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    • 122. 发明授权
    • Multi-step flow cleaning method and multi-step flow cleaning apparatus
    • 多步流动清洗方法和多步流动清洗装置
    • US06432218B1
    • 2002-08-13
    • US09402877
    • 1999-12-07
    • Masatoshi HirokawaHaruki SonodaYusuke AbeTetsuji OishiMasashi OmoriHiroshi Tanaka
    • Masatoshi HirokawaHaruki SonodaYusuke AbeTetsuji OishiMasashi OmoriHiroshi Tanaka
    • B08B310
    • B08B3/10Y10S134/902
    • A multi-step flow cleaning method and a multi-step flow cleaning apparatus are provided which effectively clean workpieces with a stream of a cleaning solution and to suppress an increase of foreign matters adhering to the surfaces of the workpieces. A cleaning tank 10 for holding workpieces is provided, a supply line 14 for supplying a cleaning solution such as pure water from the bottom surface of the cleaning tank is provided, and a valve 12 for adjusting the flow of the cleaning solution is disposed in the middle of the supply line 14. The valve 12 is equipped with a switching section 12a for controlling the outflow of the cleaning solution by opening or closing the supply line 14, and a bypass 12b for supplying the cleaning solution, bypassing the switching section 12a. The valve 12 is provided such that it is able to adjust in two steps the supply flow of the cleaning solution supplied to the cleaning tank 10 by using the supply flow fed through the bypass 12b and the supply flow fed through the switching section 12a.
    • 提供了一种多级流动清洗方法和多级流动清洁装置,其用清洁液流清洁工件,并且抑制附着在工件表面上的异物的增加。 设置有用于保持工件的清洁槽10,用于从清洗槽的底面供给纯净水等清洗液的供给管路14,将清洗液的流量调整用阀12配置在 阀12配备有用于通过打开或关闭供应管线14来控制清洗溶液的流出的切换部分12a和绕过切换部分12a的清洁溶液供给的旁路12b。 阀12设置成使得能够通过使用通过旁路12b供给的供给流和通过切换部12a供给的供给流,分两步调整供给到清洗槽10的清洗溶液的供给流。
    • 125. 发明授权
    • Cooling device boiling and condensing refrigerant
    • 冷却装置沸腾冷凝制冷剂
    • US06360814B1
    • 2002-03-26
    • US09638631
    • 2000-08-14
    • Hiroshi TanakaTadayoshi TeraoEitaro TanakaTakahide OharaKiyoshi Kawaguchi
    • Hiroshi TanakaTadayoshi TeraoEitaro TanakaTakahide OharaKiyoshi Kawaguchi
    • F28D1500
    • H05K7/20681F28D15/0266H01L23/427H01L2924/0002H01L2924/00
    • A cooling device for cooling a heat-generating member includes a refrigerant tank for boiling liquid refrigerant by heat from the heat-generating member and a radiator for cooling and condensing gas refrigerant from the refrigerant tank. The refrigerant tank has therein a plurality of refrigerant passages defined by ribs which are integrally formed with any one of opposite wall parts of the refrigerant tank. The ribs continuously extend in an up-down direction to be slightly longer than an up-down dimension of a boiling surface of the refrigerant tank. In the cooling device, because each passage width of the refrigerant passages is set to be equal to or smaller than double Laplace length, an outer diameter of bubbles in the refrigerant passages becomes larger, and liquid refrigerant can be moved upwardly by bubbles. Accordingly, it can restrict liquid refrigerant surface from being lowered even when gas-generating amount is increased.
    • 用于冷却发热构件的冷却装置包括:用于通过来自发热构件的热量的液体制冷剂的冷却罐和用于冷却和冷凝来自制冷剂罐的气体制冷剂的散热器。 制冷剂罐具有与制冷剂罐的相对壁部中的任一个一体形成的多个由肋限定的制冷剂通路。 肋沿上下方向连续延伸,比制冷剂罐的沸腾面的上下尺寸略长。 在冷却装置中,由于制冷剂流路的各通路宽度被设定为拉伸倍率的2倍以下,所以制冷剂通路内的气泡的外径变大,液体制冷剂能够向上方移动。 因此,即使气体产生量增加,也可以限制液体制冷剂表面的降低。
    • 126. 发明授权
    • Picture image outputting method and photograph finishing system using the method
    • 使用该方法的图像输出方法和照片整理系统
    • US06346998B2
    • 2002-02-12
    • US08974888
    • 1997-11-20
    • Kazuo ShiotaShuichi OhtsukaNobuyoshi NakajimaNorihisa HanedaSugio MakishimaHiroshi Tanaka
    • Kazuo ShiotaShuichi OhtsukaNobuyoshi NakajimaNorihisa HanedaSugio MakishimaHiroshi Tanaka
    • H04N104
    • H04N1/04G06F15/00H04N1/00915H04N1/0096H04N1/32502H04N1/32512H04N1/32529H04N1/32561H04N2201/0081H04N2201/0082H04N2201/0086H04N2201/0087H04N2201/0408H04N2201/0416
    • A plurality of picture image data obtained from a film in one film handling operation by a film scanner with the automatic film feeding function are output as prints by a digital printer and also as files in a recording medium by a file outputting device. In the system for providing the above two kinds of output services, the numbers of film scanners, file outputting devices, and digital printers are determined so that the processing performance of each kind of apparatus in a unit time times the number of each kind of apparatus is almost the same, to make each kind of apparatus comprising the system demonstrate its full performance. A medium image obtaining device for obtaining an image file recorded in a medium and a digital camera image obtaining device may further be provided so that the above two outputting services are promptly provided for a picture image such as a processed image recorded in a medium and brought into a service provider by a customer and a picture image recorded by a digital camera, whereby one system can carry out film reading, image obtaining from a medium or a digital camera, picture print generation, and writing a picture image in a recording medium.
    • 由具有自动胶片馈送功能的胶片扫描器的一次胶片处理操作中的胶片获得的多个图像图像数据由数字打印机输出作为打印,并且还通过文件输出装置作为记录介质中的文件输出。 在用于提供上述两种输出服务的系统中,确定胶片扫描器,文件输出装置和数字打印机的数量,使得每种装置的处理性能在单位时间内乘以各种装置的数量 几乎相同,使得包括该系统在内的每一种装置表现出其全部性能。 还可以提供用于获得记录在介质中的图像文件的媒质图像获取装置和数字照相机图像获取装置,以便迅速地为记录在介质中的处理图像等图像图像提供上述两种输出服务, 客户输入服务提供商和由数码相机记录的图像图像,由此一个系统可以执行胶片读取,从介质或数字照相机获得的图像,图像打印生成,以及将图像图像写入记录介质中。
    • 127. 发明授权
    • Wafer holding head and wafer polishing apparatus, and method for manufacturing wafers
    • 晶片保持头和晶片抛光装置及其制造方法
    • US06242353B1
    • 2001-06-05
    • US09525322
    • 2000-03-13
    • Tatsunori KobayashiHiroshi TanakaNaoki Rikita
    • Tatsunori KobayashiHiroshi TanakaNaoki Rikita
    • H01L2100
    • B24B37/30B24B37/32B24B49/16H01L21/30625
    • The present invention provides wafer polishing apparatus in which the wafer holding head comprises a diaphragm substantially vertically expanded to the head axis in the head body; a carrier, which is fixed to the diaphragm and provided so as to be able to displace along the head axis direction together with the diaphragm; a retainer fixed to the diaphragm in a concentric relation to the carrier; a pressure adjusting mechanism for controlling the pressure of a fluid chamber formed between the diaphragm and the head body; a plurality of carrier torque mechanisms provided between the head body and the carrier for communicating the torque of the head body to the carrier; a plurality of first sensors, which is provided at individual torque transfer mechanism, for observing the force along the direction of rotation acting on the wafer; and a processor, which is connected to each first sensor, for calculating the force acting on the wafer based on the output from these first sensors.
    • 本发明提供晶片抛光装置,其中晶片保持头包括基本垂直地扩大到头部主体中的头轴线的隔膜; 载体,其固定在隔膜上并且设置成能够与隔膜一起沿着头轴线方向移位; 固定在所述隔膜上并与载体同心的保持架; 用于控制形成在隔膜和头体之间的流体室的压力的压力调节机构; 多个载体扭矩机构,其设置在所述头本体和所述载体之间,用于将所述头本体的扭矩传递到所述载体; 设置在各个扭矩传递机构处的多个第一传感器,用于观察沿着作用在晶片上的旋转方向的力; 以及连接到每个第一传感器的处理器,用于基于来自这些第一传感器的输出来计算作用在晶片上的力。
    • 130. 发明授权
    • Ultrasonic cleaning apparatus
    • 超声波清洗设备
    • US6138698A
    • 2000-10-31
    • US196010
    • 1998-11-19
    • Hiroshi TanakaShigenori KitaharaKokichi Hiroshiro
    • Hiroshi TanakaShigenori KitaharaKokichi Hiroshiro
    • B08B3/12H01L21/00
    • H01L21/67057B08B3/12H01L21/67051Y10S134/902
    • An ultrasonic cleaning apparatus has an intermediate tank having a space divided into a liquid storing region (2a) and a liquid recovering region (2b) by a partition plate (5). An ultrasonic unit (3) is disposed in the bottom of the liquid storing region (2a). A vibration propagating liquid, such as pure water, is contained in the liquid storing region (2a) and a lower part of a cleaning tank (1) is immersed in the vibration propagating liquid stored in the liquid storing region (2a). The partition plate (5) is provided in its upper edge (5c) with a plurality of V-shaped notches (9). A nozzle pipe (4) provided with a plurality of nozzle holes (4a) is disposed in a side of the liquid storing region (2a) opposite a side in which the partition plate (5) is disposed. Pure water jetted by the nozzle pipe (4) toward the outer surface (1a) of the bottom wall of the cleaning tank (1) flows along the outer surface (1a) and overflows the partition plate (5) into the liquid recovering region (2b).
    • 超声波清洗装置具有通过分隔板(5)具有分成液体储存区域(2a)和液体回收区域(2b)的空间的中间罐。 超声波单元(3)设置在液体存储区域(2a)的底部。 在液体存储区域(2a)中包含诸如纯水的振动传播液体,并且清洗槽(1)的下部浸没在存储在液体存储区域(2a)中的振动传播液体中。 分隔板(5)在其上边缘(5c)中设置有多个V形凹口(9)。 设置有多个喷嘴孔(4a)的喷嘴管(4)设置在与设置有隔板(5)的一侧相对的液体存储区域(2a)的一侧。 由喷嘴管(4)向清洗槽(1)的底壁的外表面(1a)喷射的纯水沿着外表面(1a)流动,并将分隔板(5)溢流到液体回收区域 2b)。