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11. 发明授权

US07227628B1 Wafer inspection systems and methods for analyzing inspection data 有权
标题翻译：晶圆检查系统和检验数据分析方法
公开(公告)号：US07227628B1
公开(公告)日：2007-06-05
申请号：US10964585
申请日：2004-10-12
申请人： Paul Sullivan , George Kren , Eliezer Rosengaus , Patrick Huet , Robinson Piramuthu , Martin Plihal , Yan Xiong
发明人： Paul Sullivan , George Kren , Eliezer Rosengaus , Patrick Huet , Robinson Piramuthu , Martin Plihal , Yan Xiong
IPC分类号： G01N21/88 , G06K9/00
CPC分类号： G01N21/9501 , G01N21/9503 , H01L21/67005 , H01L21/67288
摘要： Wafer inspection systems and methods are provided. One inspection system includes a module measurement cell coupled to a host inspection system by a wafer handler. The module measurement cell is configured to inspect a wafer using one or more modes prior to inspection of the wafer by the host inspection system. The one or more modes include backside inspection, edge inspection, frontside macro defect inspection, or a combination thereof. Another inspection system includes two or more low resolution electronic sensors arranged at multiple viewing angles. The sensors are configured to detect light returned from a wafer substantially simultaneously. A method for analyzing inspection data includes selecting a template corresponding to a support device that contacts a backside of a wafer prior to inspection of the backside of the wafer. The method also includes subtracting data representing the template from inspection data generated by inspection of the backside of the wafer.
摘要翻译：提供晶圆检查系统和方法。一个检查系统包括通过晶片处理器耦合到主机检查系统的模块测量单元。模块测量单元被配置为在主机检查系统检查晶片之前使用一种或多种模式来检查晶片。一种或多种模式包括后侧检查，边缘检查，前侧宏观缺陷检查或其组合。另一种检查系统包括以多个视角布置的两个或多个低分辨率电子传感器。传感器被配置为基本上同时检测从晶片返回的光。用于分析检查数据的方法包括在检查晶片的背面之前选择与支撑装置相对应的模板，所述支撑装置接触晶片的背面。该方法还包括从通过检查晶片的背面产生的检查数据中减去表示模板的数据。

12. 发明申请

US20070124095A1 Status Polling 有权
标题翻译：状态轮询
公开(公告)号：US20070124095A1
公开(公告)日：2007-05-31
申请号：US11622720
申请日：2007-01-12
申请人： Krishnamurthy Bhaskar , Mark Roulo , John Taylor , Lawrence Miller , Paul Russell , Jason Lin , Eliezer Rosengaus , Richard Wallingford , Kishore Bubna
发明人： Krishnamurthy Bhaskar , Mark Roulo , John Taylor , Lawrence Miller , Paul Russell , Jason Lin , Eliezer Rosengaus , Richard Wallingford , Kishore Bubna
IPC分类号： G01N37/00
CPC分类号： G05B19/41855 , G05B2219/37224
摘要： An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.
摘要翻译：用于检测基板上的异常的检查系统。检查系统具有用于生成图像数据的传感器阵列。第一高速网络耦合到传感器阵列并接收并传送图像数据。一系列过程节点耦合到第一高速网络，并接收和处理图像数据以产生异常报告。每个处理节点具有耦合到第一高速网络的接口卡，其接收来自第一高速网络的图像数据，并且根据高速接口总线协议格式化图像数据。接口卡设置表示预定量的图像数据是否已经存储在存储器中的寄存器，并且处理节点读取寄存器以确定预定量的图像数据是否已被存储在存储器中，并且当寄存器指示预定量的图像数据已被存储在存储器中。

13. 发明申请

US20070019196A1 Edge bead removal inspection by reflectometry 有权
标题翻译：通过反射计检查边缘珠粒检查
公开(公告)号：US20070019196A1
公开(公告)日：2007-01-25
申请号：US11527135
申请日：2006-09-26
申请人： Eliezer Rosengaus
发明人： Eliezer Rosengaus
IPC分类号： G01J4/00
CPC分类号： G01N21/9503
摘要： A method and apparatus for enhancing image contrast between resist-covered and bare silicon regions of a wafer, applicable to Edge Bead Removal inspection. The wafer is illuminated separately by s-polarized light and p-polarized light impinging at near the Brewster angle of silicon or resist, and an image difference between the reflected s-polarized light and the reflected p-polarized light is derived.
摘要翻译：一种用于增强晶片的抗蚀覆盖层和裸硅区域之间的图像对比度的方法和装置，适用于边缘去除废料检查。通过在硅或抗蚀剂的布鲁斯特角附近入射的s偏振光和p偏振光分别照射晶片，并且导出反射的s偏振光和反射的p偏振光之间的图像差。

14. 发明授权

US07149642B1 Programmable image computer 有权
标题翻译：可编程图像计算机
公开(公告)号：US07149642B1
公开(公告)日：2006-12-12
申请号：US10967388
申请日：2004-10-18
申请人： Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
发明人： Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
IPC分类号： G06F15/00
CPC分类号： G06T1/0007 , G01N21/9501 , G01N21/956 , G01N2021/8825 , G01R31/311
摘要： An inspection system for detecting anomalies on a substrate. A first network is coupled to a sensor array and communicates data. Process nodes are coupled to the first network, and process the data to produce reports. Each process node has an interface card that formats the data for a high speed interface bus that is coupled to the interface card. A computer receives and processes the data to produce the report. A second network receives the reports. A job manager is coupled to the second network, receives the reports, and sends information to the process nodes to coordinate processing of the data.
摘要翻译：用于检测基板上的异常的检查系统。第一网络耦合到传感器阵列并传送数据。过程节点耦合到第一个网络，并处理数据以生成报告。每个进程节点都有一个接口卡，格式化耦合到接口卡的高速接口总线的数据。计算机接收并处理数据以生成报告。第二个网络接收报告。作业管理器耦合到第二网络，接收报告，并将信息发送到处理节点以协调数据的处理。

15. 发明授权

US4755874A Emission microscopy system 失效
标题翻译：发射显微镜系统
公开(公告)号：US4755874A
公开(公告)日：1988-07-05
申请号：US091682
申请日：1987-08-31
申请人： Paul Esrig , Eliezer Rosengaus , Ezra Van Gelder
发明人： Paul Esrig , Eliezer Rosengaus , Ezra Van Gelder
IPC分类号： G01R31/26 , G01N21/66 , G01N21/88 , G01N21/956 , G01R31/308 , G06T7/00 , H01L21/66 , H04N7/18
CPC分类号： G06T7/001 , G01N21/95607 , G01R31/308 , G01N2021/95638 , G01N21/66 , G06T2207/10056 , G06T2207/20036 , G06T2207/30148
摘要： An optical emission microscopy system with a macro optic system having a high numerical aperture for obtaining global views of an integrated circuit Device Under Test (DUT). The DUT is subjected to illumination and stimulation conditions, and images are obtained to form a "global difference" image in which defects, wherever located in the chip, can be discerned by the system operator. The operator can select apparent "defect bright spots" to be further inspected, and zoom in with the higher magnification micro optics system to repeat the image formation steps. "Difference images" are processed to further eliminate noise spots using an improved two-stage filtering operation. The system may be operated under manual or automatic control, and may be interfaced to various data input, storage, and output devices as desired.

16. 发明授权

US08600143B1 Method and system for hierarchical tissue analysis and classification 有权
标题翻译：分层组织分析和分类的方法和系统
公开(公告)号：US08600143B1
公开(公告)日：2013-12-03
申请号：US13112977
申请日：2011-05-20
申请人： Ashok V. Kulkarni , Scott Young , Eliezer Rosengaus
发明人： Ashok V. Kulkarni , Scott Young , Eliezer Rosengaus
IPC分类号： G06K9/00
CPC分类号： G06K9/6219 , G06K9/00147 , G06K9/34 , G06T7/11 , G06T7/143 , G06T2207/10004 , G06T2207/10056 , G06T2207/20076 , G06T2207/20081 , G06T2207/30024
摘要： The present invention may include segmenting an image at a first resolution level and a second resolution level, wherein one or more parameters of a segmentation algorithm are trainable via user classification feedback, extracting features from a first plurality of segment primitives and a second plurality of segment primitives, wherein one or more parameters of a segment feature extraction algorithm are trainable via user classification feedback, building a first and second segmentation hierarchy by generating one or more clusters of the first plurality of segment primitives and the second plurality of segment primitives, extracting one or more features from the first segmentation hierarchy and the second segmentation hierarchy utilizing a hierarchy feature extraction algorithm, determining an inter-level relationship between the clusters generated for the first resolution level and the second level, and automatically classifying one or more tissue elements of the tissue specimen via a user-trained classification algorithm.
摘要翻译：本发明可以包括以第一分辨率级别和第二分辨率级别分割图像，其中分割算法的一个或多个参数可经由用户分类反馈进行训练，从第一多个片段原语和第二多个片段中提取特征原语，其中段特征提取算法的一个或多个参数可经由用户分类反馈进行训练，通过生成第一多个段原语和第二多个段原语中的一个或多个簇来构建第一和第二分段层级，提取一个或更多来自第一分割层次和第二分段层次的特征，使用层次特征提取算法，确定为第一分辨率水平和第二水平生成的簇之间的层间关系，并且自动分类一个或多个组织元素组织标本通过用户训练的分类算法。

17. 发明授权

US07724362B1 Oblique incidence macro wafer inspection 有权
标题翻译：斜晶圆检查
公开(公告)号：US07724362B1
公开(公告)日：2010-05-25
申请号：US11715804
申请日：2007-03-08
申请人： Eliezer Rosengaus
发明人： Eliezer Rosengaus
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/956 , G01N2021/8822
摘要： A line image acquisition apparatus suitable for being added onto a line-scan wafer macro-inspection system which incorporates oblique incidence illumination and detection, both for brightfield and for darkfield, which incorporates double darkfield observation capability, which incorporates broadly tunable angle of incidence illumination and tunable angle of detection, which incorporates multi-channel detection into a line-scan macro-inspection system, and which is an add-on feature compatible with current line-scan macro-inspection systems.
摘要翻译：一种线图像采集装置，适用于添加到线扫描晶片宏观检查系统，该系统包括用于明场和暗场的倾斜入射照明和检测，其包括双重暗视场观察能力，其包含广泛可调的入射照明和可调谐的检测角度，将多通道检测结合到行扫描宏观检测系统中，这是与当前行扫描宏观检测系统兼容的附加功能。

18. 发明授权

US07602958B1 Mirror node process verification 有权
标题翻译：镜像节点进程验证
公开(公告)号：US07602958B1
公开(公告)日：2009-10-13
申请号：US10967418
申请日：2004-10-18
申请人： Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
发明人： Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
IPC分类号： G06K9/00
CPC分类号： G06K9/00973
摘要： An inspection image analysis system. At least one image processing computer is configured to receive and analyze at least one portion of an image. At least one test computer is configured to receive at least one common portion of the image also received by the at least one image processing computer, and to analyze the at least one common portion, using equivalent image processes as the corresponding at least one image processing computer. A job manager is configured to assign the common portion and to configure the corresponding image processing computer and the test computer to run equivalent image processes.
摘要翻译：检查图像分析系统。至少一个图像处理计算机被配置为接收和分析图像的至少一部分。至少一个测试计算机被配置为接收还由至少一个图像处理计算机接收的图像的至少一个公共部分，并且使用等效图像处理来分析该至少一个公共部分，作为对应的至少一个图像处理电脑。作业管理器被配置为分配公共部分并配置相应的图像处理计算机和测试计算机以运行等效的图像处理。

19. 发明授权

US07555409B1 Daisy chained topology 有权
标题翻译：菊花链式拓扑
公开(公告)号：US07555409B1
公开(公告)日：2009-06-30
申请号：US10967542
申请日：2004-10-18
申请人： Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
发明人： Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
IPC分类号： G06F11/30
CPC分类号： G06T1/0007 , G01N21/95684
摘要： An inspection system. The inspection system has a sensor for generating data. A first network is coupled to the sensor and communicates the data. An array of nodes is coupled to the first network, and processes the data to produce reports. Each node has an interface coupled to the first network, and formats the data according to protocol. A bus is coupled to the interface A computer is coupled to the bus, and process the data according to an algorithm, to produce the report. The array of nodes is coupled to the first network in a daisy chain topology, and each node within a column of nodes receives common data with other nodes within the column. A second network is coupled to the nodes the second network, and receives the anomaly reports from the nodes and sends information to the nodes to coordinate processing of the data.
摘要翻译：检查系统。检查系统具有用于生成数据的传感器。第一网络耦合到传感器并传送数据。节点阵列耦合到第一个网络，并处理数据以产生报告。每个节点具有耦合到第一网络的接口，并且根据协议格式化数据。总线耦合到接口A计算机耦合到总线，并且根据算法处理数据以产生报告。节点阵列以菊花链拓扑耦合到第一网络，并且节点列内的每个节点接收与列内的其他节点的公共数据。第二网络耦合到第二网络的节点，并从节点接收异常报告，并向节点发送信息以协调数据的处理。

20. 发明授权

US07176433B1 Resolution enhancement for macro wafer inspection 有权
标题翻译：宏观晶圆检查的分辨率增强
公开(公告)号：US07176433B1
公开(公告)日：2007-02-13
申请号：US10992244
申请日：2004-11-17
申请人： Eliezer Rosengaus
发明人： Eliezer Rosengaus
IPC分类号： H01L27/00 , G01N21/00 , G01N21/88 , G01N21/84
CPC分类号： G01N21/9501 , H01L27/14825
摘要： A method and apparatus for improving system resolution for a defect line scanner while not increasing aliasing effects, or alternatively to maintain system resolution for a defect scanner while decreasing aliasing effects. This is accomplished by decreasing effective pixel size for a CCD array defect line scanner while not decreasing signal-to-noise ratio, with minimal changes to the current machine. The method utilizes a sampling phase shift between successive lines of a multi-line sensor array during scanning.
摘要翻译：一种用于在不增加混叠效应的情况下改进缺陷线扫描仪的系统分辨率的方法和装置，或者替代地在减少混叠效应的同时维持缺陷扫描仪的系统分辨率。这通过减少CCD阵列缺陷线扫描器的有效像素尺寸而不降低信噪比而实现，同时对当前机器的最小变化。该方法在扫描期间利用多行传感器阵列的连续行之间的采样相移。

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