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    • 7. 发明申请
    • METHOD FOR PRODUCING QUARTZ GLASS CRUCIBLE
    • 生产石英玻璃可溶性的方法
    • WO01092169A1
    • 2001-12-06
    • PCT/EP2001/006181
    • 2001-05-31
    • C03B20/00C03B19/09C30B15/10C03B15/10
    • C03B19/095C30B15/10Y02P40/57
    • Problems the invention is to solve: An object of the present invention is to provide a method for producing a quartz glass crucible capable of pulling up a silicon single crystal at a highly improved yield, yet without generating oscillation at the surface of the melt on pulling up silicon single crystal, and free from generating dislocations due to the peeling off of quartz glass fractions. Means for solving the problems: In a method for producing a quartz glass comprising a step of forming a base body comprising supplying a powder of silicon dioxide inside a rotating mold and thereby obtaining a molded body in the shape of a crucible by taking advantage of the centrifugal force, followed by heating and fusing the resulting molded body to obtain a translucent quartz glass crucible base body, and a step of forming an inner layer by newly supplying a powder of silicon dioxide into the heated atmosphere inside said crucible base body during or after forming said crucible base body, thereby forming an inner layer of a transparent quartz glass on the inner plane of said crucible base body, claimed is a method in which water vapor is introduced into said crucible base body in at least a part of the step for forming the inner layer.
    • 本发明解决的问题本发明的目的是提供一种能够以高提高的产率提取硅单晶的石英玻璃坩埚的制造方法,但不会在拉拔时在熔融物的表面产生振荡 硅单晶,并且由于石英玻璃部分的剥离而没有产生位错。 解决问题的手段在石英玻璃的制造方法中,包括形成基体的步骤,该基体包括在旋转模具内部供给二氧化硅粉末,从而通过利用所述坩埚形成坩埚形状的成型体 离心力,然后对得到的成型体进行加热熔融,得到半透明的石英玻璃坩埚基体,以及通过在二氧化硅粉末内向上述坩埚基体内的加热气氛中新鲜供给而形成内层的工序 形成所述坩埚基体,从而在所述坩埚基体的内平面上形成透明石英玻璃的内层,要求的方法是在所述坩埚基体的至少一部分中引入水蒸气 形成内层。