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1. 发明公开

KR20200140341A 유체 제어 기기, 유체 제어 기기의 이상 검지 방법, 이상 검지 장치, 및 이상 검지 시스템 审中-公开
公开(公告)号：KR20200140341A
公开(公告)日：2020-12-15
申请号：KR20207031893
申请日：2019-07-16
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , SHINOHARA TSUTOMU , SUZUKI YUYA , KISO HIDENORI
IPC分类号： F16K37/00 , F16K31/126 , G01M3/26
摘要： [과제] 유체제어기기에있어서, 유체의누출이적은경우에도누출을검지가능하게한다. 또한, 유체의누출이상을유체제어기기의동작에따른변화와식별하여, 높은정밀도로유체의누출을검지한다. [해결수단] 유로와, 다이어프램(22)에의해유로와격리된폐공간(S2)이마련되고, 이상을검지가능한유체제어기기(V1)로서, 폐공간(S1) 내의압력을검출하는압력센서(P)와, 소정의정보처리를실행하는처리모듈과, 유체제어기기(V1)의동작을검지하는동작검지기구를가지며, 처리모듈은, 압력센서(P)에의해검출한검출값과소정의문턱값을비교함으로써, 유체제어기기(V1)의이상을판별하는판별처리와, 유체제어기기(V1)의동작에따라, 소정의문턱값을보정하는보정처리를실행한다.

2. 发明公开

KR20200125699A 유체 제어 기기 审中-公开
公开(公告)号：KR20200125699A
公开(公告)日：2020-11-04
申请号：KR20207028328
申请日：2019-06-04
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , SHINOHARA TSUTOMU , SUZUKI YUYA , KISO HIDENORI
IPC分类号： F16K37/00 , F16K7/12
摘要： 기기의내부동작에관한데이터를취득가능한유체제어기기를제공한다. 유체제어기기(V)는, 유체제어기기(V) 내의동작을검출하기위한센서(M1, M2, P)가장착된보닛부(2)와, 보닛부(2)를내부에수용하는밸브바디(1)를가지며, 밸브바디(1)에는, 보닛부(2)를수용하기위한오목부(12a)와, 센서(M1, M2, P)에접속된통신용케이블(51)을외측으로도출시킴과아울러, 유로가형성되어있는받침부(11)와는반대측의일단이개구되어, 외측으로부터오목부(12a) 측으로관통한슬릿(12b)이마련되어있다.

3. 发明公开

KR20200140342A 유체 제어 기기 审中-公开
公开(公告)号：KR20200140342A
公开(公告)日：2020-12-15
申请号：KR20207031900
申请日：2019-07-16
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , SHINOHARA TSUTOMU , SUZUKI YUYA , KISO HIDENORI , WATANABE YOSHIAKI
IPC分类号： F16K37/00 , F16K7/12 , G01M3/26
摘要： [과제] 유체제어기기에있어서, 유체의누출이적은경우에도정밀도높게누출을검지가능한것을제공한다. [해결수단] 유체제어기기(V1)는, 유로가형성된밸브보디(1)와, 폐공간(S2)을유로로부터격리하는다이어프램(22)과, 다이어프램(22)과의사이에폐공간(S2)을형성함과아울러, 폐공간(S2)에연통하여, 다이어프램프레서(23)가상하이동가능하게관통삽입되는관통삽입구멍(241a)이마련된보닛(24)과, 관통삽입구멍(241a) 내를상하이동하여다이어프램(22)을압압함과아울러, 관통삽입구멍(241a)으로부터빠져나감불가능하게하는직경확대부(232)가마련된다이어프램프레서(23)와, 폐공간(S2) 내의압력을검출하는압력센서(P)와, 폐공간(S2) 내에서, 다이어프램프레서(23)의직경확대부(232)와보닛(24)의사이에개재되고, 다이어프램프레서(23)의상하이동에따라다이어프램프레서(23)의직경확대부(232)와보닛(24)의사이에서탄성적으로팽창/압축되는탄성체(6)를가진다.

4. 发明公开

KR20200139787A 유체 제어 장치, 유체 제어 기기, 및 동작 해석 시스템 审中-公开
公开(公告)号：KR20200139787A
公开(公告)日：2020-12-14
申请号：KR20207031897
申请日：2019-07-16
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , SHINOHARA TSUTOMU , SUZUKI YUYA , KISO HIDENORI
IPC分类号： G05B23/02 , G05D7/06
摘要： [과제] 복수의유체제어기기에의해구성되는유체공급라인또는유체제어장치전체를정밀하게감시한다. [해결수단] 유체제어기기(A)를복수집적시킨유체제어장치(G)로서, 유체제어기기(A)는, 기기내의동작정보를취득하는동작정보취득기구와, 자기식별정보를기억하는식별정보기억부(71)와, 식별정보기억부(71)에기억되어있는자기식별정보와함께, 동작정보취득기구에의해취득한동작정보를유체제어기기(A)마다다른타이밍에외부단말에송신하는통신처리부(72)를가지고있다.

5. 发明专利

SG11202001451XA VALVE AND FLUID SUPPLY LINE 未知
公开(公告)号：SG11202001451XA
公开(公告)日：2020-03-30
申请号：SG11202001451X
申请日：2018-08-28
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , AIKAWA KENJI , HARADA AKIHIRO , SUZUKI YUYA , MATSUDA TAKAHIRO , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , SHINOHARA TSUTOMU
IPC分类号： F16K31/12 , F16K27/00
摘要： The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve.A valve V includes a valve body 3 and a driving pressure control device 4 coupled to the valve body 3. The driving pressure control device 4 includes: a driving pressure introduction path 431 connected to a driving pressure supply source G outside a line; an automatic valve 411 that opens and closes the driving pressure introduction path 431; a driving pressure introduction path 433 that couples to a driving pressure introduction port 3a of the valve body 3; an automatic valve 412 that opens and closes the driving pressure introduction path 433 in conjunction with the automatic valve 411 and opens and closes an exhaust passage 44 that discharges a driving pressure from the driving pressure introduction path 433; and a driving pressure introduction path 432 that couples the driving pressure introduction path 431 and the driving pressure introduction path 433 via the automatic valve 411 and the automatic valve 412.

6. 发明专利

SG11201908394WA System, Method, And Computer Program For Analyzing Operation Of Fluid Control Device 未知
公开(公告)号：SG11201908394WA
公开(公告)日：2019-10-30
申请号：SG11201908394W
申请日：2018-03-13
申请人： FUJIKIN KK
发明人： SUZUKI YUYA , KOMEHANA KATSUNORI , OCHIISHI MASAHIKO , HARADA AKIHIRO , TANNO RYUTARO , SHINOHARA TSUTOMU
IPC分类号： F16K37/00 , G01M3/00
摘要： SYSTEM, METHOD, AND COMPUTER PROGRAM FOR ANALYZING OPERATION OF FLUID CONTROL DEVICE A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control device 8 and a server 72 are configured to be able to communicate with each other through networks NW1 and 2. The fluid control device 8 includes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device 8. The server 72 includes a determination processing unit 721 that determines whether the fluid control device 8 has an abnormality, an information collection unit 724 that collects the operation information and an abnormality determination result for the fluid control device 1, an information storage unit 725 that stores the operation information and the determination result collected, an information extraction unit 726 that refers to the information storage unit 725, and extracts, analysis target including same predetermined operation information and another of the operation information as well as information related to the determination result, 72 selectively for each of a plurality of the fluid control devices 1, and a correlation analysis unit 727 that analyzes correlation between a predetermined operation of the fluid control device 8 and occurrence of abnormality through comparison using the information extracted. Fig. 14

7. 发明专利

IL279612D0 Fluid control device 未知
公开(公告)号：IL279612D0
公开(公告)日：2021-03-01
申请号：IL27961220
申请日：2020-12-20
申请人： FUJIKIN KK , SUZUKI YUYA , TANNO RYUTARO , SHINOHARA TSUTOMU , KISO HIDENORI
发明人： SUZUKI YUYA , TANNO RYUTARO , SHINOHARA TSUTOMU , KISO HIDENORI
IPC分类号： F16K7/12 , F16K27/02 , F16K37/00
摘要： A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

8. 发明专利

IL280735D0 Fluid control device 未知
公开(公告)号：IL280735D0
公开(公告)日：2021-03-25
申请号：IL28073521
申请日：2021-02-08
申请人： FUJIKIN KK , SUZUKI YUYA , TANNO RYUTARO , SHINOHARA TSUTOMU , KISO HIDENORI , WATANABE YOSHIAKI
发明人： SUZUKI YUYA , TANNO RYUTARO , SHINOHARA TSUTOMU , KISO HIDENORI , WATANABE YOSHIAKI
IPC分类号： F16K7/12 , F16K37/00 , G01M3/26
摘要： A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

9. 发明专利

IL280504D0 Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system 未知
公开(公告)号：IL280504D0
公开(公告)日：2021-03-25
申请号：IL28050421
申请日：2021-01-28
申请人： FUJIKIN KK , SUZUKI YUYA , TANNO RYUTARO , SHINOHARA TSUTOMU , KISO HIDENORI
发明人： SUZUKI YUYA , TANNO RYUTARO , SHINOHARA TSUTOMU , KISO HIDENORI
IPC分类号： F16K31/126 , F16K37/00 , G01M3/26
摘要： A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

10. 发明专利

SG11201907322SA VALVE AND SEMICONDUCTOR PRODUCTION DEVICE 未知
公开(公告)号：SG11201907322SA
公开(公告)日：2019-09-27
申请号：SG11201907322S
申请日：2017-11-02
申请人： FUJIKIN KK
发明人： TANNO RYUTARO , YANAGIDA YASUMASA , SHINOHARA TSUTOMU
IPC分类号： F16K31/44 , F16K1/32 , H01L21/3065
摘要： VALVE DEVICE AND SEMICONDUCTOR PRODUCTION DEVICE Provided are a valve device and a semiconductor production device that can be used long-term without seizing even during high-temperature use, and which do not have contaminants in the chambers thereof. The valve device includes: a boosting mechanism 30 that amplifies drive force; a first stem 25 and a second stem 26 that receive force amplified by the boosting mechanism 30 and move; and a diaphragm 11 capable of opening and closing fluid passages 2b, 2c. The boosting mechanism 30 includes: a retainer 31 and bearings 32; shafts 33 having both ends thereof supported by the bearings 32; and arms 34 pivotably supported by the shafts 33 and having an outer end portion 34C that receives drive force and an inner end portion 34B that amplifies and transmits drive force to the first stem 25. In the retainer 31, the bearings 32, the shafts 33, and the arms 34, the bearings 32 and both ends of the shaft 33 constitute a swinging portion in conjunction with the swinging by the arms 34, and thereamong, the bearings 32 include a carbon fiber composite material. [FIG. 2] 22

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