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1. 发明授权

US07484473B2 Suspended gas distribution manifold for plasma chamber 有权
公开(公告)号：US07484473B2
公开(公告)日：2009-02-03
申请号：US10869563
申请日：2004-06-15
申请人： Ernst Keller , Quanyuan Shang
发明人： Ernst Keller , Quanyuan Shang
IPC分类号： C23C16/455 , C23C16/50 , C23C16/06 , C23C16/22
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/3244 , Y10T29/49948
摘要： A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

2. 发明授权

US06896929B2 Susceptor shaft vacuum pumping 有权
标题翻译：受体轴抽真空
公开(公告)号：US06896929B2
公开(公告)日：2005-05-24
申请号：US09922352
申请日：2001-08-03
申请人： Sanjay Yadav , Quanyuan Shang , Ernst Keller , Wei Chang
发明人： Sanjay Yadav , Quanyuan Shang , Ernst Keller , Wei Chang
IPC分类号： C23C16/458 , H01L21/205 , H01L21/683 , C23C16/00
CPC分类号： H01L21/6838
摘要： Provided herein is a method of improving the planarity of a support plate of a susceptor for use during deposition of a film of material onto a substrate comprising the steps of reducing pressure in a hollow core of a shaft to a level below atmospheric pressure; and reducing a pressure in the deposition chamber to a level required for the deposition of the film of material onto the substrate, where the pressure in the hollow core of the shaft acts upon a lower surface of the support plate connected to the shaft and interfacing with the hollow core of the shaft and the pressure in the deposition chamber acts upon an upper surface of the support plate adapted to support the substrate thereby improving planarity. Also provided are a susceptor and a method of depositing a film onto a substrate affixed to the susceptor of the present invention.
摘要翻译：本文提供了一种提高用于将材料膜沉积到基材上的基座的支撑板的平面度的方法，包括以下步骤：将轴的空心芯中的压力降低到低于大气压的水平; 并且将沉积室中的压力降低到将材料膜沉积到衬底上所需的水平，其中轴的中空芯中的压力作用在连接到轴的支撑板的下表面上并且与轴的中空芯和沉积室中的压力作用在支撑板的上表面上，以适应于支撑基板，从而改善平面度。还提供了一种感受器和将薄膜沉积在固定到本发明的基座上的基底上的方法。

3. 发明申请

US20050000432A1 Suspended gas distribution manifold for plasma chamber 有权
标题翻译：用于等离子体室的悬浮气体分配歧管
公开(公告)号：US20050000432A1
公开(公告)日：2005-01-06
申请号：US10869563
申请日：2004-06-15
申请人： Ernst Keller , Quanyuan Shang
发明人： Ernst Keller , Quanyuan Shang
IPC分类号： B01J19/08 , C23C16/44 , C23C16/455 , C23C16/509 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/46 , C23C16/00
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/3244 , Y10T29/49948
摘要： A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.
摘要翻译：一种用于等离子体室的气体入口歧管，其具有由包括一个或多个片材的侧壁悬挂的多孔气体分配板。片材优选提供柔性以缓解由于热膨胀和收缩导致的气体分配板中的应力。在另一方面，侧壁在气体分配板和腔室的其它部件之间提供热隔离。

4. 发明授权

US06772827B2 Suspended gas distribution manifold for plasma chamber 有权
标题翻译：用于等离子体室的悬浮气体分配歧管
公开(公告)号：US06772827B2
公开(公告)日：2004-08-10
申请号：US09922219
申请日：2001-08-03
申请人： Ernst Keller , Quanyuan Shang
发明人： Ernst Keller , Quanyuan Shang
IPC分类号： F24H906
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/3244 , Y10T29/49948
摘要： A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.
摘要翻译：一种用于等离子体室的气体入口歧管，其具有由包括一个或多个片材的侧壁悬挂的多孔气体分配板。片材优选提供柔性以缓解由于热膨胀和收缩导致的气体分配板中的应力。在另一方面，侧壁在气体分配板和腔室的其它部件之间提供热隔离。

5. 发明授权

US07776178B2 Suspension for showerhead in process chamber 有权
标题翻译：淋浴头悬挂在处理室中
公开(公告)号：US07776178B2
公开(公告)日：2010-08-17
申请号：US11552648
申请日：2006-10-25
申请人： Ernst Keller
发明人： Ernst Keller
IPC分类号： H01L21/306 , C23F1/00 , C23C16/00
CPC分类号： C23C16/45565 , H01J37/3244
摘要： Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) Openings in the suspension wall that reduce exposure of the suspension wall to process gas or ambient atmosphere when the chamber lid is opened. (2) A substantially vertical arrangement of one or more rifts in the suspension wall which facilitate horizontal buckling or flexing of the suspension wall. (3) A plurality of suspension walls whose respective central portions are coplanar. (4) A gas sealing skirt that helps protect the suspension wall from direct contact with process gas. The gas sealing skirt is connected to either the chamber wall or the showerhead but is not connected to both.
摘要翻译：用于将喷淋头悬挂在处理室中的悬浮壁内的应力通过以下中的一个或多个来改善：（1）当室盖打开时，悬挂壁中的开口减少悬浮壁的暴露以处理气体或环境大气。（2）在悬挂壁中的一个或多个裂缝的基本竖直布置，其有利于悬挂壁的水平屈曲或弯曲。（3）多个悬挂壁，其各自的中心部分是共面的。（4）气体密封裙，有助于保护悬浮壁与工艺气体直接接触。气体密封裙连接到室壁或喷头，但不连接到两个。

6. 发明授权

US07591160B2 Electromechanical lock cylinder 有权
标题翻译：机电锁缸
公开(公告)号：US07591160B2
公开(公告)日：2009-09-22
申请号：US10592227
申请日：2005-03-08
申请人： Ernst Keller
发明人： Ernst Keller
IPC分类号： E05B47/06
CPC分类号： E05B47/0642 , E05B9/045 , E05B47/0012 , E05B47/0615 , Y10T70/7062 , Y10T70/7079 , Y10T70/7102 , Y10T70/7107 , Y10T70/7678
摘要： The invention relates to an electromechanical lock cylinder, comprising a first cylinder half (2), arranged on the outside of the door, with a key passage (8) for a security key (44) and a second cylinder half (3), arranged on the inside of the door, with a rotating knob rotor (4). Tumblers in the first cylinder half (2) are arranged for rotational release by a security key (44). An electronic device (17) is arranged in the rotating knob (24) for control of a locking device (43). The rotating knob (24) forms a unit with the electronic device (17) arranged therein, detachably mounted on an extension (4a) of the rotating knob rotor (4), projecting past the housing (6). The rotating knob rotor (24) may be adjusted for length by means of an exchangeable adapter (18a to 18c).
摘要翻译：本发明涉及一种机电锁缸，包括设置在门外侧的第一气缸半部（2），具有用于安全钥匙（44）的钥匙通道（8）和第二气缸半体（3）在门的内部，具有旋转旋钮（4）。第一气缸半部（2）中的滚筒布置成通过安全键（44）旋转释放。一个电子设备（17）设置在旋转旋钮（24）中，用于控制锁定装置（43）。旋转旋钮（24）与设置在其中的电子设备（17）形成一个单元，可拆卸地安装在旋转旋钮转子（4）的延伸部（4a）上，突出穿过壳体（6）。旋转旋钮转子（24）可以通过可更换的适配器（18a至18c）来调节长度。

7. 发明授权

US06823589B2 Flexibly suspended gas distribution manifold for plasma chamber 有权
标题翻译：用于等离子体室的柔性悬浮气体分配歧管
公开(公告)号：US06823589B2
公开(公告)日：2004-11-30
申请号：US10293544
申请日：2002-11-12
申请人： John M. White , Ernst Keller , Wendell T. Blonigan
发明人： John M. White , Ernst Keller , Wendell T. Blonigan
IPC分类号： B23P1500
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/3244 , Y10T29/49428 , Y10T29/49826
摘要： A method of flexibly mounting a gas distribution plate to the back wall of a gas inlet manifold for a plasma chamber. A perforated gas distribution plate is suspended from the back wall by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate.
摘要翻译：一种将气体分配板柔性地安装到用于等离子体室的气体入口歧管的后壁的方法。穿孔式气体分配板通过柔性侧壁从后壁悬挂。柔性悬架使气体分配板的热膨胀的机械应力最小化。

8. 发明授权

US06477980B1 Flexibly suspended gas distribution manifold for plasma chamber 有权
标题翻译：用于等离子体室的柔性悬浮气体分配歧管
公开(公告)号：US06477980B1
公开(公告)日：2002-11-12
申请号：US09488612
申请日：2000-01-20
申请人： John M. White , Ernst Keller , Wendell T. Blonigan
发明人： John M. White , Ernst Keller , Wendell T. Blonigan
IPC分类号： C23C1600
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/3244 , Y10T29/49428 , Y10T29/49826
摘要： A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.
摘要翻译：一种用于等离子体室的气体入口歧管，其具有由柔性侧壁悬挂的穿孔气体分配板。柔性悬架使气体分配板的热膨胀的机械应力最小化。在另一方面，悬架提供气体分配板和腔室的其它部件之间的热隔离。

9. 发明授权

US5966971A Lock bolt 失效
标题翻译：锁螺栓
公开(公告)号：US5966971A
公开(公告)日：1999-10-19
申请号：US95140
申请日：1998-06-10
申请人： Ernst Keller
发明人： Ernst Keller
IPC分类号： E05B27/00 , E05B27/04
CPC分类号： E05B27/0021 , Y10T70/7571 , Y10T70/7605 , Y10T70/7701 , Y10T70/7932
摘要： The lock bolt has a bolt tip (2) a bolt head (3) whose back wall (4) is intended to rest against a housing pin for sliding this pin into the rotary closure cylinder (24). The bolt tip (2) is supported on the bolt head (3) with a spring engaged between the bolt tip (2) and the bolt head (3) so that it can slide in a limited fashion between an inner and an outer position. The bolt head (3) has a longitudinal bore (5) in which the bolt tip (2) is supported so that it can slide. The lock bolt to a large extent prevents unlocking attempts in which vibrational movements are exerted on the tumblers.
摘要翻译：锁定螺栓具有螺栓头部（2），螺栓头部（3），其后壁（4）旨在抵靠壳体销，以将该销滑入旋转闭合缸（24）。螺栓头部（2）由螺栓头（2）和螺栓头（3）之间接合的弹簧支撑在螺栓头部（3）上，使得其能够以有限的方式在内部和外部位置之间滑动。螺栓头（3）具有纵向孔（5），螺栓头（2）支撑在该孔中以使其能够滑动。锁定螺栓在很大程度上防止了在滚筒上施加振动的解锁尝试。

10. 发明授权

US5931036A Rotating locking cylinder for a safety lock 失效
标题翻译：旋转锁紧缸用于安全锁
公开(公告)号：US5931036A
公开(公告)日：1999-08-03
申请号：US913464
申请日：1997-09-18
申请人： Ernst Keller
发明人： Ernst Keller
IPC分类号： E05B27/00
CPC分类号： E05B27/00 , E05B27/0021 , Y10T70/7605 , Y10T70/7616
摘要： The rotary locking cylinder described has a stationary part (2) and a rotating part (3) plus several tumblers (8) each with a core pin (10) and a housing pin (9). Mounted in the rotating part (3) is at least one locking element (22) which can be displaced approximately at right angles to the core pin (10) of a tumbler (8) and in its position of rest engages in a recess (20) in the stationary part (2). The recess (20) in the stationary part (2) has a control surface (19) designed so that, when the unlocked stationary part (2) is rotated, the locking element (22) is moved towards the core pin (10). Machined in the surface (10b) of the core pin (10) is a groove (12) such that, with the core pin (10) inserted, after the rotating part (3) has rotated through a relatively small angle, the locking element (22) can be pushed far enough into the groove (12) for it to be lifted out of the recess (20) in the stationary part (2) and, with the core pin (10) not inserted, the locking element (22) essentially cannot be pushed out of its position of rest and rests against the surface (10b) of the core pin (10).
摘要翻译： PCT No.PCT / CH96 / 00089 Sec。 371日期：1997年9月18日 102（e）1997年9月18日PCT PCT 1996年3月8日PCT公布。公开号WO96 / 29492 日期1996年9月26日描述的旋转锁定圆筒具有固定部分（2）和旋转部分（3）加上几个具有芯销（10）和壳体销（9）的翻转开关（8）。安装在旋转部分（3）中的是至少一个锁定元件（22），其可以与制动栓（8）的芯销（10）大致垂直地移动，并且其止动位置接合在凹部（20）中）在固定部分（2）中。固定部分（2）中的凹槽（20）具有控制表面（19），该控制表面设计成使得当解锁的静止部分（2）旋转时，锁定元件（22）朝向芯销（10）移动。在芯销（10）的表面（10b）中加工的是凹槽（12），使得在芯销（10）插入之后，在旋转部件（3）旋转相对较小的角度后，锁定元件（22）可以被推入足够大的凹槽（12）中，以便将其从固定部分（2）中的凹部（20）中提出，并且在芯销（10）未插入的情况下，锁定元件（22））基本上不能被推出其休止位置并且靠在芯销（10）的表面（10b）上。

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