发明申请
WO2022043110A1 OPTISCHES ELEMENT, OPTISCHE ANORDNUNG UND VERFAHREN ZUM HERSTELLEN EINES OPTISCHEN ELEMENTS
审中-公开
基本信息:
- 专利标题： OPTISCHES ELEMENT, OPTISCHE ANORDNUNG UND VERFAHREN ZUM HERSTELLEN EINES OPTISCHEN ELEMENTS
- 专利标题（英）：OPTICAL ELEMENT, OPTICAL ARRANGEMENT, AND PROCESS FOR MANUFACTURING AN OPTICAL ELEMENT
- 申请号：PCT/EP2021/072709 申请日：2021-08-16
- 公开(公告)号：WO2022043110A1 公开(公告)日：2022-03-03
- 发明人： NEFZI, Marwene , HEMBACHER, Stefan , KUGLER, Jens , SCHREZENMEIER, Irina
- 申请人： CARL ZEISS SMT GMBH
- 申请人地址： Rudolf-Eber-Strasse 2
- 专利权人： CARL ZEISS SMT GMBH
- 当前专利权人： CARL ZEISS SMT GMBH
- 当前专利权人地址： Rudolf-Eber-Strasse 2
- 代理机构： KOHLER SCHMID MÖBUS PATENTANWÄLTE PARTNERSCHAFTSGESELLSCHAFT MBB
- 优先权： DE10 2020 210 769.6 2020-08-26
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G02B7/185
The invention relates to an optical element (21) comprising: a substrate (30); and an optical surface (32) on the substrate (30). At least one, preferably a plurality of fluid-tightly sealed chambers (33) containing a rheological fluid (34) to deform the optical surface is embedded in the substrate (30). The invention also relates to an optical arrangement, in particular an EUV lithography system, comprising: at least one optical element (21) as described above; and a field generation device (17b) for generating an electromagnetic field, in particular a magnetic field (38), which can preferably be modified over time and penetrates the at least one chamber (33) containing the rheological fluid (34). Also disclosed is a process for manufacturing an optical element (31) designed as described above.