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    • 115. 发明专利
    • Aqueous abrasive grain dispersion medium composition, aqueous slurry for working and working method using them
    • 水性磨粒分散中成分,使用它们的工作和工作方法的水性浆料
    • JP2006278773A
    • 2006-10-12
    • JP2005096261
    • 2005-03-29
    • Yushiro Chem Ind Co Ltdユシロ化学工業株式会社
    • KIKUCHI SHINGONAKADA HIDETO
    • H01L21/304B24B27/06B28D5/04C09K3/14
    • PROBLEM TO BE SOLVED: To provide an aqueous abrasive grain dispersion medium composition having excellent stability in the dispersion of abrasive grains and excellent stability of viscosity, aqueous slurry for working, and a working method using these components. SOLUTION: The aqueous abrasive grain dispersion medium composition contains glycols (e.g. propylene glycol, etc.) and/or aqueous ether (e.g. diethylene glycol monobuthyl ether, etc.) and grains (e.g. Al 2 O 3 grains) of which the zeta potential is ≥0 mV. The aqueous slurry for working contains the aqueous abrasive grain dispersion medium composition and abrasive grains (e.g. silicon carbide, etc.). In the working method, cutting work, grinding work, polishing work, or disconnecting work is performed by using the aqueous abrasive grain dispersion medium composition or the aqueous slurry for working. In the other working method, wire saw working or band saw working is performed by using the aqueous abrasive grain dispersion medium composition or the aqueous slurry for working. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种在磨粒分散中具有优异稳定性和优异的粘度稳定性的水性磨粒分散介质组合物,用于加工的水性浆料以及使用这些组分的工作方法。 解决方案:水性磨料颗粒分散介质组合物含有二醇(例如丙二醇等)和/或含水醚(例如二甘醇单丁醚等)和颗粒(例如Al 2 ζ电位≥0mV的O 3 晶粒)。 用于加工的含水浆料包含水性磨料颗粒分散介质组合物和磨料颗粒(例如碳化硅等)。 在工作方法中,通过使用含水磨料颗粒分散介质组合物或用于加工的含水浆料进行切削加工,研磨加工,抛光加工或断开加工。 在另一种工作方法中,通过使用含水磨料颗粒分散介质组合物或用于加工的含水浆料进行线锯加工或带锯加工。 版权所有(C)2007,JPO&INPIT