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    • 105. 发明申请
    • Dielectric materials to prevent photoresist poisoning
    • 介电材料防止光致抗蚀剂中毒
    • US20050014361A1
    • 2005-01-20
    • US10847891
    • 2004-05-18
    • Son NguyenMichael ArmacostMehul NaikGirish DixitEllie Yieh
    • Son NguyenMichael ArmacostMehul NaikGirish DixitEllie Yieh
    • H01L21/4763H01L21/768
    • H01L21/76808
    • Methods are provided for depositing a dielectric material for use as an anti-reflective coating and sacrificial dielectric material in damascene formation. In one aspect, a process is provided for processing a substrate including depositing an acidic dielectric layer on the substrate by reacting an oxygen-containing organosilicon compound and an acidic compound, depositing a photoresist material on the acidic dielectric layer, and patterning the photoresist layer. The acidic dielectric layer may be used as a sacrificial layer in forming a feature definition by etching a partial feature definition, depositing the acidic dielectric material, etching the remainder of the feature definition, and then removing the acidic dielectric material to form a feature definition.
    • 提供了用于沉积电介质材料的方法,用作防蚀涂层和牺牲电介质材料在镶嵌形成中。 在一个方面,提供了一种处理衬底的方法,包括通过使含氧有机硅化合物和酸性化合物反应,在酸性电介质层上沉积光致抗蚀剂材料,并使光致抗蚀剂层图形化,在衬底上沉积酸性介电层。 通过蚀刻部分特征定义,沉积酸性电介质材料,蚀刻特征定义的其余部分,然后除去酸性介电材料以形成特征定义,可以将酸性介电层用作形成特征定义的牺牲层。
    • 106. 发明授权
    • Methods for measuring a bio-material for use in an implant
    • 用于测量植入物中使用的生物材料的方法
    • US06553681B2
    • 2003-04-29
    • US10135717
    • 2002-04-30
    • Carl Roger Ekholm, Jr.Son NguyenRichard L. PeloquinRobert GlinieckiTodd BaetenSuzanne E. GraumlichSteven Eric Backer
    • Carl Roger Ekholm, Jr.Son NguyenRichard L. PeloquinRobert GlinieckiTodd BaetenSuzanne E. GraumlichSteven Eric Backer
    • G01B520
    • G01B21/08A61F2/2415G01B5/207G01B5/26G01B11/245
    • A system and method to facilitate thickness measurement of bio-material workpiece, preferably a sheet, and to topographically map the sheet into similar thickness zones for later use. In particular, the system may include a three-axis programmable controller for manipulating a bio-material workpiece with respect to a thickness measurement head. The measurement head may include a plurality of sensors for simultaneous measurement of a plurality of points, with the sensors being adapted to contact the sheet or not. A robust human-machine interface is also provided for process control, preferably including a touch-screen monitor. A marking head may be provided for marking the zones or otherwise indicating the thickness in different areas. Two platens are desirably used in parallel for increased thoughput; the workpiece on one platen may be measured while the other is marked. The system and method are especially suited for assessing and marking pericardial tissue for forming heart valve leaflets. The system may also include logic that analyzes the thickness data and generates a thickness map of the sheet divided into similar thickness zones from which similarly sized leaflets can be cut. A preferred thickness of leaflet may be input with the logic selecting the zones to maximize the available tissue for that size of leaflet.
    • 一种促进生物材料工件(优选为片材)的厚度测量的系统和方法,并将该片材地形地映射到相似的厚度区域以备以后使用。 特别地,该系统可以包括用于相对于厚度测量头操纵生物材料工件的三轴可编程控制器。 测量头可以包括用于同时测量多个点的多个传感器,传感器适于接触片材。 还提供用于过程控制的强大的人机界面,优选地包括触摸屏监视器。 可以提供标记头用于标记区域或以其他方式指示不同区域中的厚度。 两个压板最好平行用于增加的通量; 可以测量一个压板上的工件,而另一个被标记。 该系统和方法特别适用于评估和标记用于形成心脏瓣膜小叶的心包组织。 该系统还可以包括分析厚度数据并生成被分成相似厚度区域的片材的厚度图的逻辑,从其可以切割类似大小的传单。 可以用选择区域的逻辑输入传单的优选厚度,以使针对该大小的小叶最大化可用组织。
    • 109. 发明授权
    • Corrosion/etching protection in integration circuit fabrications
    • 集成电路制造中的腐蚀/蚀刻保护
    • US09054109B2
    • 2015-06-09
    • US13482352
    • 2012-05-29
    • Wei LinSon NguyenVamsi ParuchuriTuan A. Vo
    • Wei LinSon NguyenVamsi ParuchuriTuan A. Vo
    • H01L23/532H01L21/768
    • H01L23/53238H01L21/76829H01L21/76834H01L21/76888H01L23/5329H01L23/53295H01L2924/0002H01L2924/00
    • A method of producing reduced corrosion interconnect structures and structures thereby formed. A method of producing microelectronic interconnects having reduced corrosion begins with a damascene structure having a first dielectric and a first interconnect. A metal oxide layer is deposited selectively to metal or nonselective over the damascene structure and then thermally treated. The treatment converts the metal oxide over the first dielectric to a metal silicate while the metal oxide over the first interconnect remains as a self-aligned protective layer. When a subsequent dielectric stack is formed and patterned, the protective layer acts as an etch stop, oxidation barrier and ion bombardment protector. The protective layer is then removed from the patterned opening and a second interconnect formed. In a preferred embodiment the metal oxide is a manganese oxide and the metal silicate is a MnSiCOH, the interconnects are substantially copper and the dielectric contains ultra low-k.
    • 从而形成减少的腐蚀互连结构和结构的方法。 具有减少的腐蚀的微电子互连的制造方法从具有第一电介质和第一互连的镶嵌结构开始。 金属氧化物层选择性沉积在金属或非选择性的镶嵌结构上,然后进行热处理。 处理将第一电介质上的金属氧化物转化为金属硅酸盐,同时第一互连上的金属氧化物保持为自对准保护层。 当形成并图案化后续的电介质堆叠时,保护层起蚀刻停止,氧化屏障和离子轰击保护的作用。 然后从图案化的开口去除保护层,形成第二互连。 在优选的实施方案中,金属氧化物是氧化锰,金属硅酸盐是MnSiCOH,互连基本上是铜,并且电介质包含超低k。
    • 110. 发明授权
    • Locking nut assembly
    • 锁紧螺母总成
    • US08920129B2
    • 2014-12-30
    • US13308975
    • 2011-12-01
    • Thomas HarbinTung LeSon Nguyen
    • Thomas HarbinTung LeSon Nguyen
    • F16B39/02F04D29/054F01D5/02
    • F16B39/02F01D5/026F04D29/054
    • A locking nut assembly including a bearing nut having a plurality of external serrations, a shaft nut having a plurality of external serrations, and a locking collar having a plurality of internal serrations. The bearing nut and the shaft nut are threadedly installed on a shaft assembly having an impeller, a bearing, and a spline adapter installed within the impeller. The plurality of serrations of the bearing nut align with the plurality of serrations of the shaft nut when they are installed on the impeller. The locking collar is installed on the bearing nut and the shaft nut so that the aligned plurality of serrations of the bearing nut and the plurality of serrations of the shaft nut engage the plurality of serrations of the locking collar. The locking collar is retained on the bearing nut and shaft nut by a retaining ring.
    • 一种锁定螺母组件,包括具有多个外部锯齿的轴承螺母,具有多个外部锯齿的轴螺母和具有多个内部锯齿的锁定套环。 轴承螺母和轴螺母螺纹安装在轴组件上,轴组件具有安装在叶轮内的叶轮,轴承和花键适配器。 当它们安装在叶轮上时,轴承螺母的多个锯齿与轴螺母的多个锯齿对准。 锁定轴环安装在轴承螺母和轴螺母上,使得轴承螺母的对齐的多个锯齿和轴螺母的多个锯齿接合锁定轴环的多个锯齿。 锁定环通过固定环保持在轴承螺母和轴螺母上。