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1. 发明申请

WO2023079548A1 LASER-BASED CONTRAST CONTROL IN TRANSMISSION ELECTRON MICROSCOPY 审中-公开
公开(公告)号：WO2023079548A1
公开(公告)日：2023-05-11
申请号：PCT/IL2022/051157
申请日：2022-11-01
申请人： YEDA RESEARCH AND DEVELOPMENT CO. LTD.
发明人： SCHWARTZ, Osip , KALI, Michael
IPC分类号： H01J37/26 , H01J37/22
摘要： A system and methods for electron beam imaging or electron beam spectroscopy. The system comprising: a transmission electron microscope (TEM) having a back focal plane; one or more laser-based devices, configured to shift a predetermined portion of an electron wave to an energy that is different from the energy originally provided by the electron source of the TEM; and an electron energy filter that is configured to accept electron waves, at the energy provided by the electron source of the TEM, and further configured to reject electron waves shifted to a different energy by the laser device.

2. 发明申请

WO2023061650A1 METHOD OF DETERMINING THE BEAM CONVERGENCE OF A FOCUSED CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM SYSTEM 审中-公开
公开(公告)号：WO2023061650A1
公开(公告)日：2023-04-20
申请号：PCT/EP2022/073948
申请日：2022-08-29
申请人： ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
发明人： EHBERGER, Dominik , BREUER, John , FIRNKES, Matthias
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28
摘要： A method of determining a beam convergence of a charged particle beam (11) focused by a focusing lens (120) toward a sample H O) in a charged particle beam system ( 100) is provided. The 'method includes (a) taking one or more images of the sample when the sample is arranged at one or 'more defocus distances from a 'respecti ve beam focus of the charged particle beam.; (b) retrieving one or more beam, cross sections from 'the one or more images; (c) determining one or more beam widths from the one or more beam, cross sections; and (d.) calculating at least one beam convergence value based on the one or more beam widths and the one or more defocus distances. Further, a charged panicle beam system for imaging and or inspecting a sample that is configured for any of the methods described herein is provided.

3. 发明申请

WO2023017107A1 CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS 审中-公开
公开(公告)号：WO2023017107A1
公开(公告)日：2023-02-16
申请号：PCT/EP2022/072504
申请日：2022-08-11
申请人： ELDICO SCIENTIFIC AG
发明人： STEINFELD, Gunther , NIEBEL, Harald , VAN DEN BERG, Christiaan , VAN VEEN, Alexander , TUOHIMAA, Tomi
IPC分类号： H01J37/295 , H01J37/26
摘要： A charged-particle beam device (1 ) for charged-particle crystallography of a crystalline sample comprises a charged-particle source (4) for generating a charged-particle beam (2) to be radiated onto a sample and a charged-particle- optical system downstream the charged-particle source (4), which is configured to form in a diffraction mode a substantially parallel charged-particle beam (2) at a predefined sample position (9) and in an imaging mode a focused charged- particle beam (2) having a focus at the predefined sample position (9). The charged-particle-optical system comprises a charged-particle zoom lens system (5) consisting of a first magnetic lens (6), a second magnetic lens (7) downstream the first magnetic lens (6) and a third magnetic lens (8) downstream the second magnetic lens (7), wherein at least the second magnetic lens (7), preferably each one of the first (6), the second (7) and the third (8) magnetic lens has a variable focal length. The charged-particle-optical system further comprises a single beam limiting aperture (12) with a fixed aperture diameter arranged at a fixed position between the second magnetic lens (7) and the third magnetic lens (8) for limiting the diameter of the charged-particle beam (2) at the sample position (9). The charged-particle-optical system is configured such that the diameter of the charged-particle beam (2) at the sample position (9) is in a range between 100 nanometer and 1000 nanometer, in particular between 220 nanometer and 250 nanometer, in the diffraction mode, and in a range between 10 nanometer and 200 nanometer in the imaging mode.

4. 发明申请

WO2023274562A1 DEVICE FOR INTERFACING A SAMPLE TRANSFER DEVICE TO AN ANALYTIC OR SAMPLE PREPARATION DEVICE AND A CONTAINER FOR TRANSPORTING A SAMPLE UNDER ENVIRONMENTALLY CONTROLLED CONDITIONS 审中-公开
公开(公告)号：WO2023274562A1
公开(公告)日：2023-01-05
申请号：PCT/EP2021/068404
申请日：2021-07-02
申请人： FERROVAC AG
发明人： WEISS, Claudio , MAIER, Urs
IPC分类号： H01J37/18 , H01J37/26 , H01J37/30 , H01J2237/184 , H01J2237/2001 , H01J2237/204 , H01J37/185
摘要： The present invention relates to a device (100,300) for interfacing a sample transfer device (200) to an analytic or sample preparation device comprising a loading chamber (101), wherein the loading chamber comprises a first port (105) for attaching the device to the analytic device or the sample preparation device and a second port (106) for attaching a sample transfer device, wherein the device (100,300) comprises an insertion opening (104) for inserting a sample kept under atmospheric condition into the loading chamber (101) and a closure element (102) removable from the insertion opening, wherein the insertion opening exhibits a quick-locking mechanism (103) with which the insertion opening can be sealed with the closure element, wherein the device comprises a gate valve (108) attached to the first port (105), wherein the gate valve comprises a pumping port (108a) for evacuating the loading chamber (101) and a venting port (108b) for venting the loading chamber (101). The present invention relates also to a container (400, 500, 600, 700) for transporting a sample under vacuum or inert gas atmosphere.

5. 发明申请

WO2022202586A1 ３次元像観察装置、及び方法审中-公开
公开(公告)号：WO2022202586A1
公开(公告)日：2022-09-29
申请号：PCT/JP2022/012153
申请日：2022-03-17
申请人：国立研究開発法人理化学研究所 , 公立大学法人大阪
发明人：原田　研 , 森　茂生 , 中島　宏
IPC分类号： H01J37/22 , H01J37/26 , G01N23/2055
摘要：試料など観察対象に対して互いにほぼ直交する３方向からの投影像、あるいは、回折パターンにおいて、高精度かつ簡便に互いの位置関係を決定し、該試料等観察対象の３次元構造を決定する３次元像観察装置及びその方法を提供する。試料など観察対象に対して、互いにほぼ直交する３方位から観察された該試料の３枚の回折パターンに対して、それぞれの最大強度の点を一致させた３次元回折パターンを構築し、該最大強度の点を原点とした３次元フーリエ変換位相回復反復演算法により、該試料など観察対象の３次元位相分布及び３次元振幅分布を構築する。

6. 发明申请

WO2022191152A1 電子顕微鏡、電子－光子相関測定装置、及び電子－光子相関測定方法审中-公开
公开(公告)号：WO2022191152A1
公开(公告)日：2022-09-15
申请号：PCT/JP2022/009826
申请日：2022-03-07
申请人：国立研究開発法人科学技術振興機構
发明人：三宮　工 , 柳本　宗達 , 秋葉　圭一郎 , 斉藤　光
IPC分类号： H01J37/26 , H01J37/244
摘要：本発明に係る実施形態の電子顕微鏡は、試料に電子を照射する電子銃と、試料に照射された電子を検出する電子検出器と、電子が試料に照射されたときに試料から放出される光子を検出する光子検出器と、電子検出器が電子を検出した時間と、光子検出器が光子を検出した時間とに基づいて、検出された光子ごとに、電子が試料に照射された時間と光子が試料から放出された時間との時間差を演算し、時間差の分布を示す電子－光子時間相関を演算する演算器と、を備える。

7. 发明申请

WO2022165400A1 A METHOD FOR FOCUSING AN ELECTRON BEAM ON A WAFER HAVING A TRANSPARENT SUBSTRATE 审中-公开
公开(公告)号：WO2022165400A1
公开(公告)日：2022-08-04
申请号：PCT/US2022/014669
申请日：2022-02-01
申请人： APPLIED MATERIALS ISREAL LTD. , APPLIED MATERIALS, INC.
发明人： BADER, Arie , NUNA, Tamir
IPC分类号： G01N23/2251 , H01J37/21 , H01J37/26 , H01L21/66
摘要： A method, a non-transitory computer readable medium and a system for focusing an electron beam. The method may include focusing the electron beam on at least one evaluated area of a wafer, based on a height parameter of each one of the at least one evaluated area. The wafer includes a transparent substrate. The height parameter of each one of the at least one evaluated area is determined based on detection signals generated as a result of an illumination of one or more height-measured areas of the wafer with a beam of photons. The illumination occurs while one or more supported areas of the wafer contact one or more supporting elements of a chuck, and while each one of the one or more height-measured areas are spaced apart from the chuck by a distance that exceeds a depth of field of the optics related to the beam of photons.

8. 发明申请

WO2022155306A1 FREEZING AND JACKETING GAS-PHASE BIOMOLECULES WITH AMORPHOUS ICE FOR ELECTRON MICROSCOPY 审中-公开
公开(公告)号：WO2022155306A1
公开(公告)日：2022-07-21
申请号：PCT/US2022/012277
申请日：2022-01-13
申请人： WISCONSIN ALUMNI RESEARCH FOUNDATION
发明人： WESTPHALL, Michael , COON, Joshua
IPC分类号： H01J37/20 , H01J37/26 , G01N1/28
摘要： The present invention provides an improved technique for cryogenically fixing biological samples in amorphous ice for analysis by cryo-electron microscopy (cryo-EM). Analyte particles are cooled to very low temperatures prior to depositing the particles onto a cooled substrate surface, such as a transmission electron microscope (TEM) grid. This approach "locks" in the particle structure prior to deposition. Either concurrently with or after deposition, the analyte particles are further contacted with a vapor stream of atoms or molecules at cryogenic or near cryogenic temperatures. As a result, a thin layer of an amorphous solid is formed around each particle without significant conformational changes in the particle structure, thereby forming an improved sample for EM analysis.

9. 发明申请

WO2022125469A1 ULTRAFAST SPATIALLY RESOLVING DETECTOR FOR PHOTONS AND CHARGED PARTICLES AND APPLICATIONS THEREOF 审中-公开
公开(公告)号：WO2022125469A1
公开(公告)日：2022-06-16
申请号：PCT/US2021/062067
申请日：2021-12-06
申请人： RESEARCH INSTITUTE CORPORATION [US]/[US]
发明人： ADAMS, Bernhard, Wener , ROSE-PETRUCK, Christoph
IPC分类号： H01J37/26 , H01J37/28
摘要： Ways of detecting individual photons or charged particles with two-dimensional spatial and single-digit picosecond timing accuracy are disclosed. The embodiments are applicable to photons of energies capable of producing photoelectrons, typically, but not necessarily, from about one electron- Volt to several kilo-electron-Volts, and also to charged particles reaching the detector at arbitrary energies. The embodiments are based on amplification of the signal inherent in an energetic primary charged particle or photoelectron through hot-carrier generation in bulk conducting or semiconducting material, optionally combined with further amplification in a micro-channel plate. Applications may be found in photon-based methods of imaging and otherwise spatially resolving ultrafast molecular dynamics, time-of flight imaging including medical imaging, quantum optics, and optical computing. Further applications may be found in charged-particle-based methods in the velocity mapping of molecular fragments and electrons in triggered molecular breakup. Further applications may be found in time-resolved imaging in electron microscopy, in particular full-image electron-energy analysis by time of flight, using energy -time-domain electron optics for increasing the time-of-flight contrast.

10. 发明申请

WO2022028633A1 METHOD OF OPERATION OF A CHARGED PARTICLE BEAM DEVICE 审中-公开
公开(公告)号：WO2022028633A1
公开(公告)日：2022-02-10
申请号：PCT/CZ2021/050080
申请日：2021-07-30
申请人： TESCAN BRNO
发明人： VOJTĚCH, Filip
IPC分类号： H01J37/26 , H01J37/20 , H01J2237/20207 , H01J2237/20214 , H01J2237/20242 , H01J2237/221 , H01J37/265
摘要： A method of operation of a charged particle beam device, where the observed place on a sample moves within the field of view of the charged particle beam device as the sample is tilted or rotated. At least one sample image in a first sample position and at least one auxiliary sample image in a position different from the first sample position are generated. The sample images are compared, wherein the result of the comparison is a determined sample displacement value, by which the sample must be shifted to a third position such that the observed place on the sample is in the same position relative to the charged particle beam device as in the first sample position.

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