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    • 1. 发明申请
    • DETECTOR OPTICS FOR MULTIPLE ELECTRON BEAM TEST SYSTEM
    • 多电子束测试系统的探测器光学
    • WO2007094811A2
    • 2007-08-23
    • PCT/US2006019113
    • 2006-05-05
    • MULTIBEAM SYSTEMS INC
    • PARKER N WILLIAMMILLER S DANIEL
    • H01J37/244H01J9/42H01J37/256H01J37/28H01J2237/24495H01J2237/24592H01J2237/2485H01J2237/2817
    • A detector optics system for collecting secondary electrons (SEs) and/or backscattered electrons (BSEs) in a multiple charged particle beam test system is disclosed. Aspects of the detector optics system include: the ability to image and/or electrically test a number of locations simultaneously across the full width of a large substrate with high throughput and uniform collection efficiency while avoiding crosstalk between signals generated by neighboring beams. In one embodiment, a linear array of N electron beams causes SEs to be emitted from the substrate, which are then collected by one or more linear arrays of >2N detectors. Each linear array is connected to a signal combiner circuit which dynamically determines which detectors are collecting SEs generated by each electron beam as it scans across the substrate surface and then combines the signals from these detectors to form N simultaneous output signals (one per charged particle beam) for each detector array.
    • 公开了一种用于在多重带电粒子束测试系统中收集二次电子(SE)和/或反向散射电子(BSE)的检测器光学系统。 检测器光学系统的方面包括:在具有高吞吐量和均匀采集效率的同时在大型衬底的整个宽度上同时跨多个位置进行成像和/或电测试的能力,同时避免由相邻光束产生的信号之间的串扰。 在一个实施例中,N个电子束的线性阵列导致从衬底发射SE,然后由> 2N个检测器的一个或多个线性阵列收集。 每个线性阵列连接到信号组合器电路,其在动态地确定哪些检测器正在收集由每个电子束产生的SE,因为它扫描基板表面,然后组合来自这些检测器的信号以形成N个同时输出信号(每个带电粒子束一个 )。
    • 2. 发明申请
    • APPARATUS AND METHOD FOR INSPECTION AND TESTING OF FLAT PANEL DISPLAY SUBSTRATES
    • 用于检查和测试平板显示基板的装置和方法
    • WO2007032779A2
    • 2007-03-22
    • PCT/US2006/011381
    • 2006-03-28
    • MULTIBEAM SYSTEMS, INC.
    • PARKER, William, N.
    • H01J3/14
    • H01J37/256H01J9/42H01J37/09H01J37/147H01J37/244H01J2237/0492H01J2237/1501H01J2237/162H01J2237/188H01J2237/24475H01J2237/2448H01J2237/2594H01J2237/2817
    • A charged particle optical system for testing, imaging or inspecting substrates comprises: a charged particle optical assembly configured to produce a line of charged particle beams equally spaced along a main scan axis, each beam being deflectable through a large angle along the main scan axis; and linear detector optics aligned along the main scan axis. The detector optics includes a linear secondary electron detector, a field free tube, voltage contrast plates and a linear backscattered electron detector. The large beam deflection is achieved using an electrostatic deflector for which the exit aperture is larger than the entrance aperture. One embodiment of the deflector includes: two parallel plates with chamfered inner surfaces disposed perpendicularly to the main scan axis; and a multiplicity of electrodes positioned peripherally in the gap between the plates, the electrodes being configured to maintain a uniform electric field transverse to the main scan axis.
    • 用于测试,成像或检查基板的带电粒子光学系统包括:带电粒子光学组件,被配置为产生沿着主扫描轴等距间隔的带电粒子束线,每个束可沿主扫描轴线偏转大角度; 以及沿主扫描轴对准的线性检测器光学元件。 检测器光学器件包括线性二次电子检测器,无磁场管,电压对比板和线性背散射电子检测器。 使用静电偏转器实现大的光束偏转,出射孔大于入射孔。 偏转器的一个实施例包括:具有与主扫描轴垂直设置的倒角内表面的两个平行板; 以及多个电极位于板之间的间隙周边,电极被配置为保持横向于主扫描轴的均匀电场。
    • 5. 发明申请
    • A METHOD FOR TESTING A LIGHT-EMITTING PANEL AND THE COMPONENTS THEREIN
    • 一种用于测试发光板及其组件的方法
    • WO0235510A8
    • 2002-07-11
    • PCT/US0142782
    • 2001-10-26
    • SCIENCE APPLIC INT CORP
    • JOHNSON ROGER LAVERNEGREEN ALBERT MYRONGEORGE EDWARD VICTORWYETH NEWELL CONVERS
    • G01M11/00G09G3/00G09G3/22H01J9/02H01J9/227H01J9/24H01J9/42H01J17/49G09G3/34H01J61/30H01J61/42H01J65/00
    • H01J11/18G09G3/006G09G3/22H01J9/42H01J17/49H01J2217/492
    • A process for in-line testing and control of the manufacture of a display panel having a plurality of light-emitting micro-components sandwiched between two substrates is disclosed. The preferred process includes a step (900) of forming micro-capsules containing a gas capable of ionization when a sufficiently large voltage is supplied across the micro-component via at least two electrodes, a step (910) of forming a panel having at least one electrode for ionization of the gas and plurality of sockets for receiving the micro-capsules, a micro-component placement process (930), a process (940) of aligning a second substrate which may have another electrode placed thereon, and a dicing process (950). Another process (905) to dope or coat the micro-components with an emission enhancement material such as low affinity material, conductive, reflective and/or luminescent material, e.g., magnesium oxide, gold, aluminum, and/or phosphor coatings, may also be provided. The panels are preferably tested, such as for size, shape, position, material properties, or electric function after each process and the data stored and subsequently analyzed to determine necessary modifications of the process and/or product.
    • 公开了一种用于在线测试和控制制造具有夹在两个基板之间的多个发光微型部件的显示面板的方法。 优选的方法包括以下步骤(900):当通过至少两个电极向微型部件提供足够大的电压时,形成包含能够离子化的气体的微型胶囊;形成面板的步骤(910),所述面板至少具有至少一个 用于气体电离的一个电极和用于接收微囊的多个插座,微元件放置过程(930),对准可以具有放置在其上的另一个电极的第二基板的过程(940),以及切割过程 (950)。 用发射增强材料(例如低亲和性材料,导电,反射和/或发光材料,例如氧化镁,金,铝和/或磷光体涂层)掺杂或涂布微元件的另一种工艺(905)也可以 提供。 优选对面板进行测试,例如在每个过程之后对尺寸,形状,位置,材料特性或电功能进行测试,并存储和随后分析数据以确定过程和/或产品的必要修改。
    • 8. 发明申请
    • 放電管の封入ガス圧測定方法と放電管の製造方法
    • 用于测量电气放电管中密封气体的压力的方法及制造电放电管的方法
    • WO2009041008A1
    • 2009-04-02
    • PCT/JP2008/002606
    • 2008-09-22
    • パナソニック株式会社森理夫
    • 森理夫
    • H01J9/42H01J9/395
    • H01J9/42H01J9/395
    •  放電管(1)は、バルブ(2)と、バルブ(2)内に封入されたガス(6)と、バルブ(2)内に設けられた電極(4A,4B)とを有する。バルブ(2)は長手方向に延び、長手方向に沿って互いに反対側に配列された第1の端部(3B)と第2の端部(3A)とを有する。この放電管(1)のバルブ(2)の第1の端部(3B)を液体(7)中に漬けた状態で液体(7)を第1の端部(3B)からバルブ内に浸入させることにより、ガス(6)よりなる気泡(20)をバルブ(2)内に発生させる。バルブ(2)の長手方向を水平に維持しながら、気泡(20)の長手方向での長さを測定する。気泡(20)の測定された長さに基づいて放電管(1)でのガス(6)の圧力を算出する。この方法により、簡便にかつ高精度で放電管(1)のバルブ(2)に封入されたガス(6)の圧力を測定することができる。
    • 放电管(1)具有灯泡(2),密封在灯泡(2)中的气体(6)和设置在灯泡(2)中的电极(4A,4B)。灯泡(2)具有第一和第二 沿着灯泡(2)的长度方向延伸并沿长度方向设置在相对侧的端部(3B,3A)。 第一端部(3B)浸没在液体(7)中,在该状态下,液体(7)通过第一端部(3B)进入灯泡,从而形成气体(20) 6)在灯泡(2)中。 在水平地保持灯泡(2)的长度方向的同时,测量灯泡(2)的长度方向上的大小(20)的长度。 从测量长度计算出放电管(1)中气体(6)的压力。 利用该方法,可以简单且精确地确定密封在放电管(1)的灯泡(2)中的气体(6)的压力。
    • 9. 发明申请
    • プラズマディスプレイパネルの点灯検査方法
    • 等离子显示面板照明检测方法
    • WO2005052975A1
    • 2005-06-09
    • PCT/JP2004/017668
    • 2004-11-22
    • 松下電器産業株式会社伊倉 恒生脇谷 敬夫
    • 伊倉 恒生脇谷 敬夫
    • H01J9/42
    • H01J9/42G09G3/006G09G3/2022G09G3/293G09G2310/0218H01J2217/49
    • A method of inspecting lighting of a plasma display panel in which cells are formed at two-level crossings between electrodes arranged in the row direction and electrodes arranged in the column direction and gradation display is conducted by combining subfields constituting one field for lighting. In a predetermined subfield, not applying a write pulse voltage to a cell to be inspected a write pulse voltage is applied to at least one specific cell which is one of the cells adjacent to the cell to be inspected, and in the next subfield a write pulse voltage is applied to the cell to be inspected. If there is a defect in the partition of the cell to be inspected, the discharge in the adjacent cells adversely influences through the defective partition the amount of charge of the partition of the cell to be inspected. As a result, in the next subfield, the cell to be inspected does not light. Thus lighting failure caused by the defective partition can be detection.
    • 通过组合用于点亮的一个场的子场来进行等离子体显示面板的照明方法,该等离子体显示面板中的电池形成在沿行方向排列的电极和排列在列方向上的电极和灰度显示之间的两级交叉处。 在预定的子场中,不向要检查的单元施加写入脉冲电压,写入脉冲电压被施加到与被检测单元相邻的单元之一的至少一个特定单元,并且在下一个子场中写入 将脉冲电压施加到要检查的电池。 如果要检查的单元的分区存在缺陷,则相邻单元中的放电通过缺陷分区对待检查单元的分区的电荷量产生不利影响。 结果,在下一个子场中,待检查的单元不亮。 因此,可以检测由故障分区引起的照明故障。