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    • 2. 发明授权
    • Temperature adjusting device
    • 调温装置
    • US6125635A
    • 2000-10-03
    • US223301
    • 1998-12-30
    • Shinichi NomuraShinji KoyanoYuichi Kinoshita
    • Shinichi NomuraShinji KoyanoYuichi Kinoshita
    • F25B21/02F25B21/04H01L35/30H01L35/32
    • F25B21/04
    • A temperature adjusting device has an air-tight container. A thermoelectric element is disposed in the air-tight container and has first and second opposite surfaces each capable of radiating and absorbing heat through a Peltier effect. A first heat exchanger is disposed in the air-tight container for performing heat exchange between a thermally conductive first medium and the first surface of the thermoelectric element. A tank is disposed in the air-tight container and is connected to an inlet side of the first heat exchanger for storing the first medium. A second heat exchanger is disposed in the air-tight container for performing heat exchange between a thermally conductive second medium and the second surface of the thermoelectric element. A pump circulates the first medium through the first heat exchanger. A temperature sensor detects a temperature of the first medium circulated by the pump. A controller controls an electric current supplied to the thermoelectric element so that a temperature detected by the temperature sensor becomes equal to a preselected temperature value.
    • 温度调节装置具有气密容器。 热电元件设置在气密容器中,并且具有能够通过珀尔帖效应辐射和吸收热量的第一和第二相对表面。 第一热交换器设置在气密容器中,用于在导热第一介质和热电元件的第一表面之间进行热交换。 将容器设置在气密容器中并与第一热交换器的入口侧连接以存储第一介质。 第二热交换器设置在气密容器中,用于在导热第二介质和热电元件的第二表面之间进行热交换。 泵将第一介质循环通过第一热交换器。 温度传感器检测由泵循环的第一介质的温度。 控制器控制提供给热电元件的电流,使得由温度传感器检测到的温度等于预选温度值。
    • 5. 发明授权
    • In-vacuum conveyance robot
    • 真空输送机器人
    • US5234303A
    • 1993-08-10
    • US692638
    • 1991-04-29
    • Shinji Koyano
    • Shinji Koyano
    • B65G49/00B25J9/00B25J9/06B65G49/07H01L21/687
    • H01L21/68707H01L21/67742Y10S414/139
    • In a robot for conveying a workpiece or the like 21 in vacuum chambers (16, 24); a conveyance robot for use in a high vacuum, in which magnetic floatation and magnetic drive are applied to a rectilinear movement axis (R-axis) (1, 20) for conveying the workpiece 21, a magnetic seal 9 for shutting off a vacuum side A from an atmospheric air side B is applied to a rotation axis (.theta.-axis) 25 for rotating the R-axis (1, 20), and a vacuum bellows 14 for shutting off the vacuum side A from the atmospheric air side B is applied to a vertical movement axis (Z-axis) 17 for vertically moving the R-axis (1, 20) and the .theta.-axis 25, whereby sliding or rolling is avoided in the vacuum.
    • 在用于在真空室(16,24)中输送工件等的机器人; 将用于输送工件21的直线运动轴(R轴)(1,20)施加磁浮动和磁力驱动的高真空运送机器人,用于切断真空侧的磁性密封件9 来自大气空气侧B的A被施加到用于旋转R轴(1,20)的旋转轴(θ轴)25,并且用于从大气空气侧B关闭真空侧A的真空波纹管14是 施加到用于垂直移动R轴(1,20)和θ轴25的垂直运动轴线(Z轴)17,从而在真空中避免滑动或滚动。
    • 6. 发明授权
    • Transferring device
    • 传输设备
    • US5639206A
    • 1997-06-17
    • US434513
    • 1995-05-04
    • Yoshimasa OdaShinji KoyanoAkinobu Harada
    • Yoshimasa OdaShinji KoyanoAkinobu Harada
    • B65G54/02F16C32/04H01L21/677H01L21/68H02K7/09H02K41/025H02K49/06B25J13/00
    • B65G54/025H01L21/67709H02K41/025H02K49/06H02K7/09
    • A transferring device is provided for transferring an article between vacuum chambers. The transferring device comprises a cylindrical float member, and a transferring rod connected to and extending along an axial direction for supporting an article. At least one magnetic member is disposed on a peripheral surface of the float member. A cylindrical partition member having a thin, uniform circular cross-sectional thickness is disposed between the electromagnet and the float member. A support member is disposed within the partition member for reciprocating movement between opposite ends of the partition member. The support member supports at least one electromagnet and at least one sensor in spaced apart and facing relation with respect to the magnetic member for magnetically floating the float member and to drive the same in the axial direction. During reciprocating movement of the support member within the partition member, the magnetic force generated by each of the electromagnets acts on each magnetic member through the cylindrical partition member to move the float member in synchronism with the reciprocative motion of the support member. The current required to excite the electromagnets is reduced, and the transferring device can be designed in small scale with high mechanical strength and rigidity.
    • 提供了用于在真空室之间传送物品的转移装置。 转印装置包括圆柱形浮子构件和连接到轴向并沿着轴向延伸的传送杆,用于支撑制品。 至少一个磁性构件设置在浮子构件的外围表面上。 具有薄且均匀的圆形横截面厚度的圆柱形分隔构件设置在电磁体和浮子构件之间。 支撑构件设置在分隔构件内用于在分隔构件的相对端之间往复运动。 支撑构件支撑至少一个电磁体和至少一个相对于磁性构件间隔开和面对的传感器,用于磁浮动浮子构件并沿轴向驱动浮动构件。 在支撑构件在分隔构件内的往复运动过程中,由每个电磁体产生的磁力通过圆柱形分隔构件作用在每个磁性构件上,以与支撑构件的往复运动同步地移动浮子构件。 激发电磁铁所需的电流减少,转印装置可以小型化设计,机械强度和刚度高。
    • 9. 发明授权
    • Vertical transfer system for a vacuum chamber and gate valve assembly
    • 用于真空室和闸阀组件的垂直传送系统
    • US5820104A
    • 1998-10-13
    • US591693
    • 1996-01-25
    • Shinji KoyanoRyuichi Matsuzaki
    • Shinji KoyanoRyuichi Matsuzaki
    • B65G49/07F16K51/02H01L21/00H01L21/687F16K31/08
    • H01L21/68792F16K51/02H01L21/67126
    • A vacuum-oriented vertical transfer system which provides super vacuum/super clean environments, and a gate valve assembly which reduces the size of electromagnet sections. The vacuum-oriented vertical transfer system includes a cylindrical partition wall, and a rod vertically moved through an open bottom of a vacuum container. The rod is floatingly supported in radial and axial directions thereof by a radial magnetic support device and an axial magnetic support device, respectively. The gate valve assembly comprises a closure member mounted for positioning adjacent to and away from a port of a container to close and open the port, respectively. A neck member is integrally connected to the closure member and is mounted for movement to position the closure member to open and close the port of the container. A radial magnet device levitates the neck member by magnetic forces in a radial direction thereof. An axial magnetic device levitates the neck member by magnetic forces in an axial direction thereof. A moving mechanism moves the neck member to position the closure member to open and close the port of the container.
    • 提供超级真空/超洁净环境的真空定向垂直传送系统,以及减小电磁铁部分尺寸的闸阀组件。 真空取向垂直传送系统包括圆柱形分隔壁和垂直移动通过​​真空容器开口底部的杆。 杆通过径向磁性支撑装置和轴向磁性支撑装置分别在其径向和轴向方向上浮动地支撑。 闸阀组件包括一个闭合件,它安装成用于邻近和远离容器的端口定位以分别关闭和打开该端口。 颈部构件一体地连接到闭合构件,并且安装成用于运动以定位闭合构件以打开和关闭容器的端口。 径向磁体装置通过在其径向方向上的磁力使颈部构件悬垂。 轴向磁性装置通过其轴向方向的磁力使颈部部件悬垂。 移动机构移动颈部构件以定位闭合构件以打开和关闭容器的端口。
    • 10. 发明授权
    • Conveyor
    • 输送带
    • US5485910A
    • 1996-01-23
    • US273634
    • 1994-07-12
    • Yoshimasa OdaShinji Koyano
    • Yoshimasa OdaShinji Koyano
    • B60L13/06B65G49/00B65G54/02H01L21/677H02K41/02B65G15/58
    • H01L21/67709B65G54/025
    • A conveyor is of a low power consumption type and has a decreased amount of gas generation. The conveyor is provided with a floating member having a conveying rod on which a workpiece is laid; a conveying body magnetically coupled with the floating member through a sleeve-like partition wall; sensor portions for detecting positions of the floating member; electromagnets for generating magnetic forces for supporting the floating member; targets provided on the floating member so as to face the electromagnets; and an adjusting unit for taking a balance of forces to be applied to the magnetic support portions composed of the electromagnets, the targets and the sensor portions. With thus constructed conveyor, even if the conveying article load (i.e., workpiece weight) is changed, a space between the floating member and the sensor portions may be adjusted within a controllable range with a small amount, of excited magnetic current by the adjusting unit. Accordingly, the heat generation amount is decreased so that a temperature of the sleeve-like member which is kept in contact with the vacuum is also decreased to reduce the discharged gas amount. Furthermore, the number of the electromagnets may be reduced without reducing the possible conveying weight.
    • 输送机具有低功耗型并具有减少的气体产生量。 输送机设置有具有输送杆的浮动部件,工件被放置在该输送杆上; 输送体,其通过套筒状隔壁与浮动部件磁耦合; 传感器部分,用于检测浮动部件的位置; 用于产生用于支撑浮动部件的磁力的电磁体; 设置在浮动部件上以与电磁体相对的目标; 以及用于平衡施加到由电磁体,靶和传感器部分组成的磁性支撑部分的力的调节单元。 通过这样构造的输送机,即使输送物品的载荷(即,工件重量)发生变化,浮动部件与传感器部之间的空间也可以通过调整部的少量的励磁电流被调整到可控范围内 。 因此,发热量减少,使得与真空保持接触的套筒状部件的温度也降低,以减少排出气体量。 此外,可以减少电磁体的数量而不减少可能的输送重量。