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1. 发明授权

US07834994B2 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US07834994B2
公开(公告)日：2010-11-16
申请号：US12255629
申请日：2008-10-21
申请人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
发明人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
IPC分类号： G01N21/00
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
摘要翻译：提供了一种结合至少两个检测基板存在的传感器的装置和方法。在一个实施例中，描述了用于在处理系统中传送衬底的方法。该方法包括将基板定位在第一室中的末端执行器上，沿着基板行进路径使基板移动通过第一室和第二室之间的开口，并使用至少两个传感器来检测基板行进路径的相对侧至少两个传感器中的每一个限定了当边缘区域的至少一部分穿过光束路径时被引导通过衬底的相对边缘区域的光束路径。

2. 发明申请

US20090050270A1 SENSORS FOR DYNAMICALLY DETECTING SUBSTRATE BREAKAGE AND MISALIGNMENT OF A MOVING SUBSTRATE 有权
标题翻译：用于动态检测基板破损和移动基板缺失的传感器
公开(公告)号：US20090050270A1
公开(公告)日：2009-02-26
申请号：US12255629
申请日：2008-10-21
申请人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
发明人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
IPC分类号： C23F1/08 , C23C16/00 , C23C14/34 , G01B11/14 , H01L21/67
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the substrate through an opening between the first chamber and a second chamber along a substrate travel path, and sensing opposing sides of the substrate travel path using at least two sensors positioned proximate to the opening, each of the at least two sensors defining a beam path that is directed through opposing edge regions of the substrate when at least a portion of an edge region traverses the beam path.
摘要翻译：提供了一种结合至少两个检测基板存在的传感器的装置和方法。在一个实施例中，描述了用于在处理系统中传送衬底的方法。该方法包括将基板定位在第一室中的末端执行器上，沿着基板行进路径使基板移动通过第一室和第二室之间的开口，并使用至少两个传感器来检测基板行进路径的相对侧至少两个传感器中的每一个限定了当边缘区域的至少一部分穿过光束路径时被引导通过衬底的相对边缘区域的光束路径。

3. 发明授权

US07440091B2 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US07440091B2
公开(公告)日：2008-10-21
申请号：US10973116
申请日：2004-10-26
申请人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
发明人： William A. Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Erik Larson , Makoto Inagawa , James Hoffman , Billy C. Leung
IPC分类号： G01N21/00
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
摘要翻译：一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面。在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

4. 发明申请

US20060087647A1 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US20060087647A1
公开(公告)日：2006-04-27
申请号：US10973116
申请日：2004-10-26
申请人： William Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Larson , Makoto Inagawa , James Hoffman , Billy Leung
发明人： William Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Larson , Makoto Inagawa , James Hoffman , Billy Leung
IPC分类号： G01N21/88
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
摘要翻译：一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面。在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

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