基本信息:
- 专利标题: 반도체 디바이스 테스트장치
- 专利标题(英):Semiconductor device test apparatus
- 专利标题(中):半导体器件测试仪器
- 申请号:KR1020030048083 申请日:2003-07-14
- 公开(公告)号:KR100541546B1 公开(公告)日:2006-01-10
- 发明人: 이수찬 , 선용균 , 김현호 , 이병천 , 이준호 , 이종철 , 류제형 , 김태규 , 임순규
- 申请人: 삼성전자주식회사
- 申请人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 专利权人: 삼성전자주식회사
- 当前专利权人: 삼성전자주식회사
- 当前专利权人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 代理人: 박상수
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
It provides a robot speed control method of a semiconductor device testing apparatus and a semiconductor device testing apparatus. This semiconductor device testing apparatus is configured to have four receiving devices so that the insert is loaded into the test tray, and improve the structure and configuration of the pusher lid assembly of the test head corresponding thereto thereby increasing the amount per unit time of the device for testing. In addition, as the configuration that occurs when testing dibayiseuyi to cool by the self-heating in the conductivity type and the improved temperature control. On the other hand, it solves the various robots to transport the device to which the excessive fatigue to the robot so as to automatically adjust the speed depending on the time of the testing device is applied. In addition, a stacker, a user may tray supply unit and a user tray, without the separation of the shipping position of the parts in accordance with the test progress supplying effectively seat tray than the limited stacker space to be used by changing their use and shipment . In addition, by configuring the chamber to be separated from the main body portion it has an advantage of performing more easily check the inside of the main body.
公开/授权文献:
- KR1020050008227A 반도체 디바이스 테스트장치 公开/授权日:2005-01-21
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/66 | .在制造或处理过程中的测试或测量 |