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    • 3. 发明申请
    • Method of forming stress-relaxed SiGe buffer layer
    • 形成应力松弛SiGe缓冲层的方法
    • US20050196925A1
    • 2005-09-08
    • US11018647
    • 2004-12-22
    • Sang KimKyu ShimJin Kang
    • Sang KimKyu ShimJin Kang
    • H01L29/739
    • H01L29/7782H01L21/02381H01L21/0245H01L21/0251H01L21/02532H01L21/0262H01L29/1054H01L29/165H01L29/78
    • Provided is a method of forming a stress-relaxed SiGe buffer layer on a silicon substrate using a reduced pressure chemical vapor deposition (RPCVD) technique. The method includes: forming a graded composition layer having a predetermined germanium composition gradient on a silicon substrate; forming and thermally annealing a first constant composition layer having a predetermined germanium composition on the graded composition layer; removing the first constant composition layer by a predetermined thickness to planarize a surface; and forming a second constant composition layer on the first constant composition layer to form a SiGe buffer layer having the graded composition layer and the constant composition layer. A strained silicon or SiGe channel can be formed in a silicon-based MOSFET device or a MODFET device by forming the stress-relaxed SiGe buffer layer that has a relatively thin thickness, a low surface dislocation density, and a surface roughness similar to bulk silicon, and thus a device having excellent channel conductivity and high frequency characteristics can be manufactured.
    • 提供了使用减压化学气相沉积(RPCVD)技术在硅衬底上形成应力松弛SiGe缓冲层的方法。 该方法包括:在硅衬底上形成具有预定锗组分梯度的梯度组合物层; 在梯度组合物层上形成并热退火具有预定锗组合物的第一恒定组成层; 将第一恒定组成层除去预定厚度以使表面平坦化; 以及在第一恒定组成层上形成第二恒定组成层以形成具有渐变组成层和恒定组成层的SiGe缓冲层。 可以通过形成具有较薄厚度,低表面位错密度和与体硅相似的表面粗糙度的应力松弛SiGe缓冲层,在硅基MOSFET器件或MODFET器件中形成应变硅或SiGe沟道 ,因此可以制造具有优异的沟道导电性和高频特性的器件。
    • 4. 发明申请
    • Method of fabricating SiGe Bi-CMOS device
    • 制造SiGe Bi-CMOS器件的方法
    • US20060121667A1
    • 2006-06-08
    • US11283012
    • 2005-11-18
    • Hyun BaeSeung LeeSang KimJin Kang
    • Hyun BaeSeung LeeSang KimJin Kang
    • H01L21/8238
    • H01L21/8249
    • Provided is a method of fabricating a silicon germanium (SiGe) Bi-CMOS device. In the fabrication method, the source and drain of the CMOS device is formed using a silicon germanium (SiGe) heterojunction, instead of silicon, thereby preventing a leakage current resulting from a parasitic bipolar operation. Further, since the source and drain is connected with an external interconnection through the nickel (Ni) silicide layer, the contact resistance is reduced, thereby preventing loss of a necessary voltage for a device operation and accordingly, making it possible to enable a low voltage and low power operation and securing a broad operation region even in a low voltage operation of an analogue circuit.
    • 提供一种制造硅锗(SiGe)Bi-CMOS器件的方法。 在制造方法中,使用硅锗(SiGe)异质结代替硅形成CMOS器件的源极和漏极,从而防止由寄生双极性操作引起的漏电流。 此外,由于源极和漏极通过镍(Ni)硅化物层与外部互连件连接,所以接触电阻降低,从而防止器件操作所需的电压的损失,并因此使得能够实现低电压 并且即使在模拟电路的低电压操作下也能实现低功率操作并确保宽的操作区域。
    • 5. 发明申请
    • Apparatus for focusing particle beam using radiation pressure
    • 使用辐射压力聚焦粒子束的装置
    • US20060011872A1
    • 2006-01-19
    • US10976095
    • 2004-10-27
    • Sang KimHyung ParkSang Kim
    • Sang KimHyung ParkSang Kim
    • G01V8/00G01N21/86
    • H01J27/024
    • The present invention relates to an apparatus for focusing particle beams using a radiation pressure capable of obtaining the same flow amount and a narrower particle beam width with respect to the particle size and a higher numeral density. It is possible to form the particle beams by applying the radiation pressure to the particles with respect to the flow condition that cannot form the particle beams with respect to the set particle sizes. There is provided an apparatus for focusing particle beams using a radiation pressure, comprising an orifice part that is provided at a predetermined portion of the flow tube, and a lens having a hole with a predetermined diameter for thereby focusing the particle flow into a particle beam and applying a radiation pressure to the flow particles; and a light source supply part (A) provided at a portion opposite to the discharge outlet of the mixing tube.
    • 本发明涉及一种使用能够获得相对于粒径和较高数字密度获得相同流量和较窄粒子束宽度的辐射压力来聚焦粒子束的装置。 相对于不能相对于设定粒径形成粒子束的流动条件,向粒子施加辐射压力可以形成粒子束。 提供了一种用于使用辐射压力聚焦粒子束的装置,包括设置在流量管的预定部分处的孔部分和具有预定直径的孔的透镜,从而将颗粒流聚焦成粒子束 并向所述流动颗粒施加辐射压力; 以及设置在与混合管的排出口相对的部分处的光源供应部分(A)。
    • 9. 发明申请
    • INBRED C57BL/6 ES CELLS WITH HIGH DEVELOPMENTAL CAPACITY
    • 具有高发展能力的INBRED C57BL / 6 ES细胞
    • US20130074200A2
    • 2013-03-21
    • US13011799
    • 2011-01-21
    • Sang Kim
    • Sang Kim
    • A01K67/027C12N5/10C12N5/07
    • C12N5/0606
    • Described herein are inbred B6 ES cell lines that exhibit high developmental capacities and have a number of advantages over ES cell lines already available. First, they can be used for gene targeting and have a high percentage of germline transmission when injected into diploid host blastocysts (˜50-80%). Second, these ES cell lines can successfully be used to generate live pups by tetraploid blastocyst complementation, producing a high percentage (15-20%) of mice that are entirely inbred B6 ES cell derived. Third, these ES cells lines can be used to rapidly generate mice that are homozygous for a gene of interest. These advantages indicate that the inbred B6 ES cells provided here facilitate the rapid generation of inbred B6 mouse models in a cost-effective and efficient manner.
    • 本文描述的是具有高发育能力并且已经具有优于已经可获得的ES细胞系的许多优点的近交B6ES细胞系。 首先,它们可以用于基因靶向,并且当注射到二倍体宿主胚泡(〜50-80%)时具有高百分比的种系传播。 第二,这些ES细胞系可以成功地用于通过四倍体囊胚互补产生活的幼崽,产生高百分比(15-20%)完全近交B6ES细胞来源的小鼠。 第三,这些ES细胞系可用于快速产生对于感兴趣的基因是纯合的小鼠。 这些优点表明,这里提供的近交B6 ES细胞有助于以成本效益高效的方式快速生成近交B6小鼠模型。