基本信息:
- 专利标题: CVD 장치의 샤워 헤드
- 专利标题(英):Shower head of chemical vapor deposition apparatus
- 专利标题(中):化学蒸气沉积装置的淋浴头
- 申请号:KR1020050125517 申请日:2005-12-19
- 公开(公告)号:KR1020070064912A 公开(公告)日:2007-06-22
- 发明人: 홍형식 , 원제형 , 허노현 , 금경수 , 박영권 , 김기곤 , 강주호 , 강경호 , 최진호
- 申请人: 삼성전자주식회사
- 申请人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 专利权人: 삼성전자주식회사
- 当前专利权人: 삼성전자주식회사
- 当前专利权人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 代理人: 박상수
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A shower head in which a plurality of process gases are mixed with each other to prevent an undesired reaction by-product from being generated is provided. A shower head(100) of a chemical vapor deposition apparatus comprises: an upper plate(103a) connected to first and second process gas supply pipes(121,122); an intermediate plate(103b) which is connected to the bottom of the upper plate through brazing by means of a filler metal(150), wherein the intermediate plate has a first process gas diffusing part(131) formed by connecting the intermediate plate to the upper plate to diffuse a first process gas supplied through the first process gas supply pipe, a plurality of first process gas channels(132) communicating with the first process gas diffusing part, a port(130) which is in communication with the second process gas supply pipe, and in which a second process gas channel(142) is formed, and second process gas diffusing parts(141) formed for diffusing a second process gas delivered through the second process gas channel; and a lower plate(103c) which is connected to the bottom of the intermediate plate through brazing by means of the filler metal, wherein the lower plate has a plurality of first process gas ejection holes(133) communicating with the first process gas channels, and a plurality of second process gas ejection holes(143) communicating with the second process gas diffusing parts.
摘要(中):
提供了一种淋浴头,其中多个处理气体彼此混合以防止产生不期望的反应副产物。 化学气相沉积设备的喷头(100)包括:连接到第一和第二工艺气体供应管(121,122)的上板(103a); 中间板(103b),其通过钎料(150)与所述上板的底部连接,其中所述中间板具有通过将所述中间板连接到所述中间板而形成的第一工艺气体扩散部(131) 上板,用于扩散通过第一工艺气体供应管供应的第一工艺气体;与第一工艺气体扩散部分连通的多个第一工艺气体通道(132),与第二工艺气体连通的端口(130) 供给管,其中形成有第二处理气体通道(142);以及第二处理气体扩散部(141),其形成为扩散通过第二处理气体通道输送的第二处理气体; 和通过所述填充金属钎焊连接到所述中间板的底部的下板(103c),其中所述下板具有与所述第一工艺气体通道连通的多个第一工艺气体喷射孔(133) 以及与第二处理气体扩散部连通的多个第二处理气体喷出孔(143)。