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    • 92. 发明授权
    • Semiconductor device having gate insulating film including high dielectric material
    • 具有包括高电介质材料的栅极绝缘膜的半导体器件
    • US08558321B2
    • 2013-10-15
    • US13005085
    • 2011-01-12
    • Hiroji ShimizuYoshihiro SatoHideyuki AraiTakayuki YamadaTsutomu Oosuka
    • Hiroji ShimizuYoshihiro SatoHideyuki AraiTakayuki YamadaTsutomu Oosuka
    • H01L21/40
    • H01L27/0629H01L28/20
    • A semiconductor device includes: a first MIS transistor of a first conductivity type having a first active region as a region of a semiconductor substrate surrounded by an element isolation region formed in an upper portion of the semiconductor substrate, a first gate insulating film having a first high dielectric film formed on the first active region, and a first gate electrode formed on the first gate insulating film; and a resistance element having a second high dielectric film formed on the element isolation region and a resistance layer made of silicon formed on the second high dielectric film. The first high dielectric film and the second high dielectric film include the same high dielectric material, and the first high dielectric film includes a first adjustment metal, but the second high dielectric film does not include the first adjustment metal.
    • 一种半导体器件包括:第一导电类型的第一MIS晶体管,具有作为由半导体衬底的上部形成的元件隔离区围绕的半导体衬底的区域的第一有源区,第一栅绝缘膜, 形成在第一有源区上的高电介质膜和形成在第一栅极绝缘膜上的第一栅电极; 以及电阻元件,其具有形成在元件隔离区域上的第二高电介质膜和形成在第二高介电膜上的由硅制成的电阻层。 第一高介电膜和第二高电介质膜包括相同的高介电材料,第一高电介质膜包括第一调节金属,但第二高电介质膜不包括第一调节金属。