基本信息:
- 专利标题: 역압대응이 가능한 티 모션 진자식 게이트밸브
- 专利标题(英):T-motion pendulum-type gate valve with counter-pressure response
- 申请号:KR1020200009562 申请日:2020-01-24
- 公开(公告)号:KR1020210095780A 公开(公告)日:2021-08-03
- 主分类号: F16K51/02
- IPC分类号: F16K51/02 ; F16K3/314 ; F16K3/06 ; F16K27/04 ; H01L21/02
The present invention relates to a pendulum-type gate valve installed to control a flow of fluid between a process chamber and a vacuum pump in a vacuum equipment configuration of a display manufacturing process or a semiconductor manufacturing process. The gate valve has a simple structure since a rotating body is utilized as a housing of a cylinder and upper and lower seal plates are used as a driving shaft. The upper and lower seal plates operate in T-motion based on the rotating body, to increase stability of operation, and make a count-pressure response possible and minimize a friction driving part. As there is one air cylinder space in the rotating body, only one air supply passage is provided. The order of the T-motion operation is determined by using a spring and read by a beam sensor to prevent malfunction of the valve and alleviate the impact of the valve operation. During equipment repair, the friction driving part can be repaired while the rotating body is pulled out of the valve but not separated from the process chamber and the vacuum pump. The gate valve also has a structure in which only rotational motion is made without linear motion of the rotating body and a rotating shaft is supported with upper and lower bearings, which can minimize the sag of the seal plates.
公开/授权文献:
- KR102339882B1 역압대응이 가능한 티 모션 진자식 게이트밸브 公开/授权日:2021-12-14
信息查询:
EspacenetIPC结构图谱:
F | 机械工程;照明;加热;武器;爆破 |
--F16 | 工程元件或部件;为产生和保持机器或设备的有效运行的一般措施;一般绝热 |
----F16K | 阀;龙头;旋塞;致动浮子;通风或充气装置 |
------F16K51/00 | 非专门用于特殊型式的阀或切断装置的其他部件 |
--------F16K51/02 | .专门适用于高真空设备 |