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    • 3. 发明申请
    • PASSIVELY MODE-LOCKED FIBER RING GENERATOR
    • 经常模式锁定的纤维环发电机
    • WO2016100330A1
    • 2016-06-23
    • PCT/US2015/065798
    • 2015-12-15
    • IPG PHOTONICS CORPORATION
    • SAMARTSEV, IgorBORDENYUK, Andrey
    • H01S3/098H01S3/067
    • H01S3/06791H01S3/06725H01S3/06754H01S3/08013H01S3/08027H01S3/094003H01S3/0941H01S3/10023H01S3/1112H01S3/131H01S3/136
    • A pulsed fiber generator is configured with a unidirectional ring waveguide configured to emit a train of pulses. The ring waveguide includes multiple fiber amplifiers, chirping fiber components coupled to respective outputs of first and second fiber amplifiers, and multiple spectral filters coupled to respective outputs of the chirping components. The filters have respective spectral band passes centered around different central wavelengths so as to provide leakage of light along the ring cavity in response to nonlinear processes induced in the ring cavity. The pulse generator operates at a preliminary stage during which it is configured to develop a pitch to a signal, and at a steady stage during which it is configured to output a train of pulses through an output coupler at most once per a single round trip of the signal.
    • 脉冲光纤发生器配置有单向环形波导,其被配置为发射一串脉冲。 环形波导包括多个光纤放大器,耦合到第一和第二光纤放大器的相应输出的啁啾光纤部件和耦合到啁啾部件的相应输出的多个光谱滤波器。 滤波器具有以不同中心波长为中心的各自的光谱带通道,以便响应于在环形空腔中引起的非线性过程,沿着环形空腔提供光的泄漏。 脉冲发生器在初始阶段工作,在此阶段,其被配置为对信号产生音调,并且在稳定阶段期间,其被配置为通过输出耦合器输出一串脉冲,每单次往返行程最多一次 信号。
    • 5. 发明申请
    • NOISE DETECTION, DIAGNOSTICS, AND CONTROL OF MODE-LOCKED LASERS
    • 噪声检测,诊断和模式锁定激光器的控制
    • WO2014120292A1
    • 2014-08-07
    • PCT/US2013/065448
    • 2013-10-17
    • IMRA AMERICA, INC.
    • HARTL, IngmarMOHR, Christian
    • H01S3/10
    • H01S3/1106H01S3/06754H01S3/1121H01S3/1305H01S3/1306H01S3/1312H01S3/136H01S5/065H01S5/0657H01S5/06817H01S5/06835H01S5/0687H01S2301/02
    • The present invention features a laser based system configured with a noise detection unit. The system includes a mode-locked oscillator. A noise detection unit includes at least one optical detector that monitors optical pulses generated by the mode-locked oscillator and produces an electrical signal in response to the optical pulses. The noise detection unit includes a first filter to transmit signal power over a signal bandwidth which includes the mode-locked laser repetition frequency, frep. The noise detection unit may include one or more filters to transmit power over a noise bandwidth that substantially excludes repetition frequency, frep. Non-linear signal processing equipment is utilized to generate one or more signals representative of the power in the signal bandwidth relative to the power in the noise bandwidth. The system includes a controller operable to generate a signal for controlling the laser based system based on the relative power.
    • 本发明的特征在于具有噪声检测单元的基于激光的系统。 该系统包括锁模振荡器。 噪声检测单元包括至少一个光检测器,其监测由锁模振荡器产生的光脉冲,并响应于光脉冲产生电信号。 噪声检测单元包括用于在包括锁模激光重复频率frep的信号带宽上传输信号功率的第一滤波器。 噪声检测单元可以包括一个或多个滤波器,以在基本上排除重复频率frep的噪声带宽上传输功率。 利用非线性信号处理设备产生一个或多个表示信号带宽中功率相对于噪声带宽中功率的信号。 该系统包括可操作以基于相对功率产生用于控制基于激光的系统的信号的控制器。
    • 10. 发明申请
    • EUV LPP SOURCE WITH DOSE CONTROL AND LASER STABILIZATION USING VARIABLE WIDTH LASER PULSES
    • 具有剂量控制和激光稳定的EUV LPP源使用可变宽度激光脉冲
    • WO2018085071A1
    • 2018-05-11
    • PCT/US2017/057895
    • 2017-10-23
    • ASML NETHERLANDS B.V.
    • FOMENKOV, Igor VladimirovichRAFAC, Robert Jay
    • H05G2/00
    • H05G2/008H01S3/10069H01S3/107H01S3/136H01S3/2232H01S2301/08H05G2/003
    • A method and apparatus tor control of a dose of extreme ultraviolet (EUV) radiation generated fay a laser produced plasma (LPP) EUV Sight source. Each laser pulse is modulated to be of a width that is determined to he sufficient to allow for extraction of a suitable uniform amount of energy in the laser source gain medium; in some embodiments the suitable uniform amount of energy to be extracted may be selected to avoid self-lasing, The EUV energy created by each pulse is measured and total EUV energy created by the fired pulses determined,, and a desired energy for the next pulse is determined based upon whether the total EUV energy is greater or less than a desired average EUV energy times the number of pulses. The energy of the next pulse is modulated, either fey modulating its 'magnitude or by modulating the amplification of the pulse by one or mote amplifiers, but without decreasing the determined width of the laser pulse.
    • 控制由激光产生的等离子体(LPP)EUV光源产生的极紫外(EUV)辐射剂量的方法和设备。 每个激光脉冲被调制为具有足以允许在激光源增益介质中提取合适的均匀量的能量的宽度, 在一些实施例中,可以选择要提取的合适的均匀量的能量以避免自激。由每个脉冲产生的EUV能量被测量并且确定由被激发的脉冲产生的总EUV能量,并且用于下一个脉冲的期望能量 基于总EUV能量是大于还是小于期望平均EUV能量乘以脉冲数量来确定。 下一个脉冲的能量被调制,或者调制其幅度或者通过一个或者多个放大器来调制脉冲的放大,但是不降低确定的激光脉冲的宽度。