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    • 4. 发明授权
    • Batch type heat treatment system, method for controlling same, and heat treatment method
    • 批式热处理系统,其控制方法和热处理方法
    • US06730885B2
    • 2004-05-04
    • US09897908
    • 2001-07-05
    • Fujio SuzukiWenling WangKoichi SakamotoMoyuru YasuharaSunil ShahPradeep Pandey
    • Fujio SuzukiWenling WangKoichi SakamotoMoyuru YasuharaSunil ShahPradeep Pandey
    • H05B302
    • H01L21/67248H01L21/67109
    • There is provided a batch type heat treatment system, control method and heat treatment method capable of appropriately coping with a multi-product small-lot production. A reaction tube 2 comprises a plurality of heaters 31 through 35 and a plurality of temperature sensors, and houses therein a wafer boat 23. A control part 100 stores therein many mathematical models for estimating (calculating) the temperature of wafers W in the reaction tube 2, in accordance with the number and arranged position of the wafers W mounted on the wafer boat 23, and many target temperature trajectories. If the wafer boat 23 is loaded in the reaction tube 2, a mathematical model and a target temperature trajectory corresponding to the number and arranged position of the mounted wafers W are read. If a deposition process is started, the output of a temperature sensor S and the model are used for estimating the temperature of the wafers W in the reaction tube 2, and the powers to be supplied to the heaters 31 through 35 are separately controlled so that the estimated temperature approaches the target temperature trajectory.
    • 提供能够适当应对多产品小批量生产的批式热处理系统,控制方法和热处理方法。反应管2包括多个加热器31至35和多个温度传感器,以及 在其中容纳晶片舟23.控制部分100存储许多用于根据安装在晶片舟23上的晶片W的数量和布置位置来估计(计算)反应管2中的晶片W的温度的数学模型 ,以及许多目标温度轨迹。 如果晶片舟23装载在反应管2中,则读取与安装的晶片W的数量和排列位置对应的数学模型和目标温度轨迹。 如果开始沉积工艺,则使用温度传感器S和模型的输出来估计反应管2中的晶片W的温度,并且分别控制供给到加热器31至35的功率,使得 估计的温度接近目标温度轨迹。
    • 5. 发明授权
    • Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles
    • 使用硅纳米颗粒流体原位控制一组掺杂剂扩散分布的方法
    • US08163587B2
    • 2012-04-24
    • US12506811
    • 2009-07-21
    • Giuseppe ScarderaDmitry PoplavskyyMichael BurrowsSunil Shah
    • Giuseppe ScarderaDmitry PoplavskyyMichael BurrowsSunil Shah
    • H01L21/22
    • H01L21/2255H01L31/068Y02E10/547
    • A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron atoms, the substrate comprising a front substrate surface, and depositing an ink on the front substrate surface in an ink pattern, the ink comprising a set of nanoparticles and a set of solvents. The method further includes heating the substrate in a baking ambient to a first temperature of between about 200° C. and about 800° C. and for a first time period of between about 3 minutes and about 20 minutes in order to create a densified film ink pattern. The method also includes exposing the substrate to a dopant source in a diffusion furnace with a deposition ambient, the deposition ambient comprising POCl3, a carrier N2 gas, a main N2 gas, and a reactive O2 gas, wherein a ratio of the carrier N2 gas to the reactive O2 gas is between about 1:1 to about 1.5:1, at a second temperature of between about 700° C. and about 1000° C., and for a second time period of about 5 minutes to about 35 minutes. The method also includes heating the substrate in a drive-in ambient to a third temperature of between about 800° C. and about 1100° C.
    • 公开了一种在衬底上形成多掺杂结的方法。 所述方法包括提供掺杂有硼原子的衬底,所述衬底包括前衬底表面,以及以油墨图案在所述前衬底表面上沉积墨,所述油墨包括一组纳米颗粒和一组溶剂。 该方法还包括将烘烤环境中的基材加热至约200℃至约800℃的第一温度和约3分钟至约20分钟的第一时间段,以便产生致密化的膜 墨水图案。 该方法还包括在具有沉积环境的扩散炉中将衬底暴露于掺杂剂源,沉积环境包括POCl 3,载体N2气体,主N 2气体和反应性O 2气体,其中载气N2气体 至反应性O 2气体的摩尔比为约1:1至约1.5:1,第二温度为约700℃至约1000℃,第二时间为约5分钟至约35分钟。 该方法还包括将驱动环境中的衬底加热至约800℃至约1100℃的第三温度。
    • 9. 发明授权
    • Method and apparatus for efficiently creating backup files with less redundancy
    • 有效地创建冗余冗余的备份文件的方法和设备
    • US08201021B1
    • 2012-06-12
    • US11048458
    • 2005-01-31
    • Sunil ShahKirk L. SearlsYnn-Pyng “Anker” Tsaur
    • Sunil ShahKirk L. SearlsYnn-Pyng “Anker” Tsaur
    • G06F11/00
    • G06F11/1453
    • A method of creating backup files having less redundancy. The method creates a backup file by creating an overhead segment for each file that is to be backed up and creating a data segment containing the data that is to be backed up for each file. After creating the overhead segment and the data segment, the overhead segment is placed into an overhead stream data segment is stored in memory. The overhead segment is also positioned in the overhead stream with a pointer that identifies the data segment within the memory. For backups of subsequent servers or the same server at a later time, the backup software will create a separate overhead stream. However, a plurality of overhead streams may contain pointers to the same data segments such that redundant data segments do not need to be stored in a backup server.
    • 创建冗余冗余的备份文件的方法。 该方法通过为要备份的每个文件创建开销段,并创建一个包含要为每个文件备份的数据的数据段来创建一个备份文件。 在创建开销段和数据段之后,开销段被放置在开销流中,数据段被存储在存储器中。 开销段也位于开销流中,并带有一个用于标识存储器内的数据段的指针。 对于稍后的后续服务器或同一服务器的备份,备份软件将创建一个单独的开销流。 然而,多个开销流可以包含指向相同数据段的指针,使得冗余数据段不需要存储在备份服务器中。