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    • 101. 发明授权
    • Method for manufacturing thin film magnetic head
    • 制造薄膜磁头的方法
    • US06305072B1
    • 2001-10-23
    • US08979965
    • 1997-11-26
    • Hiroaki YodaSusumu HashimotoMichiko HaraMasashi Sahashi
    • Hiroaki YodaSusumu HashimotoMichiko HaraMasashi Sahashi
    • G11B542
    • B82Y10/00G11B5/3116G11B5/313G11B5/3163G11B5/3967Y10T29/49044Y10T29/49046
    • When manufacturing a thin film magnetic head in which an upper magnetic pole is formed on a lower magnetic pole through a magnetic gap, firstly, at least on the lower magnetic pole, a convex portion possessing the width equivalent to a track width is formed. The convex portion forms a lower magnetic pole tip. Conforming to a contour of the convex shape of the lower magnetic pole, a non-magnetic material layer is formed. A flattening layer is formed on the non-magnetic material layer. The non-magnetic layer is etched with the flattening layer, for example, as a mask. In the non-magnetic material layer, a concave portion self-aligned to the lower portion magnetic pole top (convex portion) is formed. Inside the concave portion, a magnetic layer (upper magnetic pole tip) destined to be a part of the upper magnetic pole is formed. As to the lower magnetic pole tip and the upper magnetic pole tip, the widths of surfaces opposite to the magnetic gap are almost equal, and the central positions thereof almost overlap each other. Thus, a narrow track head structure with high accuracy can be obtained.
    • 当通过磁隙制造在下磁极上形成上磁极的薄膜磁头时,首先至少在下磁极上形成具有与磁道宽度相等的宽度的凸部。 凸部形成下磁极末端。 符合下磁极的凸形轮廓,形成非磁性材料层。 在非磁性材料层上形成平坦化层。 用平坦化层,例如作为掩模蚀刻非磁性层。 在非磁性材料层中,形成与下部磁极顶部(凸部)自对准的凹部。 在凹部内部形成着作为上磁极的一部分的磁性层(上磁极端)。 对于下磁极尖端和上磁极尖端,与磁隙相反的表面的宽度几乎相等,并且其中心位置几乎彼此重叠。 因此,可以获得高精度的窄轨道头结构。
    • 105. 发明授权
    • Magnetoresistance effect head
    • 磁阻效应头
    • US5585199A
    • 1996-12-17
    • US303014
    • 1994-09-08
    • Yuzo KamiguchiSusumu HashimotoHitoshi IwasakiYuichi OhsawaMasashi Sahashi
    • Yuzo KamiguchiSusumu HashimotoHitoshi IwasakiYuichi OhsawaMasashi Sahashi
    • G11B5/012G11B5/39H01F10/32H01F1/00G11B21/00
    • B82Y25/00B82Y10/00G11B5/3903H01F10/3281G11B2005/3996G11B5/012H01F10/3295Y10S428/928Y10T428/12465Y10T428/12535
    • A magnetoresistance effect head is disclosed which is provided with a spin valve film of the three-layer laminate construction comprising a pair of magnetic layers made of a Co-based alloy and a nonmagnetic intermediate layer interposed between the pair of magnetic layers. This magnetoresistance effect head satisfies the expressions, 3.ltoreq.d.sub.1 .ltoreq.7, 3.ltoreq.d.sub.2 .ltoreq.7, and 0.ltoreq. (d.sub.1 -d.sub.2)/d.sub.1 .ltoreq.0.40, wherein d.sub.1 and d.sub.2 stand for the thicknesses (nm) of the pair of magnetic layers (providing d.sub.1 .gtoreq.d.sub.2). A soft magnetic layer of high resistance is disposed contiguously to that of the pair of magnetic layers which has the direction of magnetization thereof varied by an external magnetic layer. The total thickness of this soft magnetic layer and the magnetic layer contiguous thereto is in the range of from 5 to 40 nm. In the case of a magnetoresistance effect head which is provided with a spin valve film of the five-layer laminate construction, the thicknesses (nm), d.sub.1 and d.sub.2, of the two outer magnetic layers similarly satisfy the conditions mentioned above. Further, the thickness (nm), d.sub.3, of the center magnetic layer satisfies the expression, 1.ltoreq.d.sub.3 .ltoreq.2/3d.sub.1. As a result, the magnetoresistance effect head acquires the ability to produce a large rate of change of magnetic resistance with high repeatability.
    • 公开了一种磁阻效应头,其具有三层层压结构的自旋阀膜,该三层层压结构包括一对由Co基合金制成的磁性层和介于该一对磁性层之间的非磁性中间层。 该磁电阻效应头满足表达式,其中d1和d2表示为3 / = d2)。 高电阻的软磁性层与具有由外部磁性层变化的磁化方向的一对磁性层的磁性层相邻设置。 该软磁性层和与其相邻的磁性层的总厚度为5〜40nm的范围。 在具有五层层叠结构的自旋阀膜的磁阻效应头的情况下,两个外磁层的厚度(nm),d1和d2类似地满足上述条件。 此外,中心磁性层的厚度(nm),d3满足表达式1,d3,其中E 2, 结果,磁阻效应头获得以高重复性产生大的磁阻变化率的能力。