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1. 发明授权

US5950675A Backflow prevention apparatus for feeding a mixture of gases 失效
标题翻译：用于供给气体混合物的防回流装置
公开(公告)号：US5950675A
公开(公告)日：1999-09-14
申请号：US800763
申请日：1997-02-13
申请人： Yukio Minami , Nobukazu Ikeda , Manohar L. Shrestha , Satoshi Kagatsume
发明人： Yukio Minami , Nobukazu Ikeda , Manohar L. Shrestha , Satoshi Kagatsume
IPC分类号： B01J4/00 , C23C16/44 , C23C16/455 , F17D1/04 , G05D11/13 , H01L21/205 , H01L21/302 , H01L21/3065 , F17D1/02
CPC分类号： G05D11/132 , F17D1/04 , Y10T137/87684
摘要： An apparatus for mixing and feeding plural gases flowing at different mass flow rates and having different molecular weights includes a plurality of gas feed lines connected to a mixing region having an outlet for feeding a mixture of the gases to a semiconductor production apparatus. The gas feed line carrying the lowest-flow-rate gas is connected to the mixing region at a location farther from the outlet than where any other feed line is connected to the mixing region. Feed lines carrying gases other than the lowest-flow-rate gas are connected to the mixing region according to (1) the relative mass flow rates of the gases carried by the lines (2) the relative molecular weights of the gases carried by the lines or (3) the product of the respective gas flow rates and molecular weights of the gases. At least the line carrying the lowest-flow-rate gas is provided with an apparatus for increasing the velocity of the gas flowing therein prior to entry of the gas into the mixing region.
摘要翻译：用于混合和供给以不同质量流量流动并且具有不同分子量的多种气体的装置包括连接到具有用于将气体混合物供给到半导体生产装置的出口的混合区域的多个气体供给管线。承载最低流量气体的气体供给管线在距离出口更远的位置处与混合区域连接，其中任何其它进料管线连接到混合区域。携带除最低流量气体之外的气体的进料管线根据（1）线路（2）携带的气体的相对质量流量与管线携带的气体的相对分子量连接到混合区域或（3）气体的相应气体流速和分子量的乘积。至少带有最低流量气体的管线设置有用于在气体进入混合区域之前增加其中流动的气体的速度的装置。

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