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1. 发明申请

WO2016203049A1 CHARACTERIZATION OF MULTILAYER STRUCTURES 审中-公开
标题翻译：多层结构的表征
公开(公告)号：WO2016203049A1
公开(公告)日：2016-12-22
申请号：PCT/EP2016/064208
申请日：2016-06-20
申请人： VRIJE UNIVERSITEIT BRUSSEL
发明人： POURKAZEMI, Ali , STIENS, Johan
IPC分类号： G01N22/00 , G01N21/3581
CPC分类号： G01N21/55 , G01N21/3581 , G01N22/00 , G01N2021/8438
摘要： A method for determining characteristics of a layer-based structure is disclosed. The method comprises repetitively irradiating the layer-based structure with a transient continuous wave electromagnetic radiation and capturing as a function of time a transient part of the reflection or transmission of the transient continuous wave electromagnetic radiation reflected at or transmitted through the different interfaces of layer-based structure. The method furthermore comprises deriving from the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation as function of time information regarding different contributions in the transient part of the reflected or transmitted transient continuous wave electromagnetic radiation stemming from the reflections at different interfaces of the layer-based structure and determining from said information at least geometric information and/or electromagnetic properties of the different layers of the layer based structure. A corresponding system also is claimed.
摘要翻译：公开了一种确定基于层的结构特征的方法。该方法包括用瞬态连续波电磁辐射重复地照射基于层的结构，并且作为时间的函数捕获瞬时连续波电磁辐射的反射或透射的瞬时部分，反射或透过层间结构的不同界面，基础结构。该方法还包括从反射或传输的瞬态连续波电磁辐射的瞬态部分中导出，作为时间信息的函数，该时间信息关于来自反射或传输的瞬态连续波电磁辐射的瞬态部分中的不同贡献，基于层的结构，并且从所述信息确定基于层的结构的不同层的至少几何信息和/或电磁特性。还要求对应的系统。

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