2 Capacitance type dynamical quantity sensor 失效
标题翻译：电容式动力传感器
公开(公告)号：US06909158B2
公开(公告)日：2005-06-21
申请号：US10703460
申请日：2003-11-10
申请人： Tetsuo Yoshioka , Yukihiro Takeuchi , Kazuhiko Kano
发明人： Tetsuo Yoshioka , Yukihiro Takeuchi , Kazuhiko Kano
IPC分类号： G01P15/125 , H01L29/84 , H01L27/00
CPC分类号： G01P15/125 , G01P2015/0814
摘要： A capacitance type dynamical quantity sensor includes a semiconductor substrate, a weight portion being displaced in accordance with a dynamical quantity, a movable electrode integrated with the weight portion, and a fixed electrode facing the movable electrode. The movable electrode and the fixed electrode provide a capacitor having a capacitance. The movable electrode is movable in accordance with the dynamical quantity. The capacitance of capacitor is changed in accordance with a displacement of the movable electrode so that the dynamical quantity as the capacitance change is measured with an outer circuit. The facing surface of the movable electrode facing the fixed electrode has a substantially rectangular shape, and an aspect ratio of the facing surface is in a range between 0.1 and 10.
摘要翻译：电容型动力传感器包括半导体衬底，根据动力位移的重量部分，与重量部分一体化的可动电极和面对可动电极的固定电极。可动电极和固定电极提供具有电容的电容器。可移动电极可根据动态量移动。电容器的电容根据可动电极的位移而变化，从而以外部电路测量作为电容变化的动力学量。面对固定电极的可动电极的面对面具有大致矩形形状，并且面对面的纵横比在0.1和10之间的范围内。

16. 发明申请

US20050001275A1 Semiconductor dynamic quantity sensor 审中-公开
标题翻译：半导体动量传感器
公开(公告)号：US20050001275A1
公开(公告)日：2005-01-06
申请号：US10849259
申请日：2004-05-20
申请人： Makiko Sugiura , Kazuhiko Kano
发明人： Makiko Sugiura , Kazuhiko Kano
IPC分类号： G01P15/125 , G01P15/08 , H01L27/14 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： An acceleration sensor comprising a spring portion joined to the base portion of a semiconductor substrate and elastically displaced in Y-direction in accordance with an applied acceleration, movable electrodes joined to the spring portion, fixed electrodes disposed to face the movable electrodes and adjusting electrodes for adjusting the spring constant of the spring portion. The spring portion has a pair of beams facing each other in the Y-direction, and is elastically deformed so that the interval between the pair of beams is varied. The adjusting electrodes are respectively equipped at the outside of one of the paired beams and at the outside of the other beam, and electrostatic force can be applied by the adjusting electrodes so that the paired beams are separated from each other.
摘要翻译：一种加速度传感器，包括：接合到半导体基板的基部的弹簧部分，并且根据施加的加速度在Y方向上弹性位移;连接到弹簧部分的可动电极;设置成面对可动电极的固定电极;以及用于调节弹簧部分的弹簧常数。弹簧部分具有在Y方向上彼此面对的一对梁，并且弹性变形，使得一对梁之间的间隔变化。调整电极分别配置在成对梁中的一个的外侧并且在另一个梁的外侧，并且可以通过调节电极施加静电力，使得成对的光束彼此分离。

17. 发明授权

US06595050B2 Wire bonded sensor and method for manufacturing wire bonded sensor 有权
标题翻译：线粘接传感器及其制造方法
公开(公告)号：US06595050B2
公开(公告)日：2003-07-22
申请号：US10196275
申请日：2002-07-17
申请人： Kazuhiko Kano , Yukihiro Takeuchi
发明人： Kazuhiko Kano , Yukihiro Takeuchi
IPC分类号： G01F168
CPC分类号： G01F1/692 , G01F1/6845 , H01L24/05 , H01L2224/04042 , H01L2224/45144 , H01L2224/48463 , H01L2224/4847 , H01L2924/00
摘要： A sensor includes a first insulating layer, a second insulating layer having an opening, a plurality of metal wirings, and a plurality of electrodes. Each metal wiring has a contacting area. Each metal wiring is located between the first and second insulating layers. Each electrode has a bonding region located separately from the contacting area. The electrodes are in electrical connect with the contacting areas through the openings. A part of each metal wiring is located beneath each bonding region. The electrodes include any of aluminum, two metals of gold and titan, or three metals of gold, nickel, and titan. When the electrodes include aluminum, the electrodes are annealed such that the surface roughness of the electrode is smaller than 100 angstroms. When the electrodes include the two or three metals, the electrodes are annealed in an atmosphere that a partial pressure of oxygen is lower than 10−1 Pa.
摘要翻译：传感器包括第一绝缘层，具有开口的第二绝缘层，多个金属布线和多个电极。每个金属布线都有一个接触区域。每个金属布线位于第一和第二绝缘层之间。每个电极具有与接触区域分开定位的结合区域。电极通过开口与接触区域电连接。每个金属布线的一部分位于每个接合区域的下方。电极包括铝，金和钛的两种金属或金，镍和钛的三种金属中的任何一种。当电极包括铝时，电极被退火，使得电极的表面粗糙度小于100埃。当电极包括两种或三种金属时，电极在氧分压低于10-1Pa的气氛中退火。

18. 发明授权

US06199430B1 Acceleration sensor with ring-shaped movable electrode 有权
标题翻译：带环形可动电极的加速度传感器
公开(公告)号：US06199430B1
公开(公告)日：2001-03-13
申请号：US09241137
申请日：1999-02-02
申请人： Kazuhiko Kano , Koji Hattori , Yoshinori Ohtsuka , Makiko Sugiura , Minekazu Sakai , Inao Toyoda , Yasutoshi Suzuki , Seiichiro Ishio , Minoru Murata
发明人： Kazuhiko Kano , Koji Hattori , Yoshinori Ohtsuka , Makiko Sugiura , Minekazu Sakai , Inao Toyoda , Yasutoshi Suzuki , Seiichiro Ishio , Minoru Murata
IPC分类号： G01P15125
CPC分类号： B81B7/0006 , B81B2201/0235 , G01P15/0802 , G01P15/125 , G01P15/135 , G01P15/18 , G01P2015/0817 , G01P2015/0828 , G01V1/181 , H01H1/0036
摘要： An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which are disposed on a substrate. The movable electrode is displaced by acceleration approximately in parallel to the substrate and contacts the fixed electrode, so that the acceleration is detected. The fixed electrode is divided into a detecting fixed electrode for contacting the movable electrode and a sensitivity controlling fixed electrode insulated from the detecting fixed electrode. Accordingly, potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled to control sensitivity of acceleration.
摘要翻译：加速度传感器具有环形可动电极，其经由梁和固定电极连接到锚定部分，固定电极面向限定特定间隔的环形可动电极，该固定电极设置在基板上。可移动电极通过与基板大致平行的加速移位，并与固定电极接触，从而检测加速度。固定电极被分成用于接触可动电极的检测固定电极和与检测固定电极绝缘的灵敏度控制固定电极。因此，独立地控制可动电极和检测用固定电极之间以及可动电极与灵敏度控制固定电极之间的电位差，以控制加速度的灵敏度。

19. 发明授权

US6151966A Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure 有权
标题翻译：具有Rahmen结构的电极的半导体动力传感器装置
公开(公告)号：US6151966A
公开(公告)日：2000-11-28
申请号：US304849
申请日：1999-05-05
申请人： Minekazu Sakai , Yukihiro Takeuchi , Kazuhiko Kano , Seiji Fujino , Tsuyoshi Fukada , Hiroshige Sugito , Minoru Murata , Hiroshi Muto , Hirofumi Higuchi , Kenichi Ao
发明人： Minekazu Sakai , Yukihiro Takeuchi , Kazuhiko Kano , Seiji Fujino , Tsuyoshi Fukada , Hiroshige Sugito , Minoru Murata , Hiroshi Muto , Hirofumi Higuchi , Kenichi Ao
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84 , G01L1/00
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： A semiconductor accelerometer device is formed on an SOI substrate by micro-machining. A movable unit is supported at both ends, and a weight portion is movable in response to acceleration exerted in the detection direction. A movable electrode is formed in a comb shape integrally with the weight portion. A pair of fixed electrodes in a comb shape are cantilevered and interleaved with the movable electrode to face the movable electrode. A plurality of through holes is provided in the electrodes so that the electrodes have Rahmen structure which is a series of rectangular frames. This structure reduces the weight of each electrode while increasing the strength against twist force. The electrodes are less likely from breaking in response to an acceleration exerted in a direction perpendicular to the normal detection direction because of reduced weight.
摘要翻译：通过微加工在SOI衬底上形成半导体加速度计装置。可移动单元被支撑在两端，并且重量部分可响应于沿检测方向施加的加速度而移动。可动电极与配重部一体地形成为梳形。一对梳状的固定电极是悬臂式的，与可动电极交错而面对可动电极。多个通孔设置在电极中，使得电极具有Rahmen结构，其是一系列矩形框架。这种结构减小了每个电极的重量，同时增加了抗扭力的强度。由于重量减轻，电极响应于垂直于正常检测方向的方向的加速度而不太可能破裂。

20. 发明授权

US5936159A Semiconductor sensor having multi-layer movable beam structure film 失效
标题翻译：具有多层可移动束结构膜的半导体传感器
公开(公告)号：US5936159A
公开(公告)日：1999-08-10
申请号：US755097
申请日：1996-11-25
申请人： Kazuhiko Kano , Yukihiro Takeuchi , Takamoto Watanabe , Kenichi Ao , Masakazu Kanosue , Hirofumi Uenoyama
发明人： Kazuhiko Kano , Yukihiro Takeuchi , Takamoto Watanabe , Kenichi Ao , Masakazu Kanosue , Hirofumi Uenoyama
IPC分类号： G01P15/08 , G01P15/12 , H01L21/28 , H01L29/51 , H01L29/84
CPC分类号： H01L21/28238 , G01P15/0802 , G01P15/124 , H01L29/51 , H01L29/84 , G01P2015/0814 , G01P2015/0828
摘要： A semiconductor sensor including a movable member beam structure having a reduced deflection characteristic. The sensor includes a movable beam structure film suspended from a semiconductor substrate, with a gap interposed between the beam structure film and the substrate. The beam structure film is composed of a plurality of film layers that are laminated in a direction of film thickness. Further, a stress relieving layer is interposed between respective films to reduce overall internal stress on the structure.
摘要翻译：一种半导体传感器，包括具有减小的偏转特性的可动构件梁结构。传感器包括从半导体衬底悬挂的可移动的光束结构膜，其间插入在光束结构膜和衬底之间。束结构膜由沿膜厚方向层叠的多个膜层构成。此外，应力消除层插入在各个膜之间以减小结构上的整体内部应力。

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