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    • 3. 发明专利
    • Dicing sheet with protective film forming layer and method for fabricating semiconductor chip
    • 具有保护膜形成层的表和用于制造半导体芯片的方法
    • JP2013120839A
    • 2013-06-17
    • JP2011267990
    • 2011-12-07
    • Lintec Corpリンテック株式会社
    • SHINODA TOMONORIKOYAKATA MASAHIROTAKANO TAKESHI
    • H01L21/301C09J7/02
    • PROBLEM TO BE SOLVED: To provide a dicing sheet with a protective film forming layer which has high uniformity in thickness, can easily produce a semiconductor chip having a protective film with good print accuracy, and has a heat resistance property.SOLUTION: A dicing sheet comprises a protective film forming layer 4 on an adhesive layer of an adhesive sheet 3 consisting of a base film 1 and the adhesive layer 2, the protective film forming layer is formed on an inner perimeter of the adhesive sheet, and the adhesive layer is exposed to an outer perimeter of the adhesive sheet. The melting point of the base film exceeds 130°C or the base film does not have the melting point, and the thermal shrinkage of the base film heated at 130°C and for 2 hours, is -1 to +1%.
    • 要解决的问题:为了提供具有高均匀度的保护膜形成层的切割片,可以容易地制造具有良好打印精度的保护膜的半导体芯片,并且具有耐热性。 解决方案:切割片在由基膜1和粘合剂层2组成的粘合片3的粘合剂层上包括保护膜形成层4,保护膜形成层形成在粘合剂的内周上 并且粘合剂层暴露于粘合片的外周。 基膜的熔点超过130℃,或者基膜不具有熔点,在130℃加热2小时的基膜的热收缩率为-1〜+ 1%。 版权所有(C)2013,JPO&INPIT
    • 8. 发明专利
    • Dicing sheet with protective film forming layer and chip manufacturing method
    • 具有保护膜形成层和芯片制造方法的标签
    • JP2013131593A
    • 2013-07-04
    • JP2011279304
    • 2011-12-21
    • Lintec Corpリンテック株式会社
    • SHINODA TOMONORIKOYAKATA MASAHIROTAKANO TAKESHI
    • H01L21/301B32B27/00C09D201/00C09J7/02C09J201/00H01L23/00
    • PROBLEM TO BE SOLVED: To provide a dicing sheet with a protective film forming layer, which enables simple manufacturing of a semiconductor chip having a highly uniform thickness and excellent printing precision; and in which the protective film forming layer is cured and adhesion of a pressure-sensitive adhesive sheet is reduced in a heating process thereby to achieve easy pickup of the semiconductor chip having the protective film and a simple manufacturing process of the semiconductor chip.SOLUTION: A dicing sheet with a protective film forming layer comprises: a pressure-sensitive adhesive sheet 3 which includes a base film 1 and an adhesive layer 2; a heat-curable protective film forming layer 4 which is to be a protective film by heating and which is formed on the adhesive layer of the pressure-sensitive adhesive sheet 3. An adhesive strength between the pressure-sensitive sheet 3 and the protective film is reduced by heating. And a heat generation occurrence temperature of the heat-curable protective film forming layer 4 is lower than an adhesive strength reduction temperature.
    • 要解决的问题:为了提供具有保护膜形成层的切割片,能够简单地制造具有高度均匀的厚度和优异的印刷精度的半导体芯片; 并且其中保护膜形成层被固化并且在加热过程中降低了压敏粘合片的粘合,从而实现了具有保护膜的半导体芯片的容易拾取以及半导体芯片的简单制造工艺。解决方案: 具有保护膜形成层的切割片包括:粘合片3,其包括基膜1和粘合剂层2; 通过加热成为保护膜的热固性保护膜形成层4,形成在粘合片3的粘合剂层上。压敏片3与保护膜之间的粘合强度为 通过加热减少 并且热固化保护膜形成层4的发热发生温度低于粘合强度降低温度。