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1. 发明授权

US5451147A Turbo vacuum pump 失效
标题翻译：涡轮真空泵
公开(公告)号：US5451147A
公开(公告)日：1995-09-19
申请号：US767666
申请日：1991-09-30
申请人： Seiji Sakagami , Shinjiro Ueda , Masahiro Mase , Takashi Nagaoka
发明人： Seiji Sakagami , Shinjiro Ueda , Masahiro Mase , Takashi Nagaoka
IPC分类号： F04D29/056 , F04D19/04 , F04D29/04 , F04D29/057 , F04D29/059 , F01D1/36
CPC分类号： F04D29/057 , F04D17/168 , F04D19/04 , F04D23/008 , F04D29/0513
摘要： A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.
摘要翻译：紧凑，易于操作的涡轮真空泵包括具有入口和出口的壳体; 设置在所述壳体中并且具有阶梯状周面的圆柱形转子和固定到所述台阶的突出角部的多个叶片; 以及泵送机构部，在该泵机构部分中，通过定子面对泵送级，所述定子面对转子的叶片横跨狭窄的间隙，并且其中在定子内部的阶梯状凹陷中设置有周边泵流路。所述涡轮真空泵还包括旋转轴，其连接到所述转子并且由径向气体轴承和推进气体轴承可旋转地支撑; 以及用于操作转子的马达部分。通过入口吸入的气体可以通过出口排出到大气中。

2. 发明授权

US5961291A Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump 失效
标题翻译：具有磁悬浮转子的涡轮真空泵和用于以各种角度移动旋转器的控制单元，以从泵的内部刮下沉积物
公开(公告)号：US5961291A
公开(公告)日：1999-10-05
申请号：US921475
申请日：1997-09-02
申请人： Seiji Sakagami , Masahiro Mase , Chiaki Urano , Shinji Koyano , Yuichi Kinoshita , Takashi Nagaoka, deceased
发明人： Seiji Sakagami , Masahiro Mase , Chiaki Urano , Shinji Koyano , Yuichi Kinoshita , Takashi Nagaoka, deceased
IPC分类号： F04D27/00 , F04D19/04 , F04D29/70 , F04B49/02
CPC分类号： F04D19/048 , F04D17/168 , F04D23/008 , F04D29/70
摘要： A turbo vacuum pump has a rotor and magnetic bearings. The magnetic bearings are held in a housing having a suction port and an exhaust port, and support the rotor rotatably. A peripheral flow pump stage and screw pump stage are formed in the rotor, so that the pressure at the exhaust port can be at or near atmospheric pressure level. Before starting the turbo vacuum pump, the magnetic bearings are operated to displace a rotor position and to scrape off the reaction products which have deposited inside the pump. In addition, before starting the turbo vacuum pump, a stator of the pump is heated up to decrease a binding force of the reaction products. Therefore, the pump can be restarted, even if the rotor has locked by the solidification of deposited reaction products formed during stopping of the pump.
摘要翻译：涡轮真空泵具有转子和磁性轴承。磁性轴承保持在具有吸入口和排气口的壳体中，并且可旋转地支撑转子。在转子中形成有外围流动泵级和螺杆泵级，使得排气口处的压力可处于或接近大气压力水平。在启动涡轮真空泵之前，操作磁性轴承以移动转子位置并刮掉沉积在泵内的反应产物。另外，在启动涡轮真空泵之前，泵的定子被加热以降低反应产物的结合力。因此，即使转子已经通过在泵的停止期间形成的沉积的反应产物的凝固而被锁定，泵也可以重新启动。

3. 发明授权

US5536148A Turbo vacuum pump 失效
标题翻译：涡轮真空泵
公开(公告)号：US5536148A
公开(公告)日：1996-07-16
申请号：US297017
申请日：1994-08-29
申请人： Akira Nishiuchi , Masahiro Mase , Noboru Matsumura , Katsuaki Kikuchi , Takashi Nagaoka , Seiji Sakagami
发明人： Akira Nishiuchi , Masahiro Mase , Noboru Matsumura , Katsuaki Kikuchi , Takashi Nagaoka , Seiji Sakagami
IPC分类号： F04D17/16 , F04D19/04 , F04D29/58 , F04B23/14
CPC分类号： F04D19/046 , F04D17/168 , F04D23/008 , F04D29/582
摘要： A turbo vacuum pump for compressing a low-pressure gas to discharge the compressed gas into atmosphere comprises pump stator having a gas flow passage comprising a plurality of annular flow passages on an inner surface thereof arranged stepwise diameters of which become smaller toward downstream and passages intercommunicating with adjacent annular flow passages and a gas discharge port communicated with one of the plurality of annular flow passages disposed at the most downstream. The pump stator includes a cylindrical spiral grooved pump impeller and a plurality of peripheral flow pump impellers facing the annular flow passages provided downstream of the cylindrical spiral grooved pump impeller and having stepwise diameters which become smaller toward downstream to form a peripheral flow pump stage. The suction casing has a spiral groove on a cylindrical inner surface thereof arranged with a predetermined clearance in relation to the spiral grooved pump impeller of the pump rotor so as to form a spiral grooved pump stage and a gas suction port communicated with the spiral grooved pump stage.
摘要翻译：用于压缩低压气体以将压缩气体排放到大气中的涡轮真空泵包括具有气体流动通道的泵定子，所述气体流动通道在其内表面上包括多个环形流动通道，所述内部表面的逐步直径向下游变小并且通过相互通信与相邻的环形流动通道相连接，气体排出口与设置在最下游的多个环形流动通道中的一个连通。泵定子包括圆柱形螺旋槽泵叶轮和面向环形流动通道的多个周向流动泵叶轮，其设置在圆柱形螺旋槽泵叶轮的下游，并且具有朝向下游变小的逐步直径以形成外围流动泵级。抽吸壳体在其圆柱形内表面上具有相对于泵转子的螺旋槽泵叶轮设置有预定间隙的螺旋槽，以形成螺旋槽泵台和与螺旋槽泵连通的吸气口阶段。

4. 发明授权

US5020969A Turbo vacuum pump 失效
标题翻译：涡轮真空泵
公开(公告)号：US5020969A
公开(公告)日：1991-06-04
申请号：US409720
申请日：1989-09-20
申请人： Masahiro Mase , Seiji Sakagami , Takeshi Okawada , Shinjiroo Ueda , Yoshihisa Awada , Takashi Nagaoka
发明人： Masahiro Mase , Seiji Sakagami , Takeshi Okawada , Shinjiroo Ueda , Yoshihisa Awada , Takashi Nagaoka
IPC分类号： F04D19/04
CPC分类号： F04D17/168 , F04D23/008
摘要： Since a peripheral-flow pump according to the present invention has a peripheral-flow impeller having a cylindrical staircase shape whose outer diameter increases in one direction only like a staircase, a stator, which conventionally has been of a complicated configuration composed of two pieces, can be formed into an integral molding without any deterioration in pump performance. Accordingly, the production of pumps is facilitated.
摘要翻译：由于根据本发明的外围流量泵具有外圆流动叶轮，其圆筒状的台阶形状的外径仅在阶梯方向上增加一个方向，所以常规地由两部分组成的复杂构造的定子，可以形成一体成型，而不会使泵性能下降。因此，促进了泵的生产。

5. 发明授权

US4735550A Turbo molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US4735550A
公开(公告)日：1988-04-05
申请号：US890610
申请日：1986-07-30
申请人： Takeshi Okawada , Shinjiro Ueda , Susumu Yamazaki , Masahiro Mase , Nobukatsu Arai , Kazuaki Nakamori
发明人： Takeshi Okawada , Shinjiro Ueda , Susumu Yamazaki , Masahiro Mase , Nobukatsu Arai , Kazuaki Nakamori
IPC分类号： F04D25/00 , F04D19/04 , F04D23/00 , F04D5/00
CPC分类号： F04D23/008 , F04D17/168 , F04D19/04
摘要： According to the turbo molecular pump of the present invention, a regenerative pump is constructed by arcuate eddy current grooves having a predetermined angle with respect to the surface of the outer periphery of a rotor and which are circumferentially engraved in array in the rotor and an arcuate ventilating channel engraved in the circumferential direction in a stator, and a partition is defined in the stator circumferentially partitioning the ventilating channel, so that the working range on the low vacuum side may be extended.
摘要翻译：根据本发明的涡轮分子泵，再生泵由相对于转子的外周面的预定角度的弧形涡流槽构成，并且在转子中圆周地雕刻成圆弧状，在定子中沿圆周方向雕刻的通风通道，并且在定子中沿周向划分通气通道的隔板，从而可以延长低真空侧的工作范围。

6. 发明授权

US4734018A Vacuum pump with plural labyrinth seal portions 失效
标题翻译：具有多个迷宫式密封部分的真空泵
公开(公告)号：US4734018A
公开(公告)日：1988-03-29
申请号：US947282
申请日：1986-12-29
申请人： Minoru Taniyama , Masahiro Mase , Takashi Nagaoka
发明人： Minoru Taniyama , Masahiro Mase , Takashi Nagaoka
IPC分类号： F04D19/04 , F04D29/10 , F16J15/40 , F04B17/00
CPC分类号： F16J15/406 , F04D19/04 , F04D29/104
摘要： A vacuum pump with a seal structure for a pump unit of the vacuum pump and a driving mechanism for rotating a rotor in the pump stages of the pump is disclosed. The seal structure is provided with a narrow gap sealing arrangement formed by a stationary member which is opposed to the portion of a shaft of the driving mechanism which is between the pump unit and an upper bearing supporting the same shaft, which narrow gap sealing arrangement comprises first, second and third seal portions; a mechanism for supplying a discharge gas to the first seal portion; and a mechanism for supplying a purge gas to the second and third seal portions. Owing to these parts, the feed rate of the purge gas can be minimized, and the entry of the oil mist, which occurs during the lubrication of the bearing, into the interior of the pump unit can be prevented. This enables the interior of the pump unit to be kept clean.
摘要翻译：公开了具有用于真空泵的泵单元的密封结构的真空泵和用于使泵的泵级中的转子旋转的驱动机构。所述密封结构设置有由固定构件形成的窄间隙密封装置，所述固定构件与所述驱动机构的轴的位于所述泵单元和支撑相同轴的上轴承之间的部分相对，所述窄间隙密封装置包括第一，第二和第三密封部分; 用于向第一密封部供给排出气体的机构; 以及用于向第二和第三密封部分供应净化气体的机构。由于这些部件，可以使吹扫气体的进料速度最小化，并且可以防止在轴承的润滑期间发生的油雾进入泵单元的内部。这使得泵单元的内部保持清洁。

7. 发明授权

US5664935A Vacuum pump 失效
标题翻译：真空泵
公开(公告)号：US5664935A
公开(公告)日：1997-09-09
申请号：US528413
申请日：1995-09-14
申请人： Akira Nishiuchi , Masahiro Mase , Noboru Matsumura , Katsuaki Kikuchi , Takashi Nagaoka
发明人： Akira Nishiuchi , Masahiro Mase , Noboru Matsumura , Katsuaki Kikuchi , Takashi Nagaoka
IPC分类号： F04D19/04 , F04D29/58 , F01D1/36
CPC分类号： F04D19/046 , F04D17/168 , F04D23/008 , F04D29/582 , F04D29/681
摘要： A dry turbo vacuum pump has a multistage circumferential impeller supported on a shaft, and a stator which cooperates with it to form a multistage peripheral flow pump. A centrifugal pump arranged at an inlet side of the peripheral flow pump is also mounted on the same shaft, so that gas sucked from the inlet is discharged to the atmosphere from the peripheral flow pump. The multistage peripheral flow pump and at least one stage of the centrifugal pump are integrated.
摘要翻译：干式涡轮真空泵具有支撑在轴上的多级圆周叶轮和与其协作以形成多级外围流动泵的定子。设置在周边流量泵的入口侧的离心泵也安装在同一轴上，使得从入口吸入的气体从周边流量泵排出到大气中。多级外围流量泵和离心泵的至少一级集成。

8. 发明授权

US5190438A Vacuum pump 失效
标题翻译：真空泵
公开(公告)号：US5190438A
公开(公告)日：1993-03-02
申请号：US682265
申请日：1991-04-08
申请人： Minoru Taniyama , Masahiro Mase , Kazuaki Nakamori , Takashi Nagaoka
发明人： Minoru Taniyama , Masahiro Mase , Kazuaki Nakamori , Takashi Nagaoka
IPC分类号： F04C29/02 , F04C29/04 , F04D19/04 , F04D29/58
CPC分类号： F04D19/04 , F04C29/025 , F04C29/04 , F04D29/063 , F04D29/584
摘要： A vacuum pump of the present invention comprises a housing including a suction port and an exhaust port, a stator fixed in the housing, a rotor rotatably supported in the housing, and a cooling jacket provided adjacent to the stator. Gas suctioned from the suction port and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port. A cooling fluid having a thermal conductivity less than that of water, for example, of 0.08 to 0.25 Kcal/m.h..degree.C. flows through the cooling jacket. When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil may be supplied as the cooling fluid to the cooling jacket from the same supply line as lubrication oil supplied to oil lubricating bearings provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket, a tank, the supply line, and a return line, to thereby circulate the cooling fluid by a pump.

9. 发明授权

US5062771A Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber 失效
标题翻译：具有二次气体的真空系统也连接到用于半导体加工室的粗糙泵
公开(公告)号：US5062771A
公开(公告)日：1991-11-05
申请号：US325910
申请日：1989-03-20
申请人： Akihiko Satou , Tadao Kusaka , Shigeo Tomiyama , Kouzi Aoki , Ichiro Gyobu , Kimio Muramatsu , Hiroaki Sakamoto , Shinjiroo Ueda , Masahiro Mase , Takashi Nagaoka
发明人： Akihiko Satou , Tadao Kusaka , Shigeo Tomiyama , Kouzi Aoki , Ichiro Gyobu , Kimio Muramatsu , Hiroaki Sakamoto , Shinjiroo Ueda , Masahiro Mase , Takashi Nagaoka
IPC分类号： B01J3/00 , C23C16/44 , F04D19/04
CPC分类号： B01J3/006 , C23C16/4412 , F04D17/168 , F04D19/046 , F04D23/008 , Y10S148/022 , Y10S148/03 , Y10S148/169 , Y10S438/909
摘要： This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semiconductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus. Accordingly, highly clean evacuated condition can be attained and, in addition, semiconductor devices at high reliability and with no degradation in the electric characteristics can be obtained by using the pressure-reducing processing apparatus having such a highly clean processing chamber.

10. 发明授权

US4904155A Vacuum pump 失效
标题翻译：真空泵
公开(公告)号：US4904155A
公开(公告)日：1990-02-27
申请号：US217887
申请日：1988-07-12
申请人： Takashi Nagaoka , Ichiro Gyobu , Kimio Muramatsu , Keiji Ueyama , Masahiro Mase , Yoshihisa Awada , Akira Nishiuchi
发明人： Takashi Nagaoka , Ichiro Gyobu , Kimio Muramatsu , Keiji Ueyama , Masahiro Mase , Yoshihisa Awada , Akira Nishiuchi
IPC分类号： F04D17/16 , F04D19/04 , F04D29/58 , F04D29/70
CPC分类号： F04D19/046 , F04D17/168 , F04D29/582
摘要： A vacuum pump with a heating portion for preventing adhesion of reaction products on a discharge side thereof.

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