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    • 3. 发明专利
    • EVALUATION EQUIPMENT FOR ORIENTATION MEMBRANE
    • JPH07151640A
    • 1995-06-16
    • JP21908794
    • 1994-09-13
    • TOSHIBA CORP
    • ISHIBASHI MITSURUSASAKI HIDEYUKINOMAKI TATSUOTANAKA AKIRA
    • G01M11/00G02F1/1337
    • PURPOSE:To increase the yield of element by measuring the difference of absorbance between two orthogonal linear polarized infrared rays reflected on the surface of an orientation membrane thereby measuring the orientative ability of a liquid crystal orientation membrane at high sensitivity and accuracy. CONSTITUTION:An infrared ray R emitted from an infrared light source 1 passes through a Michelson interferometer 3 in a Fourier transform infrared spectrometer and then subjected to polarizing modulation by means of a polarizer 5 and a photoelastic modulator 7. The infrared ray R is deflected by a reflection measuring unit 9 to impinge on an orientation membrane substrate at a specific incident angle and in a specific direction with respect to the orientational direction of orientation membrane molecules and reflected to enter into an infrared photodetector 11. The detector 11 is connected with a lock-in amplifier 13 which is controlled synchronously with the modulator 7 by means of a controller 15. Consequently, switching is made quickly between two linear polarizations and the orientation ability of liquid crystal is evaluated based on the difference of absorbance (difference between two infrared colors) between reflected infrared rays determined at a processing section 17.
    • 4. 发明专利
    • METHOD AND APPARATUS FOR RUBBING
    • JPH0782395A
    • 1995-03-28
    • JP22707293
    • 1993-09-13
    • TOSHIBA CORP
    • ISHIBASHI MITSURUSASAKI HIDEYUKINOMAKI TATSUOTANAKA AKIRA
    • C08J7/00G01M11/00
    • PURPOSE:To obtain a high rubbing intensity easily and an oriented polymer film with a stable orientation by detecting the surface temp. of a polymer with an infrared temp. detector and automatically controlling the surface temp. or rubbing conditions based on the results of the detection. CONSTITUTION:The temp. of an area being rubbed of an oriented polymer film is so controlled as to be equal to the glass transition temperature of the film or above but not higher than 60 deg.C above the glass transition temperature. The molecular orientation on the surface of a polymer film 7b formed on a substrate 7a is arranged in one direction by using a rubbing apparatus which comprises a rubbing means (a rubbing roller 1 and rubbing cloth 3) which rubs the surface of the oriented polymer film 7b in one direction, a detecting means (an infrared-condensing lens 15 and an infrared detector 17) which detects the temp. of the film surface being rubbed, and a control means which changes rubbing conditions by controlling the rubbing means based on the temp. detected.
    • 8. 发明专利
    • METHOD FOR MEASURING GLASS TRANSITION TEMPERATURE
    • JPH03148046A
    • 1991-06-24
    • JP28709789
    • 1989-11-02
    • TOSHIBA CORP
    • SASAKI HIDEYUKINOMAKI TATSUOYOSHIDA TAKASHIDOI SEIZO
    • G01N25/02G01N21/35G01N21/3563
    • PURPOSE:To make it possible to perform the highly accurate measurement of the glass transition temperature in an amorphous macromolecular material having the partial structure of O = C - C - X group (X is halogen element) in a chemical structure on the spot of the manufacturing process by measuring the change in intensity ratio of the absorption peak of the infrared-ray absorbing spectrum of this material with respect to the temperature. CONSTITUTION:At first, infrared rays 2 from a light source 3 is applied on a sample to be measured 8 which is kept at a specified temperature through a Michelson interferometer 4 and a first reflecting mirror 5. The infrared rays reflected from the sample 8 is guided to a detector 7 through a reflecting mirror 6. The peak intensity of the infrared-ray absorbing spectrum is measured. A peak-intensity ratio R is obtained based on the measured peak intensity. A series of measurements are performed by changing the heating temperature. The change in peak intensity ratio R with respect to the heating temperature is obtained. The temperature where the value of R starts changing is obtained with respect to the change in peak intensity ratio R with regard to the heating temperature obtained in this way. Thus, the glass transition temperature of resist can be obtained accurately.
    • 10. 发明专利
    • ANALYZER
    • JPH11258218A
    • 1999-09-24
    • JP6585498
    • 1998-03-16
    • TOSHIBA CORP
    • SATO TOMOKANOMAKI TATSUOYOSHIDA TAKASHISAKAI KIMITO
    • G01N1/22G01N30/00G01N30/08
    • PROBLEM TO BE SOLVED: To enable the highly sensitive, highly accurate, and simple analysis of substances produced from a member at ordinary temperatures. SOLUTION: A collector 4 is arranged so as to cover the overall surfaces of the inner wall surfaces of a member housing container 1. After placing a member 100 to be measured inside the collector 4, a pump 6 is operated to introduce clean gas from a gas introducing pipe 2, and substances produced from the member 100 at ordinary temperatures are collected by the collector 4 without loss. After this, the member 100 is removed, and the member housing container 1 and a gas discharging pipe 3 are heated by a heating heater 10 to a temperature of 300 deg.C to separate the collected substances from the collector 4. The collected substances are introduced to a measuring device 7 to analyze. As the member housing container 1 and the discharging pipe 3 are heated, the separated substances are not adsorbed to the inner walls of the member housing container 1 and the discharging pipe 3, it is possible to supply the collected substances for the measuring device 7 without loss. By this, it is possible to analyze even trace amounts of substances generated from the member 100 and produced substances easily adsorbed to the inner walls of the container 1 and the discharging pipe 3 highly sensitively and highly accurately.