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1. 发明授权

US5190438A Vacuum pump 失效
标题翻译：真空泵
公开(公告)号：US5190438A
公开(公告)日：1993-03-02
申请号：US682265
申请日：1991-04-08
申请人： Minoru Taniyama , Masahiro Mase , Kazuaki Nakamori , Takashi Nagaoka
发明人： Minoru Taniyama , Masahiro Mase , Kazuaki Nakamori , Takashi Nagaoka
IPC分类号： F04C29/02 , F04C29/04 , F04D19/04 , F04D29/58
CPC分类号： F04D19/04 , F04C29/025 , F04C29/04 , F04D29/063 , F04D29/584
摘要： A vacuum pump of the present invention comprises a housing including a suction port and an exhaust port, a stator fixed in the housing, a rotor rotatably supported in the housing, and a cooling jacket provided adjacent to the stator. Gas suctioned from the suction port and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port. A cooling fluid having a thermal conductivity less than that of water, for example, of 0.08 to 0.25 Kcal/m.h..degree.C. flows through the cooling jacket. When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil may be supplied as the cooling fluid to the cooling jacket from the same supply line as lubrication oil supplied to oil lubricating bearings provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket, a tank, the supply line, and a return line, to thereby circulate the cooling fluid by a pump.

2. 发明授权

US4735550A Turbo molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US4735550A
公开(公告)日：1988-04-05
申请号：US890610
申请日：1986-07-30
申请人： Takeshi Okawada , Shinjiro Ueda , Susumu Yamazaki , Masahiro Mase , Nobukatsu Arai , Kazuaki Nakamori
发明人： Takeshi Okawada , Shinjiro Ueda , Susumu Yamazaki , Masahiro Mase , Nobukatsu Arai , Kazuaki Nakamori
IPC分类号： F04D25/00 , F04D19/04 , F04D23/00 , F04D5/00
CPC分类号： F04D23/008 , F04D17/168 , F04D19/04
摘要： According to the turbo molecular pump of the present invention, a regenerative pump is constructed by arcuate eddy current grooves having a predetermined angle with respect to the surface of the outer periphery of a rotor and which are circumferentially engraved in array in the rotor and an arcuate ventilating channel engraved in the circumferential direction in a stator, and a partition is defined in the stator circumferentially partitioning the ventilating channel, so that the working range on the low vacuum side may be extended.
摘要翻译：根据本发明的涡轮分子泵，再生泵由相对于转子的外周面的预定角度的弧形涡流槽构成，并且在转子中圆周地雕刻成圆弧状，在定子中沿圆周方向雕刻的通风通道，并且在定子中沿周向划分通气通道的隔板，从而可以延长低真空侧的工作范围。

3. 发明授权

US4732530A Turbomolecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US4732530A
公开(公告)日：1988-03-22
申请号：US758462
申请日：1985-07-24
申请人： Shinjiroo Ueda , Takeshi Okawada , Osami Matsushita , Kazuaki Nakamori
发明人： Shinjiroo Ueda , Takeshi Okawada , Osami Matsushita , Kazuaki Nakamori
IPC分类号： F04D19/04 , F04D23/00 , F01D1/36
CPC分类号： F04D19/04
摘要： A turbomolecular pump for evacuating a space by a plurality of turbine grooves located on a rotor and a stator located in face-to-face relationship to the rotor, with the turbine grooves, including rotor grooves on an outer peripheral surface of a rotor extending peripherally at a predetermined angle with respect to the axis of the rotor, and stator grooves on a surface of a stator facing the rotor which extend at the same angle as the rotor grooves but are oriented in an opposite direction to the rotor grooves. The rotor grooves and stator grooves overlap in part as viewed axially of the rotor. A pumping action is performed by surfaces of blades of an axial flow turbomolecular pump and a pumping action is performed by the rotor and the bottom surface of the groove of a helical groove turbomolecular pump, whereby a high compression ratio and a high gas discharge or evacuation speed can be achieved.
摘要翻译：一种涡轮分子泵，用于通过位于与转子面对面的转子和定子上的多个涡轮槽排空空间，涡轮槽包括在外围延伸的转子的外周面上的转子槽相对于转子的轴线为预定角度，并且定子面向转子的定子的表面以与转子槽相同的角度延伸，但是与转子槽相反的方向定向。转子槽和定子槽在转子的轴向观察时部分重叠。泵送动作由轴流式涡轮分子泵的叶片的表面进行，并且泵的作用由螺旋槽涡轮分子泵的转子和槽的底面进行，由此高的压缩比和高的气体排出或排出速度可以实现。

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