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    • 1. 发明申请
    • CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS
    • WO2023017107A1
    • 2023-02-16
    • PCT/EP2022/072504
    • 2022-08-11
    • ELDICO SCIENTIFIC AG
    • STEINFELD, GuntherNIEBEL, HaraldVAN DEN BERG, ChristiaanVAN VEEN, AlexanderTUOHIMAA, Tomi
    • H01J37/295H01J37/26
    • A charged-particle beam device (1 ) for charged-particle crystallography of a crystalline sample comprises a charged-particle source (4) for generating a charged-particle beam (2) to be radiated onto a sample and a charged-particle- optical system downstream the charged-particle source (4), which is configured to form in a diffraction mode a substantially parallel charged-particle beam (2) at a predefined sample position (9) and in an imaging mode a focused charged- particle beam (2) having a focus at the predefined sample position (9). The charged-particle-optical system comprises a charged-particle zoom lens system (5) consisting of a first magnetic lens (6), a second magnetic lens (7) downstream the first magnetic lens (6) and a third magnetic lens (8) downstream the second magnetic lens (7), wherein at least the second magnetic lens (7), preferably each one of the first (6), the second (7) and the third (8) magnetic lens has a variable focal length. The charged-particle-optical system further comprises a single beam limiting aperture (12) with a fixed aperture diameter arranged at a fixed position between the second magnetic lens (7) and the third magnetic lens (8) for limiting the diameter of the charged-particle beam (2) at the sample position (9). The charged-particle-optical system is configured such that the diameter of the charged-particle beam (2) at the sample position (9) is in a range between 100 nanometer and 1000 nanometer, in particular between 220 nanometer and 250 nanometer, in the diffraction mode, and in a range between 10 nanometer and 200 nanometer in the imaging mode.
    • 2. 发明申请
    • DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY
    • WO2020234291A1
    • 2020-11-26
    • PCT/EP2020/063953
    • 2020-05-19
    • ELDICO SCIENTIFIC AG
    • STEINFELD, GuntherSANTISO-QUINONES, GustavoHOVESTREYDT, Eric
    • H01J37/20H01J37/28
    • The present invention relates to a diffractometer (1) for charged-particle crystallography of a crystalline sample (31), in particular for electron crystallography of a crystalline sample (31). The diffractometer (1) comprises a charged-particle source (10) for generating a charged-particle beam along a charged-particle beam axis (11), a charged-particle-optical system (20) for manipulating the charged-particle beam such as to irradiate the sample with the charged-particle beam and a charged-particle detection system (50) at least for collecting a diffraction pattern of the sample (31) based on the beam of charged- particles transmitted through the sample. The diffractometer (1) further comprises a sample holder (30) for holding the sample and a manipulator (40) operatively coupled to the sample holder (30) for positioning the sample (31) relative to the beam axis (11). The manipulator (40) comprises a rotation stage (41) for tilting the sample holder (30) with respect to the incident charged-particle beam around a tilt axis (44), and a multi-axes translation stage (42) for moving the sample holder (30) at least in a plane perpendicular to the tilt axis (44). The multi-axes translation stage (42) is operatively coupled between the sample holder (30) and the rotation stage (41) such that the multi-axes translation stage (42) is in a rotational system of the rotation stage (41) and the sample holder (30) is in a moving system of the multi-axes translation stage (42).