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91. 发明授权

US06763255B2 Shunt barrier in pulse oximeter sensor 有权
标题翻译：脉搏血氧饱和度传感器中的分流屏障
公开(公告)号：US06763255B2
公开(公告)日：2004-07-13
申请号：US10194156
申请日：2002-07-12
申请人： Russ DeLonzor , Paul D. Mannheimer , Michael E. Fein , Don Hannula
发明人： Russ DeLonzor , Paul D. Mannheimer , Michael E. Fein , Don Hannula
IPC分类号： A61B500
CPC分类号： A61B5/6826 , A61B5/14552 , A61B5/6838 , A61B2562/08
摘要： A pulse oximeter sensor having an emitter(s) and a detector, with a layer having a first portion of the emitter and a second portion of layer over the detector is provided. A barrier is included between the first and second portions of the overlying layer to substantially block radiation of the wavelengths emitted by the emitter(s). Preferably, the barrier reduces the radiation shunted to less than 10% of the radiation detected, and more preferably to less than 1% of the radiation detected.
摘要翻译：具有发射器和检测器的脉冲血氧计传感器，其具有发射器的第一部分和检测器上的第二部分层的层。在上覆层的第一和第二部分之间包括屏障，以基本上阻挡由发射器发射的波长的辐射。优选地，屏障将被分流的辐射减少到所检测的辐射的小于10％，更优选地小于检测到的辐射的1％。

92. 发明授权

US06584218B2 Automated photomask inspection apparatus 有权
公开(公告)号：US06584218B2
公开(公告)日：2003-06-24
申请号：US10003166
申请日：2001-11-14
申请人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
发明人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
IPC分类号： G06K900
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

93. 发明授权

US06571113B1 Oximeter sensor adapter with coding element 有权
标题翻译：具有编码元件的血氧计传感器适配器
公开(公告)号：US06571113B1
公开(公告)日：2003-05-27
申请号：US09668127
申请日：2000-09-21
申请人： Michael E. Fein , Bradford B. Chew
发明人： Michael E. Fein , Bradford B. Chew
IPC分类号： A61B500
CPC分类号： A61B5/14552
摘要： An oximeter sensor adapter which allows a sensor without a resistor in parallel with its LEDs to operate with an oximeter expecting such a resistor in parallel. The adapter includes LED drive electronics and appropriate oximeter drive current sensing circuitry for converting the drive signals from the oximeter into appropriate LED drive signals for the sensor. Instead of a resistor being on the sensor in parallel with one or more of the LEDs, the resistor is placed across the leads in front of the LED drive electronics and oximeter drive current sensing circuitry, on the oximeter side of the adapter. By providing LED drive electronics and oximeter drive current sensing circuitry which do not draw significant current at a low voltage, the oximeter is able to measure the resistor independently just as if it were in parallel with the LEDs.
摘要翻译：一个血氧计传感器适配器，允许一个传感器没有与其并联的电阻器与一个期望并联电阻器的血氧计一起工作。适配器包括LED驱动电子器件和适当的血氧仪驱动电流检测电路，用于将来自血氧计的驱动信号转换成用于传感器的适当的LED驱动信号。代替与一个或多个LED并联的传感器上的电阻器，电阻器放置在适配器的血氧仪侧上的LED驱动电子器件和血氧计驱动电流感测电路前面的引线上。通过提供LED驱动电子设备和血氧仪驱动电流检测电路，不会在低电压下产生显着的电流，血氧计能够独立地测量电阻，就像它与LED并联一样。

94. 发明授权

US06430423B2 Shunt barrier in pulse oximeter sensor 有权
标题翻译：脉搏血氧饱和度传感器中的分流屏障
公开(公告)号：US06430423B2
公开(公告)日：2002-08-06
申请号：US09750670
申请日：2000-12-28
申请人： Russ DeLonzor , Paul D. Mannheimer , Michael E. Fein , Don Hannula
发明人： Russ DeLonzor , Paul D. Mannheimer , Michael E. Fein , Don Hannula
IPC分类号： A61B500
CPC分类号： A61B5/6826 , A61B5/14552 , A61B5/6838 , A61B2562/08
摘要： A pulse oximeter sensor having an emitter(s) and a detector, with a layer having a first portion of the emitter and a second portion of layer over the detector is provided. A barrier is included between the first and second portions of the overlying layer to substantially block radiation of the wavelengths emitted by the emitter(s). Preferably, the barrier reduces the radiation shunted to less than 10% of the radiation detected, and more preferably to less than 1% of the radiation detected.
摘要翻译：具有发射器和检测器的脉冲血氧计传感器，其具有发射器的第一部分和检测器上的第二部分层的层。在上覆层的第一和第二部分之间包括屏障，以基本上阻挡由发射器发射的波长的辐射。优选地，屏障将被分流的辐射减少到所检测的辐射的小于10％，更优选地小于检测到的辐射的1％。

95. 发明授权

US6044283A Medical sensor with modulated encoding scheme 失效
标题翻译：具有调制编码方案的医疗传感器
公开(公告)号：US6044283A
公开(公告)日：2000-03-28
申请号：US073361
申请日：1998-05-06
申请人： Michael E. Fein , David C. Jenkins , Michael J. Bernstein , K. L. Venkatachalam , Adnan I. Merchant , Charles H. Bowden
发明人： Michael E. Fein , David C. Jenkins , Michael J. Bernstein , K. L. Venkatachalam , Adnan I. Merchant , Charles H. Bowden
IPC分类号： G08C15/12 , A61B5/00 , A61B5/145 , A61B5/1455
CPC分类号： A61B5/14551 , A61B5/0002 , A61B5/7228 , A61B2562/08
摘要： The present invention provides an encoding mechanism for a medical sensor which uses a modulated signal to provide the coded data to a remote analyzer. The modulated signal could be, for instance, a pulse width modulated signal or a frequency modulated signal. This signal is amplitude independent and thus provides a significant amount of noise immunity.
摘要翻译：本发明提供了一种用于医疗传感器的编码机构，其使用调制信号将编码数据提供给远程分析器。调制信号可以是例如脉冲宽度调制信号或调频信号。该信号是幅度无关的，因此提供了大量的抗噪声能力。

96. 发明授权

US5264912A Speckle reduction track filter apparatus for optical inspection of patterned substrates 失效
标题翻译：用于图案化基板的光学检查的斑点还原轨道滤波装置
公开(公告)号：US5264912A
公开(公告)日：1993-11-23
申请号：US832379
申请日：1992-02-07
申请人： John L. Vaught , Michael E. Fein , Armand P. Neukermans
发明人： John L. Vaught , Michael E. Fein , Armand P. Neukermans
IPC分类号： H01L21/66 , G01N21/94 , G01N21/95 , G01N21/956 , G02B27/46 , G01N21/88
CPC分类号： G01N21/94 , G01N21/95623 , G02B27/46 , G01N21/9501
摘要： An apparatus used to inspect patterned wafers and other substrates with periodic features for the presence of particles, defects and other aperiodic features in which a spatial filter placed in the Fourier plane is used in combination with either broadband illumination, angularly diverse illumination or both. In contrast to prior devices that direct light from a single monochromatic source through a pinhole aperture stop, embodiments are describes that illuminate a patterned substrate using (1) a single monochromatic source with a slit-shaped aperture stop for angularly diverse illumination, (2) a single broadband source with a pinhole aperture stop for broadband illumination, (3) a single broadband source with a slit-shaped aperture stop for both broadband and angularly diverse illumination, or (4) multiple sources with an aperture stop for each source for at least angularly diverse illumination. The spatial filters for these illumination systems are characterized by opaque tracks in an otherwise transmissive filter for blocking the elongated bands produced by diffraction from the periodic features on the illuminates substrate. The filter may be made photographically by exposing high contrast film placed in or near the Fourier plane to the diffracted light from a defect and particle frame substrate having only periodic features. Light scattered from the aperiodic features is able to substantially pass through the filter and be imaged onto, a CCD array, vidicon camera or TDI sensor.
摘要翻译：用于检查具有周期性特征的图案化晶片和其它基板用于存在颗粒，缺陷和其他非周期性特征的装置，其中放置在傅立叶平面中的空间滤波器与宽带照明，角度不同的照明或两者结合使用。与通过针孔孔径光阑引导来自单个单色源的光的现有装置相比，描述了使用（1）具有狭缝形孔径光阑的单个单色光源来照射图案化的衬底，用于角度不同的照明，（2）单宽带光源，具有用于宽带照明的针孔孔径光阑，（3）单宽带光源，具有狭缝形孔径光阑，适用于宽带和角度不同的照明，或（4）多个源，每个光源的孔径光阑在最小角度多样的照明。用于这些照明系统的空间滤波器的特征在于在另外透射的滤光器中的不透明光道，用于阻挡由照明基板上的周期特征衍射产生的细长带。可以通过将放置在傅立叶平面中或其附近的高对比度胶片与来自仅具有周期特征的缺陷和颗粒框架基板的衍射光曝光来进行过滤。从非周期特征散射的光能够基本上通过滤光片并被成像到CCD阵列，摄像机或TDI传感器上。

97. 发明授权

US5085517A Automatic high speed optical inspection system 失效
标题翻译：自动高速光学检测系统
公开(公告)号：US5085517A
公开(公告)日：1992-02-04
申请号：US429963
申请日：1989-10-31
申请人： Curt H. Chadwick , Robert R. Sholes , John D. Greene , Francis D. Tucker, III , Michael E. Fein , P. C. Jann , David J. Harney , William Bell , Bin-Ming B. Isai , Walter I. Novak , Mark J. Wihl
发明人： Curt H. Chadwick , Robert R. Sholes , John D. Greene , Francis D. Tucker, III , Michael E. Fein , P. C. Jann , David J. Harney , William Bell , Bin-Ming B. Isai , Walter I. Novak , Mark J. Wihl
IPC分类号： G01B11/24 , G01B11/30 , G01N21/64 , G01N21/88 , G01N21/93 , G01N21/956 , G01R31/308 , G06T1/00 , G06T1/20
CPC分类号： G01R31/308 , G01N21/956 , G01N2021/8887 , G01N2021/95615 , G01N2021/95638 , G01N21/64 , G01N21/95607 , G01N2201/06126 , G01N2201/0826
摘要： In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate that are substantially uniformly or critically illuminated. In one configuration, the substrate is compared to the expected characteristic features prestored in memory. In a second configuration, a first and second pattern in a region of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other. This is accomplished by illuminating the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. With each comparison whether there has been agreement between the two patterns is noted. After all of the patterns are sequentially compared, the bad ones are identified by identifying those that did not compare with other patterns in the test process. This inspection technique is useful for doing die-to-die inspections, as well as repeating patern inspections within the same die. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns eliminating the need for the temporary memory.

98. 发明授权

US4965484A Vapor discharge lamp with gradient temperature control 失效
标题翻译：蒸汽放电灯，具有梯度温度控制
公开(公告)号：US4965484A
公开(公告)日：1990-10-23
申请号：US322080
申请日：1989-03-10
申请人： Michael E. Fein
发明人： Michael E. Fein
IPC分类号： H01J61/52
CPC分类号： H01J61/52
摘要： An end-viewed vapor discharge lamp having a differential temperature control structure that removes heat more effectively from a base end of the lamp than from the light emitting output end of the lamp. The lamp envelope which contains an excitable vapor, such as mercury, includes a small bore capillary tube with a window at one end. A large bore extension contiguous with the capillary tube and a parallel second tube contain electrodes for providing a discharge in the capillary tube. A thermally conductive shell surrounds and is spaced apart from sides of the envelope and is partly filled with a thermally conductive material around the base end of the envelope. The output end around the capillary tube is free of this material. Heat conduction is better at the base end so that the capillary tube runs hotter, inhibiting condensation of vapor and giving a stable light output. An optional heater pad may be provided around the shell for maintaining an optimal temperature for maximum light output.
摘要翻译：一种具有比从灯的发光输出端更高效地从灯的基端去除热量的差分温度控制结构的端视图的蒸气放电灯。包含诸如汞的可激发蒸汽的灯管包括在一端具有窗口的小孔毛细管。与毛细管相邻的大孔延伸和平行的第二管包含用于在毛细管中提供放电的电极。导热壳围绕并且与封套的侧面间隔开，并且部分地填充有围绕着封套基端的导热材料。毛细管周围的输出端没有这种材料。热传导在基端更好，使毛细管运行更热，抑制蒸气冷凝并给出稳定的光输出。可以在壳体周围设置可选的加热器垫，以保持用于最大光输出的最佳温度。

99. 发明授权

US4877326A Method and apparatus for optical inspection of substrates 失效
标题翻译：用于光学检查基板的方法和装置
公开(公告)号：US4877326A
公开(公告)日：1989-10-31
申请号：US158289
申请日：1988-02-19
申请人： Curt H. Chadwick , Robert R. Sholes , John D. Greene , Francis D. Tucker, III , Michael E. Fein , P. C. Jann , David J. Harvey , William Bell
发明人： Curt H. Chadwick , Robert R. Sholes , John D. Greene , Francis D. Tucker, III , Michael E. Fein , P. C. Jann , David J. Harvey , William Bell
IPC分类号： H05K3/00 , G01N21/88 , G01N21/89 , G01N21/93 , G01N21/956 , G01R31/311
CPC分类号： G01N21/95684 , G01N21/8806 , G01N21/956 , G01R31/311 , G01N2021/8908 , G01N2021/95638
摘要： Substrate inspection apparatus and methods, and illumination apparatus. The inspection apparatus and method includes memory for storing the desired features of the surface of the substrate, focussed illuminator for substantially uniformly illuminating a region of the surface of the substrate to be inspected. Additionally there is a sensor for imaging the region of the substrate illuminated by the illuminator, and a comparator responsive to the memory and sensor for comparing the imaged region of the substrate with the stored desired features of the substrate. The illumination apparatus is designed to provide substantially uniform focussed illumination along a narrow linear region. This apparatus includes first, second and third reflectors elliptically cylindrical in shape, each with its long axis substantially parallel to the long axes of each of the others. Fourth and fifth reflectors are also included with each being flat and mounted parallel to each other and at opposite ends of each of said first, second and third reflectors, and first, second and third linear light sources each mounted parallel to a corresponding one of said first, second and third reflectors with each of the light sources mounted so that it is at the first focus of the corresponding reflector and the illuminated linear region is at the second focus of each of the first, second and third reflectors.
摘要翻译：基板检查装置及方法及照明装置。检查装置和方法包括用于存储基板的表面的期望特征的存储器，用于基本上均匀地照射待检查的基板的表面的区域的聚焦照明器。另外还有一个传感器，用于对由照明器照射的衬底的区域进行成像，以及响应于存储器和传感器的比较器，用于将衬底的成像区域与存储的衬底的期望特征进行比较。照明装置被设计成沿狭窄的线性区域提供基本均匀的聚焦照明。该装置包括椭圆形圆柱形的第一，第二和第三反射器，每个反射器的长轴基本上平行于每个反射器的长轴。还包括第四和第五反射器，每个反射器是平坦的并且彼此平行并且在每个所述第一，第二和第三反射器的相对端部安装，并且第一，第二和第三线性光源各自平行于所述第一，第一，第二和第三反射器，其中每个光源安装成使得其处于相应反射器的第一焦点，并且被照射的线性区域处于第一，第二和第三反射器中的每一个的第二焦点。

100. 发明授权

US4844617A Confocal measuring microscope with automatic focusing 失效
标题翻译：共焦测量显微镜具有自动对焦
公开(公告)号：US4844617A
公开(公告)日：1989-07-04
申请号：US146046
申请日：1988-01-20
申请人： Herman F. Kelderman , Michael E. Fein , Alan E. Loh , Arnold Adams , Armand P. Neukermans
发明人： Herman F. Kelderman , Michael E. Fein , Alan E. Loh , Arnold Adams , Armand P. Neukermans
IPC分类号： G01B9/04 , G01J3/02 , G01J3/18 , G01J3/28 , G02B21/00
CPC分类号： G01B9/04 , G01J3/02 , G01J3/0229 , G01J3/0243 , G01J3/0248 , G02B21/006 , G01J3/18 , G01J3/2803
摘要： A confocal measuring microscope including a spectrometer and autofocus system sharing common optical elements in which the intensity of light entering the spectrometer from a particular spot on a workpiece is used to determine a focus condition for the same spot. The microscope includes at least one light source, an illumination field stop, and a microscope objective that images the stop onto a workpiece supported by a movable platform. The objective also forms an image of the illuminated portion of the object. An aperture in a second stop and intersecting the image plane passes light from part of the image to the spectrometer, while viewing optics are used to view the image. In one embodiment, a detector is placed at the zero order position, while in another embodiment a laser is placed at the zero order position. In the later embodiment an integrator circuit connected to the detector array replaces the zero order detector for measuring the total intensity of light entering the spectrometer. A best focus condition occurs when the total intensity is a maximum for a positive confocal configuration, i.e. where source and detector are on opposite sides of their respective field stops from said workpiece, and a minimum for a negative confocal configuration, i.e. where the source and workpiece are on the same side of a reflective illumination field stop with aperture. The movable platform may be scanned axially to achieve and maintain object focus as the object is scanned transversely.
摘要翻译：共焦测量显微镜包括分光光度计和自动聚焦系统，共享共同的光学元件，其中使用从工件上的特定光点进入光谱仪的光的强度来确定同一光斑的聚焦条件。显微镜包括至少一个光源，照明场停止器和将停止点图像到由可移动平台支撑的工件上的显微镜物镜。该目的也形成对象的被照亮部分的图像。在第二个停止点和与图像平面相交的孔将光从图像的一部分传递到光谱仪，而观察光学元件用于观看图像。在一个实施例中，检测器被放置在零级位置，而在另一个实施例中，激光被放置在零级位置。在后面的实施例中，连接到检测器阵列的积分器电路取代了用于测量进入光谱仪的光的总强度的零级检测器。当总强度为正共焦配置的最大值时，即源和检测器位于其与所述工件相应的场停止位置的相对侧上，并且对于共焦焦配置为最小，即源和工件位于具有孔径的反射照明场停止的同一侧。当物体被横向扫描时，可移动平台可被轴向地扫描以实现和维持物体焦点。

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