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    • 1. 发明申请
    • MACHINE TOOL
    • 机床
    • WO2015155083A2
    • 2015-10-15
    • PCT/EP2015057139
    • 2015-04-01
    • ETXETAR SA
    • IBARRA JORGEIRIBARREN IBONHEALY ROBERT JOSEPH
    • B23Q1/623B23Q7/02B23Q39/022
    • The machine tool comprises: a workpiece carrier assembly (1) arranged for horizontal movement in parallel with a horizontal axis; a tool carrier (2) configured for carrying at least one tool (201, 202, 203, 204, 208, 212) for machining at least one workpiece by rotating said tool; said workpiece carrier assembly (1) or said tool carrier (2) being displaceable between an operative position in which a workpiece carrier (11) is facing said tool carrier (2), and at least one inoperative position; the workpiece carrier (11) being arranged to be rotatable, to allow for a modification of the angular position of the workpiece (1000) in relation to the tool carrier (2).
    • 机床包括:工件托架组件(1),其布置成与水平轴线平行地水平运动; 工具托架(2),其构造成用于承载至少一个工具(201,202,203,204,208,212),用于通过旋转所述工具来加工至少一个工件; 所述工件载体组件(1)或所述工具架(2)可在工件载体(11)面向所述工具架(2)的工作位置和至少一个不工作位置之间移动; 工件托架(11)布置成可旋转,以允许相对于工具托架(2)修改工件(1000)的角位置。
    • 4. 发明申请
    • TWO-DIMENSIONALLY BALANCED POSITIONING DEVICE WITH TWO OBJECT HOLDERS, AND LITHOGRAPHIC DEVICE PROVIDED WITH SUCH A POSITIONING DEVICE
    • 具有两个对象持有人的两维平衡定位装置和具有这样一个定位装置的平面装置
    • WO1998028665A1
    • 1998-07-02
    • PCT/IB1997001209
    • 1997-10-03
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.PHILIPS NORDEN ABASM LITHOGRAPHY B.V.
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.PHILIPS NORDEN ABASM LITHOGRAPHY B.V.LOOPSTRA, Erik, RoelofBONNEMA, Gerrit, MaartenVAN DER SCHOOT, Harmen, KlaasVELDHUIS, Gerjan, PeterTER BEEK, Paulus, Martinus, Henricus
    • G03F07/20
    • G03F7/70733B23Q1/621B23Q1/623B23Q11/0032G03F7/70716G03F7/70741G03F7/7075G03F7/70766G03F7/709H01L21/682Y10T74/20213
    • A positioning device (3, 97, 179) with a first displacement unit (25, 189) for displacing a first object holder (11, 181) and a second displacement unit (27, 191) for displacing a second object holder (13, 183). The object holders can be displaced by the positoning device alternately from a measuring position into an operational position and can be displaced by the respective displacement units independently of one another in the measuring position and in the operational position. The displacement units are provided with force actuators which each have a first part (47, 49; 117, 119; 215, 217) which is coupled to the relevant object holder and which is displaceable under the influence of a driving force relative to a second part (59, 61; 133, 135, 137, 139; 219, 221) which is fastened to a balancing unit (69, 149, 205) which is common to the two displacement units. The balancing unit is displaceably guided relative to a base (81, 209), so that reaction forces of the displacement units are converted into displacements of the balancing unit relative to the base, and mechanical vibrations in the balancing unit and the base are prevented. The use of the force actuators prevents the displacements of the balancing unit from disturbing the positions of the object holders relative to the base. The positioning device is further provided with a control unit (83, 169, 237) by means of which at least the parts (47, 49; 121, 123; 219, 221) directed parallel to an X-direction of the X-actuators (39, 41; 105, 107; 211, 213) coupled to the object holders are held in positions parallel to the X-direction. It is also prevented in this manner that positions of the object holders relative to the base are interfered with by rotations of the balancing unit caused by the reaction forces of the displacement units. The positioning device can be used in a lithographic device for the displacement of a semiconductor substrate relative to an exposure system of the lithographic device and for the displacement of a mask relative to the exposure system.
    • 具有用于移动第一物体保持器(11,181)的第一位移单元(25,189)和用于移动第二物体保持器(13,181)的第二位移单元(27,191)的定位装置(3,97,179) 183)。 物体保持器可以被定位装置从测量位置交替地移动到操作位置,并且可以在测量位置和操作位置中由相应的位移单元彼此独立地移位。 位移单元设置有力致动器,每个都具有第一部分(47,49; 117,119; 215,217),该第一部分联接到相关的物体保持器,并且在相对于第二部分的驱动力的影响下可移位 部分(59,61; 133,135,137,139; 219,221),其被紧固到两个位移单元共同的平衡单元(69,149,205)。 平衡单元相对于基座(81,209)可移动地被引导,使得位移单元的反作用力被转换成平衡单元相对于基座的位移,并且防止了平衡单元和基座中的机械振动。 使用力促动器防止平衡单元的位移扰乱物体保持器相对于基座的位置。 定位装置还设置有控制单元(83,169,237),通过该控制单元至少部分(47,49; 121,123,219,221)平行于X致动器的X方向 联接到物体保持器的连接部件(39,41; 105,107; 211,213)被保持在平行于X方向的位置。 也可以以这种方式防止物体保持器相对于基座的位置受到由位移单元的反作用力引起的平衡单元的旋转的干扰。 定位装置可以用于光刻设备中,用于相对于光刻设备的曝光系统移位半导体衬底以及掩模相对于曝光系统的位移。
    • 5. 发明申请
    • MACHINE FOR STOCK-REMOVING MACHINING OF OPTICAL MATERIALS FOR THE MANUFACTURE OF OPTICAL COMPONENTS
    • 机加工光学材料材料生产光学组件
    • WO1997040960A1
    • 1997-11-06
    • PCT/EP1997001965
    • 1997-04-18
    • JUNG, Rainer
    • B24B13/06
    • B24B13/06B23Q1/623
    • Proposed and described is a machine (1) for stock-removing machining of optical materials, for example for the manufacture of spectacle lenses, characterized in that in relation to the workpiece (23), the machining tool (19) is additionally mounted to allow controlled swivel adjustment about an axis (B-B) that extends perpendicularly to a plane guided by two coordinates of a right-angled or Cartesian coordinate system. This swivel adjustment axis (B-B) is held in constant alignment or congruence with a center point (M) or a center of the cutting path of the machining tool (19) about the spindle's rotary axis (A-A), and the swivel alignment axis (B-B) is always perpendicular to the rotary axis (A-A) of the machining tool (19). The angle support (12) is displaced about the swivel alignment axis (B-B) by a servomotor (14), which has a computer-controlled connection to a servocontroller (24)
    • 提出并描述的是一台机器(1),用于材料去除加工光学材料,例如 用于生产的眼镜镜片,其特征在于,所述加工工具(19)相对于所述工件布置枢转地调整(23)除了一个轴线(BB)控制,这是成直角通过矩形或直角的两个坐标的 坐标系延伸出的水平。 在这种情况下,这个Schwenkverstell轴线(BB)是在恒定逃逸或与中心点(M)和用于切割所述加工工具(19)围绕旋转(AA)的主轴轴线的过程中心重叠的位置被保持,并且Schwenkverstell轴线(BB)延伸 同时不断垂直于加工工具(19)的旋转(AA)的轴线。 角支撑件(12)由一个绕轴线Schwenkverstell(B-B)移位,其与一个伺服控制器(24)的计算机控制连接伺服电机(14)。
    • 10. 发明申请
    • VORRICHTUNG ZUM BEARBEITEN VON MIT SCHNEIDZÄHNEN VERSEHENEN PLATTENFÖRMIGEN ODER ZYLINDRISCHEN WERKSTÜCKEN
    • 装置上使用的切削齿提供的板材加工或成形的圆柱形工件
    • WO2006117104A1
    • 2006-11-09
    • PCT/EP2006/003835
    • 2006-04-25
    • VOLLMER WERKE MASCHINENFABRIK GMBHBRAND, StefanBAILER, PeterBAILER, NorbertVEIL, Siegfried
    • BRAND, StefanBAILER, PeterBAILER, NorbertVEIL, Siegfried
    • B23Q1/62B23H9/00B24B3/00
    • B24B3/00B23H9/003B23H9/08B23Q1/4857B23Q1/623B24B41/00Y10T409/303752Y10T409/307672
    • Die Erfindung betrifft eine Vorrichtung (10) zum Bearbeiten von mit Schneidzähnen (S) versehenen plattenförmigen oder zylindrischen Werkstücken (70), mit einer Maschinenbasis (12), einer relativ zu der Maschinenbasis (12) verlagerbaren Bearbeitungseinrichtung (14) und einer relativ zu der Maschinenbasis (12) verlagerbaren Werkstückpositioniereinrichtung (16), wobei die Bearbeitungseinrichtung (14) eine relativ zur Maschinenbasis (12) entlang einer ersten Raumachse (Y1) linear verlagerbare Bearbeitungsbrücke (18) und einen relativ zur Bearbeitungsbrücke (18) entlang einer zweiten Raumachse (X1) linear verlagerbaren Bearbeitungsarm (20) umfasst, wobei an dem Bearbeitungsarm (20) eine Bearbeitungseinheit (26) mit einem Bearbeitungswerkzeug (28) um eine Schwenkachse (E1) schwenkbar gelagert ist, wobei die Schwenkachse (E1) im Wesentlichen orthogonal zu einer von erster und zweiter Raumachse (Y1, X1) aufgespannten Ebene verläuft, wobei weiter die Werkstückpositioniereinrichtung (16) einen relativ zu der Maschinenbasis (12) entlang einer dritten Raumachse (Z1) linear verlagerbaren Lagerschlitten (32) aufweist und wobei an dem Lagerschlitten (32) eine Kipplageranordnung vorgesehen ist, in der eine Werkstückaufnahmeanordung (44) um eine Kippachse (B1) verkippbar gelagert ist.
    • 本发明涉及一种装置(10),用于与切削齿(S)设置有板形或圆柱形工件(70),具有一个机座(12),一个相对于所述机座(12)可动的加工装置(14)和一个相对于工作 机器底座(12)移动的工件定位机构(16),其中所述处理装置(14)相对于所述机座(12)沿第一空间轴线(Y1)是线性地移动加工桥(18)和一个相对于所述机械加工桥(18)沿第二空间轴线(X1 包括)线性移动的加工臂(20),枢转地安装在所述工作臂(20)的处理单元(26)与加工工具(28)(围绕枢转轴线E1),其特征在于,所述枢转轴线(E1)基本上垂直于第一至之一 和第二空间轴线(Y1,X1)面跨越运行时,进一步地,其中所述工件定位机构(16) 一个相对于所述机座(12)沿第三空间轴(Z1)包含直线移动支撑滑架(32),并且其中在所述轴承架(32)具有一个Kipplageranordnung提供了一种其中一个Werkstückaufnahmeanordung(44)围绕倾斜轴(B1),其安装可倾斜地 是。