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1. 发明授权

US07417724B1 Wafer inspection systems and methods for analyzing inspection data 有权
标题翻译：晶圆检查系统和检验数据分析方法
公开(公告)号：US07417724B1
公开(公告)日：2008-08-26
申请号：US11746884
申请日：2007-05-10
申请人： Paul Sullivan , George Kren , Eliezer Rosengaus , Patrick Huet , Robinson Piramuthu , Martin Plihal , Yan Xiong
发明人： Paul Sullivan , George Kren , Eliezer Rosengaus , Patrick Huet , Robinson Piramuthu , Martin Plihal , Yan Xiong
IPC分类号： G01N21/88 , G06K9/00
CPC分类号： G01N21/9501 , G01N21/9503 , H01L21/67005 , H01L21/67288
摘要： Wafer inspection systems and methods are provided. One inspection system includes a module measurement cell coupled to a host inspection system by a wafer handler. The module measurement cell is configured to inspect a wafer using one or more modes prior to inspection of the wafer by the host inspection system. The one or more modes include backside inspection, edge inspection, frontside macro defect inspection, or a combination thereof. Another inspection system includes two or more low resolution electronic sensors arranged at multiple viewing angles. The sensors are configured to detect light returned from a wafer substantially simultaneously. A method for analyzing inspection data includes selecting a template corresponding to a support device that contacts a backside of a wafer prior to inspection of the backside of the wafer. The method also includes subtracting data representing the template from inspection data generated by inspection of the backside of the wafer.
摘要翻译：提供晶圆检查系统和方法。一个检查系统包括通过晶片处理器耦合到主机检查系统的模块测量单元。模块测量单元被配置为在主机检查系统检查晶片之前使用一种或多种模式来检查晶片。一种或多种模式包括后侧检查，边缘检查，前侧宏观缺陷检查或其组合。另一种检查系统包括以多个视角布置的两个或多个低分辨率电子传感器。传感器被配置为基本上同时检测从晶片返回的光。用于分析检查数据的方法包括在检查晶片的背面之前选择与支撑装置相对应的模板，所述支撑装置接触晶片的背面。该方法还包括从通过检查晶片的背面产生的检查数据中减去表示模板的数据。

2. 发明授权

US07227628B1 Wafer inspection systems and methods for analyzing inspection data 有权
标题翻译：晶圆检查系统和检验数据分析方法
公开(公告)号：US07227628B1
公开(公告)日：2007-06-05
申请号：US10964585
申请日：2004-10-12
申请人： Paul Sullivan , George Kren , Eliezer Rosengaus , Patrick Huet , Robinson Piramuthu , Martin Plihal , Yan Xiong
发明人： Paul Sullivan , George Kren , Eliezer Rosengaus , Patrick Huet , Robinson Piramuthu , Martin Plihal , Yan Xiong
IPC分类号： G01N21/88 , G06K9/00
CPC分类号： G01N21/9501 , G01N21/9503 , H01L21/67005 , H01L21/67288
摘要： Wafer inspection systems and methods are provided. One inspection system includes a module measurement cell coupled to a host inspection system by a wafer handler. The module measurement cell is configured to inspect a wafer using one or more modes prior to inspection of the wafer by the host inspection system. The one or more modes include backside inspection, edge inspection, frontside macro defect inspection, or a combination thereof. Another inspection system includes two or more low resolution electronic sensors arranged at multiple viewing angles. The sensors are configured to detect light returned from a wafer substantially simultaneously. A method for analyzing inspection data includes selecting a template corresponding to a support device that contacts a backside of a wafer prior to inspection of the backside of the wafer. The method also includes subtracting data representing the template from inspection data generated by inspection of the backside of the wafer.
摘要翻译：提供晶圆检查系统和方法。一个检查系统包括通过晶片处理器耦合到主机检查系统的模块测量单元。模块测量单元被配置为在主机检查系统检查晶片之前使用一种或多种模式来检查晶片。一种或多种模式包括后侧检查，边缘检查，前侧宏观缺陷检查或其组合。另一种检查系统包括以多个视角布置的两个或多个低分辨率电子传感器。传感器被配置为基本上同时检测从晶片返回的光。用于分析检查数据的方法包括在检查晶片的背面之前选择与支撑装置相对应的模板，所述支撑装置接触晶片的背面。该方法还包括从通过检查晶片的背面产生的检查数据中减去表示模板的数据。

3. 发明申请

US20060232770A1 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool 有权
公开(公告)号：US20060232770A1
公开(公告)日：2006-10-19
申请号：US11366108
申请日：2006-03-01
申请人： Paul Sullivan , George Kren , Rodney Smedt , Hans Hansen , David Shortt , Daniel Kavaldjiev , Christopher Bevis
发明人： Paul Sullivan , George Kren , Rodney Smedt , Hans Hansen , David Shortt , Daniel Kavaldjiev , Christopher Bevis
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01R31/2656 , G01R31/2831
摘要： A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching the scans together, thereby providing both damping of the specimen and the need for smaller and less expensive optical elements.

4. 发明申请

US20060082767A1 Darkfield inspection system having a programmable light selection array 有权
公开(公告)号：US20060082767A1
公开(公告)日：2006-04-20
申请号：US11297028
申请日：2005-12-07
申请人： Christopher Bevis , Paul Sullivan , David Shortt , George Kren
发明人： Christopher Bevis , Paul Sullivan , David Shortt , George Kren
IPC分类号： G01N21/88
CPC分类号： G01N21/4738 , G01N21/8806 , G01N2021/8822
摘要： An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.

5. 发明申请

US20050018179A1 Darkfield inspection system having a programmable light selection array 有权
标题翻译：具有可编程光选择阵列的暗场检查系统
公开(公告)号：US20050018179A1
公开(公告)日：2005-01-27
申请号：US10714257
申请日：2003-11-14
申请人： Christopher Bevis , Paul Sullivan , David Shortt , George Kren
发明人： Christopher Bevis , Paul Sullivan , David Shortt , George Kren
IPC分类号： G01N21/47 , G01N21/88 , G01N21/00
CPC分类号： G01N21/4738 , G01N21/8806 , G01N2021/8822
摘要： An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.
摘要翻译：检查工具实施例包括用于将光束引导到工件上以产生散射光的照明源，其包括工件的普通散射图案以及从工件的缺陷散射的光。该实施例包括可编程光选择阵列，其接收从工件散射的光并选择性地将从缺陷散射的光引导到检测缺陷信号的光电传感器上。处理电路接收缺陷信号并进行可能包括工件缺陷表征的工件的表面分析。可编程光选择阵列可以包括但不限于反射器阵列和滤波器阵列。本发明还包括相关的表面检查方法。

6. 发明授权

US08222053B2 Patterned assembly for manufacturing a solar cell and a method thereof 有权
标题翻译：用于制造太阳能电池的图案化组件及其方法
公开(公告)号：US08222053B2
公开(公告)日：2012-07-17
申请号：US12603707
申请日：2009-10-22
申请人： Paul Sullivan , Peter Nunan , Steven R. Walther
发明人： Paul Sullivan , Peter Nunan , Steven R. Walther
IPC分类号： H01L21/00 , H01L31/00
CPC分类号： H01L31/022425 , H01L31/03529 , H01L31/068 , H01L31/0682 , Y02E10/547
摘要： Apparatuses and methods for manufacturing a solar cell are disclosed. In a particular embodiment, the solar cell may be manufactured by disposing a solar cell in a chamber having a particle source; disposing a patterned assembly comprising an aperture and an assembly segment between the particle source and the solar cell; and selectively implanting first type dopants traveling through the aperture into a first region of the solar cell while minimizing introduction of the first type dopants into a region outside of the first region.
摘要翻译：公开了用于制造太阳能电池的装置和方法。在特定实施例中，太阳能电池可以通过在具有粒子源的室中设置太阳能电池来制造; 布置图案化组件，其包括孔和在所述颗粒源和所述太阳能电池之间的组件段; 以及将穿过所述孔的第一类型掺杂剂选择性地注入到所述太阳能电池的第一区域中，同时最小化将所述第一类型掺杂剂引入所述第一区域外的区域。

7. 发明授权

US07888249B2 Use of chained implants in solar cell 有权
标题翻译：在太阳能电池中使用链式植入物
公开(公告)号：US07888249B2
公开(公告)日：2011-02-15
申请号：US12760227
申请日：2010-04-14
申请人： Nicholas P. T. Bateman , Atul Gupta , Paul Sullivan , Paul J. Murphy
发明人： Nicholas P. T. Bateman , Atul Gupta , Paul Sullivan , Paul J. Murphy
IPC分类号： H01L21/425
CPC分类号： H01L31/18 , H01J37/3171 , H01J37/32412 , H01J2237/0827 , H01J2237/202 , H01J2237/31711 , H01L21/26513 , H01L21/266 , H01L31/068 , H01L31/0682 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： The manufacture of solar cells is simplified and cost reduced through by performing successive ion implants, without an intervening thermal cycle. In addition to reducing process time, the use of chained ion implantations may also improve the performance of the solar cell. In another embodiment, two different species are successively implanted without breaking vacuum. In another embodiment, the substrate is implanted, then flipped such that it can be and implanted on both sides before being annealed. In yet another embodiment, one or more different masks are applied and successive implantations are performed without breaking the vacuum condition, thereby reducing the process time.
摘要翻译：太阳能电池的制造通过执行连续的离子注入而没有中间热循环而简化并降低成本。除了缩短处理时间之外，使用链式离子注入也可以提高太阳能电池的性能。在另一个实施方案中，连续地植入两种不同的物质而不破坏真空。在另一个实施例中，植入衬底，然后翻转，使得其可以在退火之前两面植入。在另一个实施例中，施加一个或多个不同的掩模，并且在不破坏真空条件的情况下执行连续的注入，由此减少处理时间。

8. 发明申请

US20080264296A1 Biodegradable vehicle/carrier for printing ink 失效
标题翻译：用于印刷油墨的生物降解车辆/载体
公开(公告)号：US20080264296A1
公开(公告)日：2008-10-30
申请号：US12071179
申请日：2008-02-15
申请人： Calvin M. Wicker , Bharat Desai , Paul Sullivan
发明人： Calvin M. Wicker , Bharat Desai , Paul Sullivan
IPC分类号： C09D11/06 , C09D7/12 , B05D5/00
CPC分类号： C09D11/033 , C09D11/06
摘要： Embodiments of the present invention provide a composition useful as an additive to a printing ink. In one embodiment a composition is used that includes a biologically derived base material formed from one or more saturated or unsaturated straight or branched chain triglycerides or combinations thereof, wherein the triglycerides are partially to fully hydrogenated and have a viscosity between about 50 and about 200,000 centipoise at temperatures about 72 degrees Fahrenheit. In another embodiment, the composition further includes a finely divided additive selected from the group consisting of polytetrafluoroethylene or hydrogenated triglycerides in an intimate admixture with the base material. Other aspects relate to a method of making an ink additive and method for printing paper stock by letter press or lithography.
摘要翻译：本发明的实施方案提供了可用作印刷油墨添加剂的组合物。在一个实施方案中，使用包含由一种或多种饱和或不饱和的直链或支链甘油三酸酯或其组合形成的生物衍生的基础材料的组合物，其中所述甘油三酸酯部分地完全氢化并具有约50至约200,000厘泊之间的粘度在温度约72华氏度。在另一个实施方案中，所述组合物还包含与所述基材紧密混合的选自聚四氟乙烯或氢化甘油三酸酯的细碎添加剂。其它方面涉及制造油墨添加剂的方法和通过信纸印刷或光刻印刷纸料的方法。

9. 发明授权

US08912082B2 Implant alignment through a mask 有权
标题翻译：植入物通过面罩对齐
公开(公告)号：US08912082B2
公开(公告)日：2014-12-16
申请号：US13070206
申请日：2011-03-23
申请人： Nicholas P. T. Bateman , William T. Weaver , Paul Sullivan , John W. Graff
发明人： Nicholas P. T. Bateman , William T. Weaver , Paul Sullivan , John W. Graff
IPC分类号： H01L21/265 , H01L31/0224 , H01L21/266 , H01L31/18 , H01L31/068
CPC分类号： H01L21/266 , H01L31/022441 , H01L31/0682 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： Methods to form complementary implant regions in a workpiece are disclosed. A mask may be aligned with respect to implanted or doped regions on the workpiece. The mask also may be aligned with respect to surface modifications on the workpiece, such as deposits or etched regions. A masking material also may be deposited on the implanted regions using the mask. The workpiece may be a solar cell.
摘要翻译：公开了在工件中形成互补植入区域的方法。掩模可以相对于工件上的注入或掺杂区域排列。掩模也可以相对于工件上的表面改性（例如沉积物或蚀刻区域）对准。掩模材料也可以使用掩模沉积在注入区域上。工件可以是太阳能电池。

10. 发明申请

US20120276684A1 PATTERNED ASSEMBLY FOR MANUFACTURING A SOLAR CELL AND A METHOD THEREOF 有权
标题翻译：用于制造太阳能电池的图案组件及其方法
公开(公告)号：US20120276684A1
公开(公告)日：2012-11-01
申请号：US13529702
申请日：2012-06-21
申请人： Paul Sullivan , Peter Nunan , Steven R. Walther
发明人： Paul Sullivan , Peter Nunan , Steven R. Walther
IPC分类号： H01L31/18
CPC分类号： H01L31/022425 , H01L31/03529 , H01L31/068 , H01L31/0682 , Y02E10/547
摘要： Apparatuses and methods for manufacturing a solar cell are disclosed. In a particular embodiment, the solar cell may be manufactured by disposing a solar cell in a chamber having a particle source; disposing a patterned assembly comprising an aperture and an assembly segment between the particle source and the solar cell; and selectively implanting first type dopants traveling through the aperture into a first region of the solar cell while minimizing introduction of the first type dopants into a region outside of the first region.
摘要翻译：公开了用于制造太阳能电池的装置和方法。在特定实施例中，太阳能电池可以通过在具有粒子源的室中设置太阳能电池来制造; 布置图案化组件，其包括孔和在所述颗粒源和所述太阳能电池之间的组件段; 以及将穿过所述孔的第一类型掺杂剂选择性地注入到所述太阳能电池的第一区域中，同时最小化将所述第一类型掺杂剂引入所述第一区域外的区域。

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