专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

91. 发明授权

US06960263B2 Shadow frame with cross beam for semiconductor equipment 有权
标题翻译：用于半导体设备的横梁的阴影框架
公开(公告)号：US06960263B2
公开(公告)日：2005-11-01
申请号：US10136249
申请日：2002-04-25
申请人： Sakae Tanaka , Qunhua Wang , Sanjay Yadav , Quanyuan Shang , William R. Harshbarger
发明人： Sakae Tanaka , Qunhua Wang , Sanjay Yadav , Quanyuan Shang , William R. Harshbarger
IPC分类号： C23C16/04 , C23C16/458 , H01L21/205 , C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： C23C16/042 , C23C16/4585 , C23C16/4586
摘要： A shadow frame and framing system for semiconductor fabrication equipment comprising a rectangular frame having four edges, the edges forming an interior lip with a top surface and an bottom engagement surface; and a cross beam disposed between at least two edges of the frame, the cross beam having a top surface and a bottom engagement surface, the engagement surface of the cross beam configured to be flush with the engagement surface of the lip; wherein one or more of the engagement surfaces are configured to cover metal interconnect bonding areas on a carrier disposed below the frame. The shadow frame is particularly useful in plasma enhanced chemical vapor deposition (PECVD) applications used to make active matrix liquid crystal displays (AMLCDs) and solar cells.
摘要翻译：一种用于半导体制造设备的阴影框架和框架系统，包括具有四个边缘的矩形框架，所述边缘形成具有顶部表面和底部接合表面的内部唇部; 以及设置在所述框架的至少两个边缘之间的横梁，所述横梁具有顶表面和底部接合表面，所述横梁的接合表面被配置为与所述唇缘的接合表面齐平; 其中所述接合表面中的一个或多个构造成覆盖设置在所述框架下方的载体上的金属互连结合区域。阴影框架在用于制造有源矩阵液晶显示器（AMLCD）和太阳能电池的等离子体增强化学气相沉积（PECVD）应用中特别有用。

92. 发明申请

US20050150459A1 Full glass substrate deposition in plasma enhanced chemical vapor deposition 审中-公开
标题翻译：全玻璃基板沉积在等离子体中增强化学气相沉积
公开(公告)号：US20050150459A1
公开(公告)日：2005-07-14
申请号：US11010956
申请日：2004-12-13
申请人： Quanyuan Shang , Robert Greene , Li Hou
发明人： Quanyuan Shang , Robert Greene , Li Hou
IPC分类号： C23C16/458 , C23C16/46 , H01J37/32 , C23C16/00
CPC分类号： C23C16/46 , C23C16/4581 , H01J2237/0206 , H01J2237/20
摘要： Embodiments of the invention generally provides an apparatus and a method for minimizing the deformation of a substrate during PECVD processing. In one aspect, the substrate is supported within a processing region on an insulating layer to provide uniform heating of the substrate.
摘要翻译：本发明的实施例通常提供一种用于在PECVD处理期间最小化衬底的变形的装置和方法。在一个方面，衬底被支撑在绝缘层上的处理区域内以提供衬底的均匀加热。

93. 发明授权

US06772827B2 Suspended gas distribution manifold for plasma chamber 有权
标题翻译：用于等离子体室的悬浮气体分配歧管
公开(公告)号：US06772827B2
公开(公告)日：2004-08-10
申请号：US09922219
申请日：2001-08-03
申请人： Ernst Keller , Quanyuan Shang
发明人： Ernst Keller , Quanyuan Shang
IPC分类号： F24H906
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/3244 , Y10T29/49948
摘要： A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.
摘要翻译：一种用于等离子体室的气体入口歧管，其具有由包括一个或多个片材的侧壁悬挂的多孔气体分配板。片材优选提供柔性以缓解由于热膨胀和收缩导致的气体分配板中的应力。在另一方面，侧壁在气体分配板和腔室的其它部件之间提供热隔离。

94. 发明申请

US20110111181A1 METHODS AND APPARATUS FOR BALANCING IMAGE BRIGHTNESS ACROSS A FLAT PANEL DISPLAY USING VARIABLE INK THICKNESS 审中-公开
标题翻译：通过使用可变的油墨厚度的平板显示器平衡图像亮度的方法和装置
公开(公告)号：US20110111181A1
公开(公告)日：2011-05-12
申请号：US12855660
申请日：2010-08-12
申请人： Quanyuan Shang
发明人： Quanyuan Shang
IPC分类号： B32B3/26
CPC分类号： B32B3/26 , B32B2457/202 , Y10T428/2462
摘要： The present invention provides methods, apparatus and systems for balancing the brightness of a flat panel display using varying thicknesses of ink in a display object. The invention includes a display object for a flat panel display which includes a substrate, a pixel matrix on the substrate, and ink deposited into the pixel matrix. The ink deposited in a central area of the pixel matrix has a thickness that is greater than ink deposited in an edge/corner area of the pixel matrix. Numerous additional and alternative aspects of the invention are disclosed.
摘要翻译：本发明提供了使用显示对象中的墨水的不同厚度平衡平板显示器的亮度的方法，装置和系统。本发明包括用于平板显示器的显示对象，其包括基板，基板上的像素矩阵和沉积到像素矩阵中的墨。沉积在像素矩阵的中心区域中的墨水的厚度大于沉积在像素矩阵的边缘/角落区域中的墨水。公开了本发明的许多附加和替代方面。

95. 发明授权

US07300829B2 Low temperature process for TFT fabrication 有权
标题翻译： TFT制造的低温工艺
公开(公告)号：US07300829B2
公开(公告)日：2007-11-27
申请号：US10453333
申请日：2003-06-02
申请人： Mark Hsiao , Dong-Kil Yim , Takako Takehara , Quanyuan Shang , William R. Harshbarger , Woong-Kwon Kim , Duk-Chul Yun , Youn-Gyung Chang
发明人： Mark Hsiao , Dong-Kil Yim , Takako Takehara , Quanyuan Shang , William R. Harshbarger , Woong-Kwon Kim , Duk-Chul Yun , Youn-Gyung Chang
IPC分类号： H01L21/20 , H01L21/84 , H01L21/336
CPC分类号： H01L29/66765 , H01L29/4908 , H01L29/78669 , H01L29/78678
摘要： Method of fabricating a thin-film transistor (TFT) in which a gate metal is deposited onto a substrate in order to form the gate of the thin-film transistor. The substrate may be an insulative substrate or a color filter. In a first method, the gate metal is subjected to an H2 plasma. After subjecting the gate metal to an H2 plasma, the gate insulating film is deposited onto the gate. In a second method, first and second layers of gate insulating film are respectively deposited on the gate at a first and second deposition rates. One layer is deposited under H2 or argon dilution conditions and has improved insulating conditions while the other layer serves to lower the overall compressive stress of the dual layer gate insulator. In a third method, an n+ silicon film is formed on a substrate by maintaining a flow of silane, phosphine and hydrogen gas into a processing chamber at substrate temperatures of about 300° C. or less.
摘要翻译：制造薄膜晶体管（TFT）的方法，其中栅极金属沉积到衬底上以形成薄膜晶体管的栅极。衬底可以是绝缘衬底或滤色器。在第一种方法中，栅极金属经受H 2 H 2等离子体。在栅极金属经受H 2等离子体后，栅极绝缘膜沉积在栅极上。在第二种方法中，第一和第二栅极绝缘膜层分别以第一和第二沉积速率沉积在栅极上。一层沉积在H 2 N 2或氩稀释条件下，并且具有改善的绝缘条件，而另一层用于降低双层栅极绝缘体的整体压应力。在第三种方法中，通过在约300℃或更低的衬底温度下保持硅烷，膦和氢气流入处理室，在衬底上形成n + +硅膜。

96. 发明申请

US20070263026A1 METHODS AND APPARATUS FOR MAINTAINING INKJET PRINT HEADS USING PARKING STRUCTURES 审中-公开
标题翻译：使用停车结构维护喷码头的方法和装置
公开(公告)号：US20070263026A1
公开(公告)日：2007-11-15
申请号：US11741723
申请日：2007-04-28
申请人： Quanyuan Shang , Shinichi Kurita , Lizhong Sun
发明人： Quanyuan Shang , Shinichi Kurita , Lizhong Sun
IPC分类号： B41J2/165
CPC分类号： B41J2/16552 , B41J2/16508 , B41J3/28
摘要： The invention provides a print head parking structure that includes a solvent and/or surface treatment bath for inkjet print heads. Print heads may be returned to the print head parking structure after a substrate has been printed, after one or more printing passes, and/or frequently enough to prevent ink from drying on or clogging the print heads. Once sealed within the print head parking structure, the print heads (or a portion thereof) may be dipped in a solvent bath or pool to dissolve or wash away any ink that has been deposited on the print heads.
摘要翻译：本发明提供了一种打印头停车结构，其包括用于喷墨打印头的溶剂和/或表面处理浴。在印刷一个或多个印刷之后，和/或经常足以防止油墨干燥或堵塞打印头，印刷头可以在印刷基板之后返回打印头停车结构。一旦密封在打印头停车结构中，打印头（或其一部分）可以浸入溶剂浴或池中以溶解或洗掉已经沉积在打印头上的任何油墨。

97. 发明申请

US20070065571A1 Method and apparatus for manufacturing a pixel matrix of a color filter for a flat panel display 审中-公开
标题翻译：用于制造用于平板显示器的滤色器的像素矩阵的方法和装置
公开(公告)号：US20070065571A1
公开(公告)日：2007-03-22
申请号：US11521577
申请日：2006-09-13
申请人： John White , Quanyuan Shang , Yan Ye , Ligui Zhou
发明人： John White , Quanyuan Shang , Yan Ye , Ligui Zhou
IPC分类号： B05D5/12 , B05D7/00 , C08J7/18 , B05D5/06 , B05D1/36 , B05B5/025 , C23C16/00 , B05D3/00
CPC分类号： G02B5/201 , B23K26/066 , B23K26/389 , G02F1/1303 , G02F1/133377 , H01L27/322
摘要： Apparatus and methods are provided for forming a pixel matrix. The methods include coating a substrate with a pixel matrix material, coating the pixel matrix material with an ink-phobic material, and forming pixel wells in the pixel matrix material and the ink-phobic material. A system for forming a pixel matrix is provided that includes a patterning tool including a laser ablation system operable to form pixel wells in pixel matrix material coated with ink-phobic material. The laser ablation system is operable to form pixel wells in pixel matrix material coated with ink-phobic material in an oxygenated environment so that the sidewalls of the pixel matrix are made to be ink-philic. The invention also includes a pixel well structure in which the top surfaces of the pixel well is ink-phobic and the surfaces of the sidewalls are ink-philic. Numerous other aspects are provided.
摘要翻译：提供了用于形成像素矩阵的装置和方法。所述方法包括用像素矩阵材料涂覆衬底，用疏墨材料涂覆像素矩阵材料，以及在像素基质材料和墨迹材料中形成像素阱。提供了一种用于形成像素矩阵的系统，其包括图案化工具，其包括可操作以在涂覆有墨迹材料的像素矩阵材料中形成像素阱的激光烧蚀系统。激光烧蚀系统可操作以在氧化环境中形成涂覆有墨迹的材料的像素矩阵材料中形成像素阱，使得像素矩阵的侧壁被制成亲墨水。本发明还包括像素阱结构，其中像素阱的顶表面是墨水的，并且侧壁的表面是亲墨水的。提供了许多其他方面。

98. 发明申请

US20070015848A1 Green printing ink for color filter applications 失效
标题翻译：绿色印刷油墨用于滤色镜应用
公开(公告)号：US20070015848A1
公开(公告)日：2007-01-18
申请号：US11183188
申请日：2005-07-15
申请人： Lizhong Sun , Quanyuan Shang , John White
发明人： Lizhong Sun , Quanyuan Shang , John White
IPC分类号： C03C17/00
CPC分类号： C09D11/322
摘要： Green inks for displays are provided. In one aspect, the green inks include one or more green organic pigments, one or more monomers, one or more polymeric dispersants, and one or more organic solvents. In another aspect, the green inks include one or more green organic pigments, one or more yellow pigments, one or more monomers, one or more oligomers, one or more polymeric dispersants, and one or more organic solvents. Methods of forming displays that include dispensing the green inks by inkjetting onto a substrate and displays that include the green inks are also provided.
摘要翻译：提供用于显示器的绿色油墨。一方面，绿色油墨包括一种或多种绿色有机颜料，一种或多种单体，一种或多种聚合物分散剂和一种或多种有机溶剂。另一方面，绿色油墨包括一种或多种绿色有机颜料，一种或多种黄色颜料，一种或多种单体，一种或多种低聚物，一种或多种聚合物分散剂和一种或多种有机溶剂。形成显示器的方法包括通过喷墨到基板上分配绿色油墨并且还提供包括绿色油墨的显示器。

99. 发明申请

US20060159843A1 Method of substrate treatment for manufacturing of color filters by inkjet printing systems 审中-公开
标题翻译：喷墨印刷系统制造滤色片的基板处理方法
公开(公告)号：US20060159843A1
公开(公告)日：2006-07-20
申请号：US11039603
申请日：2005-01-18
申请人： Fan-Cheung Sze , Quanyuan Shang , John White
发明人： Fan-Cheung Sze , Quanyuan Shang , John White
IPC分类号： B05D5/12 , B05D5/06 , C23C16/00
CPC分类号： G02F1/133516 , G02F1/133512
摘要： A method for treating a glass substrate and a black matrix thereon for a flat panel display is provided. In one application, the treatment of the glass substrate and black matrix is performed prior to delivery of ink to the glass substrate by an inkjet printing system. The black matrix and glass substrate are exposed to a surface active compound. In one aspect, exposing the black matrix and the glass substrate to a surface active compound modifies the surface energy of the black matrix, the surface energy of the glass substrate, or both. In another aspect, treating the black matrix and the glass substrate enhances the formation of color filters having sub-pixel wells that have a substantially uniform distribution of ink therein.
摘要翻译：提供了一种用于处理用于平板显示器的玻璃基板和其上的黑矩阵的方法。在一个应用中，玻璃基板和黑色矩阵的处理在通过喷墨打印系统将墨水输送到玻璃基板之前进行。将黑色矩阵和玻璃基底暴露于表面活性化合物。在一个方面，将黑色矩阵和玻璃基底暴露于表面活性化合物改变黑色基体的表面能，玻璃基底的表面能或两者。在另一方面，处理黑色矩阵和玻璃基板增强了形成具有基本上均匀的油墨分布的子像素阱的滤色器。

100. 发明申请

US20060127068A1 Method and apparatus for silicon oxide deposition on large area substrates 审中-公开
标题翻译：在大面积衬底上沉积氧化硅的方法和装置
公开(公告)号：US20060127068A1
公开(公告)日：2006-06-15
申请号：US11348595
申请日：2006-02-07
申请人： Sanjay Yadav , Quanyuan Shang , Wendell Blonigan
发明人： Sanjay Yadav , Quanyuan Shang , Wendell Blonigan
IPC分类号： A21B2/00
CPC分类号： C23C16/402 , C23C16/4485
摘要： A method and apparatus for depositing a dielectric material at a rate of at least 3000 Angstroms per minute on a large area substrate that has a surface area of at least about 0.35 square meters is provided. In one embodiment, the dielectric material is silicon oxide. Also provided is a large area substrate having a layer of dielectric material deposited by a process yielding a deposition rate in excess of about 3000 Angstroms per minute and a processing chamber for fabricating the same.
摘要翻译：提供了一种在具有至少约0.35平方米的表面积的大面积基板上以至少3000埃每分钟的速率沉积电介质材料的方法和装置。在一个实施例中，电介质材料是氧化硅。还提供了一种大面积基板，其具有通过产生超过约3000埃/分钟的沉积速率的工艺沉积的介电材料层和用于制造该沉积速率的处理室。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式