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121. 发明授权

US5983933A Shutoff-opening device 失效
标题翻译：开关装置
公开(公告)号：US5983933A
公开(公告)日：1999-11-16
申请号：US974550
申请日：1997-11-19
申请人： Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
发明人： Tadahiro Ohmi , Yuji Kawano , Keiji Hirao , Hisashi Tanaka , Naoya Masuda , Yukio Minami , Masayuki Hatano , Shigeaki Tanaka , Michio Yamaji , Hiroshi Morokoshi , Michio Kuramochi , Nobukazu Ikeda , Shigeru Itoi , Michihiro Kashiwa
IPC分类号： F16K27/00 , F15B13/00 , F15B13/08 , F17D1/02 , F16K3/00
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F16K27/003 , Y10T137/87249 , Y10T137/87684 , Y10T137/87917
摘要： A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.
摘要翻译：具有两个可自由拆卸地安装在其上的阀的阀座具有一个流入通道形成构件，该流入通道形成构件具有与设置在其一端的阀的入口连通的通道;连通通道形成构件，具有通道，所述阀的端部的出口与与其相邻的另一阀的入口连通，具有与所述另一个阀的出口连通的通道的流出通道形成构件，以及具有与入口连通的通道的子通道形成构件 - 出口端口形成在另一个阀门中。

122. 发明授权

US5950675A Backflow prevention apparatus for feeding a mixture of gases 失效
标题翻译：用于供给气体混合物的防回流装置
公开(公告)号：US5950675A
公开(公告)日：1999-09-14
申请号：US800763
申请日：1997-02-13
申请人： Yukio Minami , Nobukazu Ikeda , Manohar L. Shrestha , Satoshi Kagatsume
发明人： Yukio Minami , Nobukazu Ikeda , Manohar L. Shrestha , Satoshi Kagatsume
IPC分类号： B01J4/00 , C23C16/44 , C23C16/455 , F17D1/04 , G05D11/13 , H01L21/205 , H01L21/302 , H01L21/3065 , F17D1/02
CPC分类号： G05D11/132 , F17D1/04 , Y10T137/87684
摘要： An apparatus for mixing and feeding plural gases flowing at different mass flow rates and having different molecular weights includes a plurality of gas feed lines connected to a mixing region having an outlet for feeding a mixture of the gases to a semiconductor production apparatus. The gas feed line carrying the lowest-flow-rate gas is connected to the mixing region at a location farther from the outlet than where any other feed line is connected to the mixing region. Feed lines carrying gases other than the lowest-flow-rate gas are connected to the mixing region according to (1) the relative mass flow rates of the gases carried by the lines (2) the relative molecular weights of the gases carried by the lines or (3) the product of the respective gas flow rates and molecular weights of the gases. At least the line carrying the lowest-flow-rate gas is provided with an apparatus for increasing the velocity of the gas flowing therein prior to entry of the gas into the mixing region.
摘要翻译：用于混合和供给以不同质量流量流动并且具有不同分子量的多种气体的装置包括连接到具有用于将气体混合物供给到半导体生产装置的出口的混合区域的多个气体供给管线。承载最低流量气体的气体供给管线在距离出口更远的位置处与混合区域连接，其中任何其它进料管线连接到混合区域。携带除最低流量气体之外的气体的进料管线根据（1）线路（2）携带的气体的相对质量流量与管线携带的气体的相对分子量连接到混合区域或（3）气体的相应气体流速和分子量的乘积。至少带有最低流量气体的管线设置有用于在气体进入混合区域之前增加其中流动的气体的速度的装置。

123. 发明授权

US5720505A Pipe joint 失效
标题翻译：管接头
公开(公告)号：US5720505A
公开(公告)日：1998-02-24
申请号：US648501
申请日：1996-05-15
申请人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Tsutomu Shinohara , Kazuhiro Yoshikawa , Tetsuya Kojima
发明人： Tadahiro Ohmi , Michio Yamaji , Nobukazu Ikeda , Tsutomu Shinohara , Kazuhiro Yoshikawa , Tetsuya Kojima
IPC分类号： F16L19/02 , F16L19/03 , F16L27/08 , F16L25/00
CPC分类号： F16L19/0218 , F16L19/0212 , Y10S285/906 , Y10S285/917
摘要： A pipe joint comprises a pair of tubular joint members, an annular gasket interposed between abutting end faces of the joint members, and a nut for joining the joint members. A seal projection is formed on the abutting end face of each joint member at a position radially outward of an inner periphery of the end face. When an end of the seal projection is brought into contact with an end face of the gasket by tightening the nut, a clearance is formed between an outer flat portion of the abutting end face of each joint member and the gasket end face opposed thereto. The clearance is greater than a clearance between an inner flat portion of the abutting end face of each joint member and the gasket end face opposed thereto, and is eliminated when the nut is completely tightened up.
摘要翻译：管接头包括一对管状接头构件，插入在接头构件的邻接端面之间的环形垫圈和用于接合接头构件的螺母。在端面的内周的径向外侧的位置的每个接合构件的邻接端面上形成有密封突起。当通过拧紧螺母将密封突起的端部与垫圈的端面接触时，在每个接头构件的邻接端面的外部平坦部分和与其相对的垫圈端面之间形成间隙。间隙大于每个接头构件的邻接端面的内部平坦部分和与其相对的垫圈端面之间的间隙，并且在螺母完全拧紧时消除。

124. 发明授权

US5520492A Sliding parts and method of producing same 失效
标题翻译：滑动部件及其制造方法
公开(公告)号：US5520492A
公开(公告)日：1996-05-28
申请号：US365452
申请日：1994-12-28
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Tsutomu Shinohara , Akihiro Morimoto
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Tsutomu Shinohara , Akihiro Morimoto
IPC分类号： C25D7/10 , F16C33/12 , F16B37/00
CPC分类号： C25D7/10 , F16C33/12 , Y10S384/912 , Y10S411/90 , Y10S411/901
摘要： A sliding part having a metallic main body which is formed with a silver plating layer over a surface thereof slidable in contact with other metallic part. The silver plating layer has a crystal structure so adapted that the intensity of diffraction X-rays diffracted by the (200) plane thereof is at least 1/3 of the intensity of diffraction X-rays diffracted by the (111) plane.
摘要翻译：具有金属主体的滑动部件，该金属主体在与其他金属部件接触的表面上形成有镀银层。镀银层具有这样的结晶结构，使得其（200）面衍射的衍射X射线的强度为（111）面衍射的衍射X射线的强度的至少1/3。

125. 发明授权

US5488967A Method and apparatus for feeding gas into a chamber 失效
标题翻译：将气体送入室内的方法和装置
公开(公告)号：US5488967A
公开(公告)日：1996-02-06
申请号：US327419
申请日：1994-10-21
申请人： Yukio Minami , Nobukazu Ikeda
发明人： Yukio Minami , Nobukazu Ikeda
IPC分类号： F17D1/02 , B01J4/00 , C23C16/44 , C23C16/455 , G05D16/00 , H01L21/205 , F16K11/12
CPC分类号： C23C16/45561 , B01J4/008 , C23C16/4412 , C23C16/455 , Y10T137/0318 , Y10T137/0396 , Y10T137/86083 , Y10T137/87249 , Y10T137/87499
摘要： A vacuum deposition chamber alternately receives a reactive gas and an inert gas during a process in which a thin film is formed on a wafer in the chamber. The inert gas flows through a first pressure regulator, a first feed line and a first changeover valve into the chamber. The reactive gas flows through a second pressure regulator, a second feed line and a second changeover valve into the chamber. A vent line is connected to a vacuum pump and a pressure regulating valve which vents to the atmosphere to thereby control the vacuum pressure in the vent line. A first shunt valve is connected between the vent line and the first feed line and a second shunt valve is connected between the vent line and the second feed line. When the first changeover valve is opened to permit flow of reactive gas into the chamber, the second shunt valve is opened to evacuate the second feed line and when the second changeover valve is opened to permit flow of inert gas into the chamber, the first shunt valve is opened to evacuate the first feed line. By alternately evacuating the feed lines, pressure fluctuations which usually occur in the chamber at the time of changeover from one gas to the other, are suppressed.
摘要翻译：真空沉积室在室中的晶片上形成薄膜的过程中交替地接收反应性气体和惰性气体。惰性气体通过第一压力调节器，第一供给管线和第一转换阀流入腔室。反应性气体通过第二压力调节器，第二进料管线和第二转换阀流入室中。排气管线连接到真空泵和通向大气的压力调节阀，从而控制排气管线中的真空压力。第一分流阀连接在排气管线和第一进料管线之间，第二分流阀连接在排气管线和第二进料管线之间。当第一转换阀打开以允许反应气体流入腔室时，第二分流阀打开以排出第二进料管线，并且当第二转换阀打开以允许惰性气体流入室中时，第一分流器打开阀门以排出第一个进料管线。通过交替地排出进料管线，抑制了在从一种气体切换到另一种气体时在室中通常发生的压力波动。

126. 发明授权

US5186434A Fluid flow controller 失效
公开(公告)号：US5186434A
公开(公告)日：1993-02-16
申请号：US865241
申请日：1992-04-08
申请人： Ryutaro Nishimura , Michio Yamaji , Hirokatsu Maeda , Nobukazu Ikeda , Kenji Yamamoto
发明人： Ryutaro Nishimura , Michio Yamaji , Hirokatsu Maeda , Nobukazu Ikeda , Kenji Yamamoto
IPC分类号： F16K7/12 , F16K7/14
CPC分类号： F16K7/14
摘要： A fluid flow controller comprising a flow passage which is opened and closed by the flexing of a diaphragm secured at its periphery characterized in that the diaphragm is a laminate of a plurality of metal diaphragms and in that friction reducing material is provided between the diaphragms.

127. 发明申请

US20120241023A1 CONTROL VALVE DEVICE 审中-公开
标题翻译：控制阀装置
公开(公告)号：US20120241023A1
公开(公告)日：2012-09-27
申请号：US13508448
申请日：2010-10-29
申请人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
发明人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanikawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
IPC分类号： F16K31/128 , F16K1/34
CPC分类号： F16K31/126 , F16K1/34 , F16K25/005 , Y10T137/776
摘要： A control valve device develops opening/closing accuracy of a valve assembly. The valve head 310a is configured to open and close a transfer path formed in the valve housing 305 by transmitting the power to the valve assembly 310 from the power transmission member according to a pressure ratio between working fluid supplied to the first space Us and the second space Ls, respectively. The valve head has a Vickers hardness larger than a Vickers hardness of a valve seat of the transfer path to be in contact with the valve head, and a hardness difference therebetween is set to be about 200 Hv to about 300 Hv.
摘要翻译：控制阀装置产生阀组件的开/关精度。阀头310a被构造成通过根据供应到第一空间Us的工作流体与第二空间的第二压力之间的压力比将从动力传递构件传递到阀组件310的动力来打开和关闭形成在阀壳体305中的传送路径空间Ls。阀头的维氏硬度大于与阀头接触的传送路径的阀座的维氏硬度，并且其间的硬度差设定为约200Hv至约300Hv。

128. 发明授权

US08246087B1 Fluid coupling 有权
标题翻译：流体联轴器
公开(公告)号：US08246087B1
公开(公告)日：2012-08-21
申请号：US09437296
申请日：1999-11-09
申请人： Michio Yamaji , Tsutomu Shinohara , Nobukazu Ikeda
发明人： Michio Yamaji , Tsutomu Shinohara , Nobukazu Ikeda
IPC分类号： F16L17/00
CPC分类号： F16L23/16
摘要： Coupling members each have a fluid channel having an opening passageway orthogonal to an abutting end face of the coupling member, and a slanting main passageway communicating with the opening passageway. The opening passageway has diameter equal to the inside diameter of a gasket holding annular ridge of the coupling member. A gasket has an inside diameter smaller than the diameter of the opening passageway.
摘要翻译：联接构件各自具有流体通道，其具有与联接构件的邻接端面正交的开口通道，以及与开口通道连通的倾斜主通道。开口通道的直径等于连接构件的保持环形脊的垫圈的内径。垫圈的内径小于开口通道的直径。

129. 发明授权

US08210022B2 Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same 有权
标题翻译：压力式流量控制参考和耐腐蚀压力式流量控制器用于相同
公开(公告)号：US08210022B2
公开(公告)日：2012-07-03
申请号：US12332897
申请日：2008-12-11
申请人： Shuji Moriya , Wataru Okase , Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Yasutaka Hayashi , Toshihide Yoshida , Yasuyuki Omata
发明人： Shuji Moriya , Wataru Okase , Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Yasutaka Hayashi , Toshihide Yoshida , Yasuyuki Omata
IPC分类号： G01F25/00 , G05D7/06
CPC分类号： G05D7/0635 , Y10T137/2708 , Y10T137/776 , Y10T137/7761 , Y10T137/7793
摘要： A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.
摘要翻译：压力式流量控制参考允许以低成本执行流量控制器对所有类型气体（包括腐蚀性气体）的流量校准，并且还具有优异的流量控制精度。压力型流量控制基准包括用于调节来自校准气体供给源的校准气体的压力的压力控制器，设置在压力控制器的下游侧的第一容积，未校准的流量控制器的第一连接口，在第一容积的下游侧具有与未校准流量控制器的下游侧的第二连接口连接的基准压力型流量控制器，设置在基准压力型流量控制器的下游侧的第二容积，以及设置在第二容积的下游侧的抽空装置。

130. 发明授权

US07935385B2 Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas 失效
标题翻译：在其上形成有氧化铬钝化膜的金属材料及其制造方法，以及与流体接触的部件和用于供应流体和排出气体的系统
公开(公告)号：US07935385B2
公开(公告)日：2011-05-03
申请号：US10646855
申请日：2003-08-21
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Nobukazu Ikeda , Eiji Ideta , Akihiro Morimoto , Tetsutaro Ogushi , Takehisa Konishi
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Nobukazu Ikeda , Eiji Ideta , Akihiro Morimoto , Tetsutaro Ogushi , Takehisa Konishi
IPC分类号： B05D3/02 , B05D3/04 , C25D5/50
CPC分类号： C23C8/02 , C23C26/00 , Y10T428/24322 , Y10T428/24355 , Y10T428/31678
摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm
摘要翻译：本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。本发明包括以下步骤：在涂覆表面的粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜

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