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1. 发明申请

WO9967683A3 OPTICAL SYSTEM, ESPECIALLY A PROJECTION LIGHT FACILITY FOR MICROLITHOGRAPHY 审中-公开
标题翻译：光学系统，特别是微型摄影术的投影曝光系统
公开(公告)号：WO9967683A3
公开(公告)日：2000-04-20
申请号：PCT/EP9904246
申请日：1999-06-18
申请人： ZEISS CARL , ZEISS STIFTUNG , GABER ERWIN , WAGNER CHRISTIAN , HOLDERER HUBERT , GERHARD MICHAEL , MERZ ERICH , BECKER JOCHEN , SCHEIBERLICH ARIE CORMELIS
发明人： GABER ERWIN , WAGNER CHRISTIAN , HOLDERER HUBERT , GERHARD MICHAEL , MERZ ERICH , BECKER JOCHEN , SCHEIBERLICH ARIE CORMELIS
IPC分类号： G03F7/22 , G02B7/02 , G02B13/14 , G02B27/00 , G03F7/20 , H01L21/027 , G02B26/06
CPC分类号： G03F7/70825 , G02B7/023 , G02B7/028 , G02B27/0068 , G03F7/70241 , G03F7/70358 , G03F7/70783
摘要： The invention relates to an optical system, especially a projection light facility for microlithography, especially with an image field shaped as a slit or with non rotational symmetry illumination, comprising an optical element (1), especially a lens or a mirror, which is arranged in a mount (2) and actuators (3) which engage with the optical element (1) at least nearly perpendicular to the optical axis. The actuators (3) effect non rotational symmetric forces and/or moments deviating from the radial lines in the optical element (1) to generate deformations with substantially no changes in thickness. Image errors arising as a result of asymmetric heating of the optical system are compensated for by deformation of the optical element.
摘要翻译：的光学系统，特别是用于微光刻的投射曝光系统，特别是与狭缝状的图像场或非旋转对称的照明，光学元件（1），特别是透镜或反射镜，其在固定件（2）布置，和致动器（3 ），其至少近似垂直于光轴地接合在光学元件（1）上。致动器（3）引起非旋转对称并偏离光学元件（1）上的径向力和/或力矩，从而基本上没有产生弯曲的厚度变化。由光学元件的不对称加热引起的图像误差通过光学元件的弯曲进行补偿。

2. 发明申请

WO9967683A8 OPTICAL SYSTEM, ESPECIALLY A PROJECTION LIGHT FACILITY FOR MICROLITHOGRAPHY 审中-公开
标题翻译：光学系统包括微型光刻投射曝光系统，
公开(公告)号：WO9967683A8
公开(公告)日：2000-05-25
申请号：PCT/EP9904246
申请日：1999-06-18
申请人： ZEISS CARL , ZEISS STIFTUNG , GABER ERWIN , WAGNER CHRISTIAN , HOLDERER HUBERT , GERHARD MICHAEL , MERZ ERICH , BECKER JOCHEN , SCHEIBERLICH ARIE CORMELIS
发明人： GABER ERWIN , WAGNER CHRISTIAN , HOLDERER HUBERT , GERHARD MICHAEL , MERZ ERICH , BECKER JOCHEN , SCHEIBERLICH ARIE CORMELIS
IPC分类号： G03F7/22 , G02B7/02 , G02B13/14 , G02B27/00 , G03F7/20 , H01L21/027 , G02B26/06
CPC分类号： G03F7/70825 , G02B7/023 , G02B7/028 , G02B27/0068 , G03F7/70241 , G03F7/70358 , G03F7/70783
摘要： The invention relates to an optical system, especially a projection light facility for microlithography, especially with an image field shaped as a slit or with non rotational symmetry illumination, comprising an optical element (1), especially a lens or a mirror, which is arranged in a mount (2) and actuators (3) which engage with the optical element (1) at least nearly perpendicular to the optical axis. The actuators (3) effect non rotational symmetric forces and/or moments deviating from the radial lines in the optical element (1) to generate deformations with substantially no changes in thickness. Image errors arising as a result of asymmetric heating of the optical system are compensated for by deformation of the optical element.
摘要翻译：的光学系统，特别是用于微光刻的投射曝光系统，特别是与狭缝状的图像场或非旋转对称的照明，光学元件（1），特别是透镜或反射镜，其在固定件（2）布置，和致动器（3 ）在攻击（光学元件1）在垂直于光轴的至少annäherend上。致动器（3）的非旋转对称的效果并从而不会导致弯曲厚度的改变基本上产生所述径向不同的力和/或力矩（1）在光学元件上。引起的光学系统的非对称加热的图像误差被通过光学元件的弯曲进行补偿。

3. 发明申请

WO0113615A3 METHOD AND DEVICE FOR TRANSMITTING VOICE SIGNALS IN A BUILDING 审中-公开
标题翻译：方法和装置用于转移语音信号在建筑物
公开(公告)号：WO0113615A3
公开(公告)日：2001-08-30
申请号：PCT/DE0002754
申请日：2000-08-12
申请人： MICROTEST GMBH , HUESCH THOMAS , BECKER JOCHEN
发明人： HUESCH THOMAS , BECKER JOCHEN
IPC分类号： H04M9/00 , H04B3/00 , H04M1/725
CPC分类号： H04M9/001
摘要： The invention relates to a method for transmitting voice signals within a building wherein structured cabling is provided. The cabling is especially provided with a switch device (3) that is connected to a plurality of connections (5) via cables (4) that are installed in a basically fixed manner. The voice signals are transmitted between an environment of the switch device (3) and an environment of the connections (5). The aim of the invention is to obtain an improved and more flexible communications possibility. The voice signals are transmitted via a cable in a first signal path between a first portable communications device (11) in the environment of the switch device and the switch device (3), via one of the installed cables (4) in a second signal path between the switch device (3) and one of the plurality of connections (5) and via a radio connection in a third signal path between the connection (5) and an additional portable communications device (21) in the environment of the connection (5).
摘要翻译：在用于建筑物，其中提供的结构化布线，其特别具有开关装置（3）内的语音信号的传输，其设置有在大致永久安装电缆的多个端子（5）的方法，（4），其特征在于语音信号的（3）所述开关装置的附近，并且连接的附近之间的传输（5），导致在该语音信号的改进的和更灵活的通信可能性入的附近的第一便携式通信设备（11）之间的第一信号路径开关装置和所述开关装置（3）通过电缆，其特征在于，通过安装的电缆（4）中的一个的开关装置（3）和多个终端（5）中的一个之间的语音信号中的第二信号路径发送在发送的，并且其中所述语音信号之间的第三信号路径终端装置（5）和在端子（5）的邻近另一便携式通信设备（21）经由无线链路上传输。

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