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    • 91. 发明申请
    • SCISSOR LIFT TRANSFER ROBOT
    • SCISSOR提升机器人
    • US20100086380A1
    • 2010-04-08
    • US12247135
    • 2008-10-07
    • Shinichi KuritaTakayuki MatsumotoSuhail Anwar
    • Shinichi KuritaTakayuki MatsumotoSuhail Anwar
    • B25J9/00B25J11/00H01L21/677
    • B25J15/0616B25J9/0096B25J11/00B66F7/065H01L21/68742H01L21/68785Y10T74/20305
    • A method and apparatus for a transfer robot that may be used in a vacuum environment is described. The transfer robot includes a lift assembly comprising a first platform and a second platform coupled to the first platform by a plurality of support members, the plurality of support members comprising a first pair of support members and a second pair of support members, a first drive assembly coupled to a portion of the plurality of support members, the first drive assembly providing a motive force to the plurality of support members to move the second platform in a first linear direction relative to the first platform, and an end effector disposed on the second platform and movable in a second linear direction by a second drive assembly, the second linear direction being orthogonal to the first linear direction.
    • 描述可用于真空环境中的传送机器人的方法和装置。 传送机器人包括提升组件,其包括第一平台和通过多个支撑构件联接到第一平台的第二平台,多个支撑构件包括第一对支撑构件和第二对支撑构件,第一驱动 组件联接到所述多个支撑构件的一部分,所述第一驱动组件为所述多个支撑构件提供动力以相对于所述第一平台在第一线性方向上移动所述第二平台,以及设置在所述第二平台上的末端执行器 平台,并通过第二驱动组件在第二线性方向上移动,第二线性方向与第一线性方向正交。
    • 92. 发明授权
    • End effector assembly for supporting a substrate
    • 用于支撑衬底的末端执行器组件
    • US07641247B2
    • 2010-01-05
    • US10321826
    • 2002-12-17
    • Wendell T. BloniganTakayuki MatsumotoWilliam N. SterlingBilly C. Leung
    • Wendell T. BloniganTakayuki MatsumotoWilliam N. SterlingBilly C. Leung
    • B25J15/00B65G49/07
    • H01L21/68707Y10S294/902Y10S414/141
    • Generally, an end effector assembly for a substrate transfer robot is provided. In one embodiment, an end effector assembly for supporting a quadrilateral substrate during substrate transfer includes an end effector having an inner edge support disposed on a first end and a first outer edge support disposed on a distal end. The first end of the end effector is adapted for coupling to a robot linkage. The first inner edge support has a face that is oriented parallel to and facing the face of the first outer edge support. This configuration of edge supports captures the substrate to the end effector thereby minimizing substrate slippage during transfer. In another embodiment, lateral guides may be utilized to further enhance capturing the substrate along the edges of the substrate open between the inner and outer edge supports.
    • 通常,提供了一种用于衬底传送机器人的端部执行器组件。 在一个实施例中,用于在衬底传送期间支撑四边形衬底的端部执行器组件包括端部执行器,其具有设置在第一端上的内边缘支撑件和设置在远端上的第一外边缘支撑件。 端部执行器的第一端适于联接到机器人联动装置。 第一内边缘支撑件具有平行于并面向第一外边缘支撑件的面的面。 边缘支撑件的这种构造将基板捕获到端部执行器,从而最小化转移期间的基板滑移。 在另一个实施例中,可以使用横向引导件来进一步增强沿着在内边缘支撑件和外边缘支撑件之间打开的基板的边缘捕获基板。
    • 93. 发明授权
    • Image forming device
    • 图像形成装置
    • US07639408B2
    • 2009-12-29
    • US11002255
    • 2004-12-03
    • Takayuki Matsumoto
    • Takayuki Matsumoto
    • H04N1/04H04N1/40H04N1/393
    • H04N1/393
    • An image forming device includes a scanner, a first setting portion configured to set a reading scale factor for an image from a document, a second setting portion configured to set the size of an image formed medium, a determining portion configured to determine to which of divided ranges the reading scale factor set by the first setting portion belongs, a moving section configured to move the scanner at a specified moving speed corresponding to the range determined by the determining portion, a calculating section configured to calculate a distance the scanner moves based on the reading scale factor and the size of the image formed medium, and a storing portion configured to store the image read by a photoelectric converting device while the moving section is moving the scanner at the moving speed corresponding to the reading scale factor.
    • 图像形成装置包括扫描仪,第一设置部分,被配置为设置来自文档的图像的读取比例因子,第二设置部分,被配置为设置图像形成介质的尺寸;确定部分,被配置为确定 分割范围,由所述第一设定部所设定的读取比例系数属于移动部,所述移动部被配置为以与由所述确定部确定的范围相对应的规定的移动速度移动所述扫描仪;计算部,被配置为基于 读取比例因子和图像形成介质的尺寸;以及存储部,其被配置为存储由光电转换装置读取的图像,同时移动部以与读取比例因子对应的移动速度移动扫描仪。
    • 98. 发明授权
    • Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
    • 用于动态检测基板破损和移动基板未对准的传感器
    • US07440091B2
    • 2008-10-21
    • US10973116
    • 2004-10-26
    • William A. BagleyPaohuei LeeKyung-Tae KimSam-Kyung KimToshio KiyotakeSam KimTakayuki MatsumotoJonathan Erik LarsonMakoto InagawaJames HoffmanBilly C. Leung
    • William A. BagleyPaohuei LeeKyung-Tae KimSam-Kyung KimToshio KiyotakeSam KimTakayuki MatsumotoJonathan Erik LarsonMakoto InagawaJames HoffmanBilly C. Leung
    • G01N21/00
    • H01L21/67265G01N21/9501
    • An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
    • 一种装置和方法,其结合有至少两个传感器,其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在,例如断裂或未对准。 在一个实施例中,用于检测衬底缺陷的装置包括传感器装置,其包括至少两个传感器,当衬底通过传感器时,至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。 在另一个实施例中,一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人,以及包括至少两个传感器的传感器装置,所述传感器装置包括至少两个传感器,所述至少两个传感器在衬底支承表面 。 在另一个实施例中,连续检测衬底缺陷的方法包括:当衬底通过传感器时,定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底,并且从至少两个传感器 涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。