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    • 129. 发明授权
    • Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump
    • 具有控制部分的基板涂层装置,其同步基板移动速度和输送泵
    • US08770141B2
    • 2014-07-08
    • US13377606
    • 2010-04-19
    • Yoshinori IkagawaMitsunori OdaMinoru YamamotoTakashi KawaguchiHideo HirataMasaaki Tanabe
    • Yoshinori IkagawaMitsunori OdaMinoru YamamotoTakashi KawaguchiHideo HirataMasaaki Tanabe
    • B05C11/00C23C16/52B05D1/02
    • B05C5/0262B05C5/0258B05C11/1013B05C11/1015B05C11/1023
    • A substrate coating device is provided which is capable of reducing non-uniform film thickness areas that take place in a coating start portion and a coating end portion during coating using a slit nozzle coater.The substrate coating device (10) includes at least a slider driving motor (4), a pump (8), a delivery state quantity measuring section (82), and a control section (5). The slider driving motor (4) scans a slit nozzle (1) over a substrate (100) at an established velocity relative to the substrate (100). The pump (8) controls the supply of the coating liquid to the slit nozzle (1). The delivery state quantity measuring section (82) is configured to measure a state quantity indicative of a delivery state of the coating liquid from the tip of the slit nozzle (1). The control section (5) corrects control information to be fed to the slider driving motor (4) in such a manner as to cancel out a difference between control information fed to the pump (8) and measurement information fed from the delivery state quantity measuring section (82) based on difference information indicative of the difference.
    • 提供一种基板涂布装置,其能够在使用狭缝喷嘴涂布机的涂布期间减少在涂层起始部分和涂覆端部发生的不均匀的膜厚度区域。 基板涂布装置(10)至少包括滑块驱动电机(4),泵(8),输送状态量测量部(82)和控制部(5)。 滑块驱动电机(4)以相对于基板(100)的建立速度在基板(100)上扫描狭缝喷嘴(1)。 泵(8)控制向狭缝喷嘴(1)供给涂布液。 输送状态量测量部(82)被配置为从狭缝喷嘴(1)的前端测量表示涂布液的输送状态的状态量。 所述控制部(5)以与所述输送状态量计量供给的所述测量信息和从所述输送状态量计量得到的测量信息之间的差异来取消供给到所述滑块驱动电动机(4)的控制信息, (82)基于指示差异的差异信息。