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91. 发明授权

US07080658B2 Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method 有权
标题翻译：关闭流体通道的方法，以及该方法中使用的无水锤阀装置和无水锤关闭装置
公开(公告)号：US07080658B2
公开(公告)日：2006-07-25
申请号：US11152638
申请日：2005-06-15
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Kyousuke Dohi , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Kyousuke Dohi , Ryutaro Nishimura
IPC分类号： G05D16/02 , F16K47/02 , F16L55/055
CPC分类号： F16K47/02 , F16K47/023 , F16L55/043 , Y10T137/0324 , Y10T137/0379 , Y10T137/0396 , Y10T137/7761 , Y10T137/86389 , Y10T137/86461
摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.
摘要翻译：流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

92. 发明授权

US06193212B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06193212B1
公开(公告)日：2001-02-27
申请号：US09308922
申请日：1999-07-23
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

93. 发明授权

US07059363B2 Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system 有权
标题翻译：从配备有流量控制系统的气体供给装置向腔室供给分割气体的方法
公开(公告)号：US07059363B2
公开(公告)日：2006-06-13
申请号：US10495641
申请日：2003-01-20
申请人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryosuke Dohi , Toyomi Uenoyama
发明人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryosuke Dohi , Toyomi Uenoyama
IPC分类号： B65B1/04
CPC分类号： G05D7/0664 , Y10T137/7759 , Y10T137/7761
摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).
摘要翻译：一种用于提供规定量的处理气体的方法，同时从装备有流量的气体供应设备精确而快速地分离所需流量比Q 1 / Q 2 2 控制器进入一个房间。当从设置有流量控制器的气体供给设备以期望的流量比Q 1 / Q 2 2分配被指定量的气体供给时，压力室C通过固定在其端部的多个分支供给管线和淋浴板，压力分离量控制器FV 1和FV 2 2设置在多个分支供应线GL＆lt; 1＆gt;和GL＆gt; 2＆lt; 2＆gt ;. 通过来自分割量控制板FRC的初始流量设定信号开始两个分割量控制器FV 1和FV 2 2的打开控制，以完全打开控制阀CV 在控制阀CV的下游侧具有较高的流量和压力P 3 3和P 3 3“的压力型分配量控制器被调节，从而提供总计数量Q = Q 1/2 + Q 2 2，同时通过在淋浴板（3,4）中制成的孔口（3a，4a）分成腔室C 由式Q 1表示的期望分割量Q 1和Q 2 2由下式表示：C 1＆lt; 1＆gt;＆lt; 3＆ /＆gt;和＆lt; 2＆gt; 2＆gt; 2＆lt; 3＆gt;＆lt; 3＆gt;（其中，C 1和C < SUB> 2 是取决于孔口的横截面积或其上游侧的气体温度的常数）。

94. 发明授权

US06394415B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06394415B1
公开(公告)日：2002-05-28
申请号：US09627784
申请日：2000-07-27
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

95. 发明申请

US20090009297A1 System for recording valve actuation information 审中-公开
标题翻译：记录阀致动信息的系统
公开(公告)号：US20090009297A1
公开(公告)日：2009-01-08
申请号：US12154695
申请日：2008-05-27
申请人： Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Toshio Doh , Kouji Nishino , Shinichi Ozaki , Toshihiro Matsumoto
发明人： Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Toshio Doh , Kouji Nishino , Shinichi Ozaki , Toshihiro Matsumoto
IPC分类号： H04Q5/22
CPC分类号： H04Q9/00 , F16K37/0083 , H04Q2209/47
摘要： The present invention provides a system for recording valve actuation information that enables to figure out the actual operation condition of each individual valve without checking plural valves individually, and the valves do not have to be wired, and the structure of the system is simple.The present invention is a system for recording valve actuation information comprising a valve, detecting means for detecting actuation of said valve, a RFID tag affixed to said valve and recording the valve actuation information detected by said detecting means, and a terminal for reading out the valve actuation information detected by said detecting means, wherein said RFID tag searches said terminal by intermittently transmitting a radio wave, wherein said RFID tag transfers the valve actuation information recorded in said RFID tag to said terminal when said RFID tag detects said terminal.
摘要翻译：本发明提供一种用于记录阀致动信息的系统，其能够在不单独检查多个阀的情况下确定每个单独阀的实际操作状态，并且阀不必被布线，并且系统的结构简单。本发明是一种用于记录阀致动信息的系统，包括阀，用于检测所述阀的致动的检测装置，固定到所述阀上的RFID标签和记录由所述检测装置检测的阀致动信息，以及用于读出由所述检测装置检测的阀致动信息，其中所述RFID标签通过间歇地发送无线电波来搜索所述终端，其中当所述RFID标签检测到所述终端时，所述RFID标签将记录在所述RFID标签中的阀致动信息传送到所述终端。

96. 发明申请

US20120074339A1 REGULATING VALVE DEVICE 审中-公开
标题翻译：调节阀装置
公开(公告)号：US20120074339A1
公开(公告)日：2012-03-29
申请号：US13138670
申请日：2010-03-08
申请人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanigawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
发明人： Nobukazu Ikeda , Michio Yamaji , Tsuyoshi Tanigawa , Hiroshi Kaneko , Yasushi Yagi , Yuji Ono , Tadahiro Ohmi , Yasuyuki Shirai
IPC分类号： F16K31/12
CPC分类号： F16K31/126 , F16K31/1268 , F16K41/10
摘要： [Problem] To provide a regulating valve device having a valve element opened or closed by a working fluid.[Solution to Problem] A valve element 310 has a structure in which a valve head 310a and a valve body 310b are coupled by a valve stem 310c. In the valve box 305, the valve element 310 and a power transmitting member 320a are slidably housed. A first bellows 320b is fixed to the power transmitting member 320a and the valve box 305 to form a first space Us at a position on a side of the power transmitting member 320a opposite the valve element. A second bellows 320c is fixed to the power transmitting member 320a and the valve box 305 to form a second space Ls at a position on a side of the power transmitting member 320a closer to the valve element. According to a ratio of air supplied to the first space Us from a first pipe 320d and air supplied to the second space Ls from a second pipe 320e, the power transmitting member 320a transmits power to the valve head 310a to open or close a transport channel 200a.
摘要翻译： [问题]提供一种具有由工作流体打开或关闭的阀元件的调节阀装置。问题的解决方案阀元件310具有阀头310a和阀体310b通过阀杆310c联接的结构。在阀箱305中，阀元件310和动力传递部件320a可滑动地容纳。第一波纹管320b固定到动力传递部件320a和阀箱305，以在与阀元件相对的动力传递部件320a的一侧的位置处形成第一空间Us。第二波纹管320c固定在动力传递部件320a和阀箱305上，在动力传递部件320a的靠近阀体的一侧的位置形成第二空间Ls。根据从第一管320d向第一空间Us供给的空气的比例和从第二管320e供给到第二空间Ls的空气的比例，动力传递构件320a向阀头310a传递动力以打开或关闭运送通道 200a。

97. 发明授权

US07988130B2 Valve for vacuum exhaustion system 有权
标题翻译：真空排气系统阀门
公开(公告)号：US07988130B2
公开(公告)日：2011-08-02
申请号：US12208949
申请日：2008-09-11
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
IPC分类号： F16K7/17
CPC分类号： F16K7/14 , F16K27/003 , F16K51/02
摘要： The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.
摘要翻译：本发明提供了一种操作阀门的阀门和方法，其使得可以减小真空排气管道的直径，从而使得真空耗尽系统的设备较小，这导致降低成本并缩短真空耗尽时间，以及哪些可以防止由流经管道的气体分解产生的物质积聚引起的管道系统内的腐蚀，堵塞和密封泄漏。特别地，根据本发明，在真空耗尽系统中使用的管道部件即阀等上施加铝钝化，以便抑制由于烘烤时由温度升高引起的气体分解提供了用于减小真空排气系统中的直径尺寸的部件。因此，防止由气体分解引起的腐蚀，堵塞和座椅泄漏。

98. 发明申请

US20090020721A1 Valve for Vacuum Exhaustion System 有权
标题翻译：真空耗尽阀系统
公开(公告)号：US20090020721A1
公开(公告)日：2009-01-22
申请号：US12208949
申请日：2008-09-11
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Michio Yamaji , Masafumi Kitano , Akihiro Morimoto
IPC分类号： F16K1/00
CPC分类号： F16K7/14 , F16K27/003 , F16K51/02
摘要： The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.
摘要翻译：本发明提供了一种操作阀门的阀门和方法，其可以减小真空排气管道的直径，使得真空耗尽系统的设备变小，这导致降低成本并缩短真空耗尽时间，以及哪些可以防止由流经管道的气体分解产生的物质积聚引起的管道系统内的腐蚀，堵塞和密封泄漏。特别地，根据本发明，在真空耗尽系统中使用的管道部件即阀等上施加铝钝化，以便抑制由于烘烤时由温度升高引起的气体分解提供了用于减小真空排气系统中的直径尺寸的部件。因此，防止由气体分解引起的腐蚀，堵塞和座椅泄漏。

99. 发明授权

US07368092B2 Apparatus and reactor for generating and feeding high purity moisture 有权
标题翻译：用于产生和提供高纯度水分的装置和反应器
公开(公告)号：US07368092B2
公开(公告)日：2008-05-06
申请号：US10724101
申请日：2003-12-01
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Yukio Minami , Kouji Kawada , Katunori Komehana , Teruo Honiden , Touru Hirai , Akihiro Morimoto , Toshirou Nariai , Keiji Hirao , Masaharu Taguchi , Osamu Nakamura
IPC分类号： B01J19/24 , B01J8/02 , C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译：一种用于从氢气和氧气产生水蒸汽并将高纯度水分提供给诸如半导体生产的过程的安全的减压装置。该设备通过保持催化反应器的内部压力以消除气体点燃的可能性，以产生高水平的水分，同时在减压下从反应器中提供湿气。散热反应器的改进通过有效冷却反应器耐氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

100. 发明申请

US20070132231A1 Joint for use in fluid control apparatus 有权
标题翻译：用于流体控制装置的接头
公开(公告)号：US20070132231A1
公开(公告)日：2007-06-14
申请号：US11606974
申请日：2006-12-01
申请人： Ichiro Tokuda , Michio Yamaji , Kenji Tsubota , Tsutomu Shinohara , Nobukazu Ikeda
发明人： Ichiro Tokuda , Michio Yamaji , Kenji Tsubota , Tsutomu Shinohara , Nobukazu Ikeda
IPC分类号： F16L39/00
CPC分类号： F16L39/00 , Y10T137/87885
摘要： A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.
摘要翻译：用于流体控制装置的长方体接头整体上包括两个分开的构件，它们是一个带槽的连接构件，在其中心具有槽，并且在槽的相应相对侧上设置有一部分槽，每个螺栓孔具有阶梯部分，在其中容纳接头连接螺栓，而不允许其头部从接头突出并且具有内螺纹部分，用于要拧入的用于附接设备部件的各个外螺纹部件; 以及安装在连接构件的凹槽中并且仅设置有U形通信通道的平坦的长方体连通构件。连接构件由不锈钢制成，而连通构件由聚酰胺6制成。定位突起形成在限定连接构件的槽的底面上，并且嵌合在形成在该连接构件的底表面中的定位凹部中沟通会员

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