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    • 3. 发明申请
    • Method of forming stress-relaxed SiGe buffer layer
    • 形成应力松弛SiGe缓冲层的方法
    • US20050196925A1
    • 2005-09-08
    • US11018647
    • 2004-12-22
    • Sang KimKyu ShimJin Kang
    • Sang KimKyu ShimJin Kang
    • H01L29/739
    • H01L29/7782H01L21/02381H01L21/0245H01L21/0251H01L21/02532H01L21/0262H01L29/1054H01L29/165H01L29/78
    • Provided is a method of forming a stress-relaxed SiGe buffer layer on a silicon substrate using a reduced pressure chemical vapor deposition (RPCVD) technique. The method includes: forming a graded composition layer having a predetermined germanium composition gradient on a silicon substrate; forming and thermally annealing a first constant composition layer having a predetermined germanium composition on the graded composition layer; removing the first constant composition layer by a predetermined thickness to planarize a surface; and forming a second constant composition layer on the first constant composition layer to form a SiGe buffer layer having the graded composition layer and the constant composition layer. A strained silicon or SiGe channel can be formed in a silicon-based MOSFET device or a MODFET device by forming the stress-relaxed SiGe buffer layer that has a relatively thin thickness, a low surface dislocation density, and a surface roughness similar to bulk silicon, and thus a device having excellent channel conductivity and high frequency characteristics can be manufactured.
    • 提供了使用减压化学气相沉积(RPCVD)技术在硅衬底上形成应力松弛SiGe缓冲层的方法。 该方法包括:在硅衬底上形成具有预定锗组分梯度的梯度组合物层; 在梯度组合物层上形成并热退火具有预定锗组合物的第一恒定组成层; 将第一恒定组成层除去预定厚度以使表面平坦化; 以及在第一恒定组成层上形成第二恒定组成层以形成具有渐变组成层和恒定组成层的SiGe缓冲层。 可以通过形成具有较薄厚度,低表面位错密度和与体硅相似的表面粗糙度的应力松弛SiGe缓冲层,在硅基MOSFET器件或MODFET器件中形成应变硅或SiGe沟道 ,因此可以制造具有优异的沟道导电性和高频特性的器件。
    • 4. 发明申请
    • Automatic gain control feedback amplifier
    • 自动增益控制反馈放大器
    • US20060028279A1
    • 2006-02-09
    • US10995033
    • 2004-11-23
    • Sang LeeHyeon KiJin KangKyu ShimKyoung Cho
    • Sang LeeHyeon KiJin KangKyu ShimKyoung Cho
    • H03F3/08
    • H03F3/08H03F1/34H03F3/3432H03F3/50H03G3/3084
    • There is provided a feedback amplifier capable of easily controlling its dynamic range without a separate gain control signal generation circuit. The feedback amplifier includes an input terminal detecting an input voltage from input current, a feedback amplification unit amplifying the input voltage to generate an output signal, and an output terminal outputting a signal amplified by the feedback amplification unit. The feedback amplification unit includes a feedback circuit unit including a feedback resistor located between the input terminal and the output terminal, and a feedback transistor connected in parallel to the feedback resistor; and a bias circuit unit supplying a predetermined bias voltage to the feedback transistor of the feedback circuit unit and merged in the feedback amplification unit.
    • 提供了一种反馈放大器,其能够在没有单独的增益控制信号产生电路的情况下容易地控制其动态范围。 反馈放大器包括检测来自输入电流的输入电压的输入端子,放大输入电压以产生输出信号的反馈放大单元以及输出由反馈放大单元放大的信号的输出端子。 反馈放大单元包括反馈电路单元,该反馈电路单元包括位于输入端子和输出端子之间的反馈电阻器和与反馈电阻器并联连接的反馈晶体管; 以及偏置电路单元,向反馈电路单元的反馈晶体管提供预定的偏置电压并且合并在反馈放大单元中。