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1. 发明申请

WO2010049076A2 OPTICAL MODULE FOR GUIDING A RADIATION BEAM 审中-公开
标题翻译：用于引导辐射束的光学组件
公开(公告)号：WO2010049076A2
公开(公告)日：2010-05-06
申请号：PCT/EP2009007476
申请日：2009-10-19
申请人： ZEISS CARL SMT AG , HAUF MARKUS , WALDIS SEVERIN , NOELL WILFRIED , PETREMEND YVES , JASSMANN MARCO , KULZER LOTHAR , ATAMAN CAGLAR
发明人： HAUF MARKUS , WALDIS SEVERIN , NOELL WILFRIED , PETREMEND YVES , JASSMANN MARCO , KULZER LOTHAR , ATAMAN CAGLAR
IPC分类号： G03F7/20
CPC分类号： G03F7/7015 , G02B7/1815 , G02B26/0816 , G02B26/0833 , G03F7/70075 , G03F7/70116 , G03F7/70291 , G03F7/70891
摘要： An optical module is used to guide an EUV radiation beam. The optical module has a chamber (32) that can be evacuated and at least one mirror accommodated in the chamber (32). The mirror has a plurality of individual mirrors (27), the reflective surfaces (34) of which complement each other to form an overall mirror reflective surface. A supporting structure (36) is mechanically connected to a mirror body (35) of the respective individual mirror (27) via a thermally conductive section (37). At least some of the mirror bodies (35) have an associated actuator (50) for the predefined displacement of the mirror body (35) relative to the supporting structure (36) in at least one degree of freedom. The thermally conductive sections (37) are designed to remove a thermal power density of at least 1 kW/m2 absorbed by the mirror bodies (35) to the supporting structure (36). In one aspect of the optical module, an integrated electronic displacement circuit is associated with each of the displaceable individual mirrors (27) in spatial proximity. In this variant, a central control unit has a signal connection to the integrated electronic displacement circuits of the displaceable individual mirrors (27). The result is an optical module with which lighting optics can be produced which ensure a high EUV radiation throughput even with a non-negligible thermal load on the individual mirrors.
摘要翻译：使用光学组件来引导EUV辐射束。该光学组件具有可抽空室（32）和容纳在室（32）中的至少一个反射镜。后者具有多个单独的反射镜（27），反射表面（34）彼此互补以形成整个反射镜表面。支撑结构（36）分别通过热传导部分（37）机械地连接到相应的单个反射镜（27）的反射镜主体（35）。至少一些镜体（35）具有相关联的致动器（50），以用于镜体（35）相对于支撑结构（36）的至少一个自由度的预定位移。热传导部分（37）被设计成将由镜体（35）吸收的至少1kW / m 2的热功率密度释放到支撑结构（36）上。在光学组件的一个方面中，每个可位移的单独反射镜（27）与空间上相邻的集成电子位移电路相关联。在该变型中，中央控制装置与可置换的单独反射镜（27）的集成电子位移电路进行信号通信。其结果是一个光学组件，利用该组件可以构建照明光学系统，这确保了即使在单个反射镜上没有不小的热负荷也能够实现高EUV辐射通过量。

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