基本信息:
- 专利标题： PRODUCTION OF DIETHYLAMINOTRIMETHYLSILANE
- 申请号：JP30290890 申请日：1990-11-07
- 公开(公告)号：JPH04173794A 公开(公告)日：1992-06-22
- 发明人： SHINOHARA NORIO , KUDO MUNEO , MATSUMURA KAZUYUKI , SUZUKI NOBUYUKI
- 申请人： SHINETSU CHEMICAL CO
- 专利权人： SHINETSU CHEMICAL CO
- 当前专利权人： SHINETSU CHEMICAL CO
- 优先权： JP30290890 1990-11-07
- 主分类号： C07F7/10
- IPC分类号： C07F7/10
摘要：
PURPOSE:To obtain the subject compound useful as an electronic material such as primer for photoresist and obtain by-products in an efficiently utilizable state by reacting diethylamine with N,O-bis(trimethylsilyl)acetamide. CONSTITUTION:The objective compound is produced by reacting diethylamine with an N,O-bis(trimethylsilyl)acetamide of formula (X is H or F) preferably at an equivalent ratio of 1:(1.1-1.4) at 20-60 deg.C, optionally in the presence of a solvent such as benzene or THF. N-trimethylsilylacetamide or N- trimethylsilyltrifluoroacetamide produced as by-product can easily be converted to and reused as N,O-bis(trimethylsilyl)acetamide or N,O-bis(trimethylsilyl) trifluoroacetamide.
公开/授权文献:
- JP2516472B2 公开/授权日：1996-07-24