
基本信息:
- 专利标题: ELECTRIC DISCHARGE EXCITATION EXCIMER LASER
- 专利标题(中):DURCH ELEKTRISCHE ENTLADUNG ANGEREGTER EXCIMERLASER
- 申请号:EP99973186.2 申请日:1999-11-26
- 公开(公告)号:EP1137126A1 公开(公告)日:2001-09-26
- 发明人: Shinozaki, Hiroyuki , Sekiguchi, Shinichi , Barada, Toshimitsu , Nakazawa, Toshiharu
- 申请人: EBARA CORPORATION , KOMATSU LTD.
- 申请人地址: 11-1, Haneda Asahi-cho Ohta-ku, Tokyo 144-8510 JP
- 专利权人: EBARA CORPORATION,KOMATSU LTD.
- 当前专利权人: EBARA CORPORATION,KOMATSU LTD.
- 当前专利权人地址: 11-1, Haneda Asahi-cho Ohta-ku, Tokyo 144-8510 JP
- 代理机构: Wagner, Karl H., Dipl.-Ing.
- 优先权: JP34057798 19981130
- 国际公布: WO0033431 20000608
- 主分类号: H01S3/036
- IPC分类号: H01S3/036 ; F16C32/04
摘要:
A long-life electric discharge excitation excimer laser improved in that the laser gas in the laser enclosure hardly degrades, no dust enters the inside of the magnetic bearing and the inside of the motor, and damage to the portions in contact with the laser gas is little. The electric discharge excitation excimer laser is characterized by comprising a housing connected to both ends of a laser enclosure where the laser gas is sealed and a pair of main discharge electrodes are housed, a cross flow fan rotatably supported at both ends by a magnetic bearing housed in the housing and adapted to produce a laser gas flow, a motor housed in the housing and adapted to rotate the cross flow fan, a laser gas passage extending through the gap between the rotor side and the-stator side of the magnetic bearing and the gap between the rotor side and the stator side of the motor along the full length of the housing and communicating with the laser enclosure, a laser gas introduction passage extending from the inside of the laser enclosure and communicating with the laser gas passage at one end of the housing, and a filter disposed in the laser gas introduction passage.
摘要(中):
长寿命放电励磁准分子激光器的改进在于激光外壳中的激光气体几乎不降解,不会有灰尘进入到磁轴承和电机内部,并且与激光气体接触的部分损坏是 小。 放电激发准分子激光器的特征在于,包括连接到激光器外壳的两端的壳体,其中激光气体被密封并且容纳一对主放电电极,横流风扇由两个端部旋转地支撑, 在壳体中并且适于产生激光气流,马达容纳在壳体中并且适于旋转横流风扇,激光气体通道延伸穿过磁轴承的转子侧和定子侧之间的间隙和 沿着壳体的整个长度的电机的转子侧和定子侧之间的间隙,与激光外壳连通,激光气体引入通道从激光外壳的内部延伸并与激光气体通道的一端连通 壳体和布置在激光气体导入通道中的过滤器。
公开/授权文献:
- EP1137126B1 ELECTRIC DISCHARGE EXCITATION EXCIMER LASER 公开/授权日:2010-01-13
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01S | 利用受激发射的器件 |
------H01S3/00 | 激光器,即利用受激发射对红外光、可见光或紫外线进行产生、放大、调制、解调或变频的器件 |
--------H01S3/02 | .结构零部件 |
----------H01S3/03 | ..气体激光器放电管的 |
------------H01S3/036 | ...气体激光放射管内取得或保持所需气体压力的方法,例如利用吸气剂、充气;气体循环装置,例如为了平衡管内的压力。 |