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    • 7. 发明申请
    • SURFACE CHARACTERISTIC DETERMINING APPARATUS
    • 表面特征测定装置
    • WO2010082066A3
    • 2010-10-14
    • PCT/GB2010050063
    • 2010-01-15
    • UNIV HUDDERSFIELDJIANG XIANGQIANWANG KAIWEIGAO FENGMUHAMEDSALIH HUSSAM
    • JIANG XIANGQIANWANG KAIWEIGAO FENGMUHAMEDSALIH HUSSAM
    • G01B9/02G01B11/24
    • G01B9/02068G01B9/02007G01B9/02077G01B9/02084G01B9/0209G01B11/2441G01B2290/65
    • A wavelength selector (5) selects a wavelength of a broadband light source (4). A light director (BS1, BS2) directs light from the wavelength selector along a measurement path towards a region of a sample surface and along a reference path towards a reference surface,such that light reflected by the region of the sample surface and light reflected by the reference surface interfere to produce an interferogram. A controller (20) controls the wavelength selector to change the wavelength selected by the wavelength selector. A recorder (63) records successive images,each image representing the interferogram produced by a respective one of the wavelengths selected by the wavelength selector. A data processor (18, 180) processes the recorded images to produce at least one of a surface profile and a surface height map of at least a part of the sample surface. The reference path may be controlled to compensate for environmental effects such as vibration, thermal effects and air turbulence. The data processor may use a graphics processing unit to enable pixel data to be processed in parallel.
    • 波长选择器(5)选择宽带光源(4)的波长。 光导向器(BS1,BS2)沿着测量路径将来自波长选择器的光引导到样本表面的区域并且沿着参考路径朝向参考表面,使得由样品表面的区域反射的光和由 参考表面干涉以产生干涉图。 控制器(20)控制波长选择器改变由波长选择器选择的波长。 记录器(63)记录连续的图像,每个图像表示由波长选择器选择的相应一个波长产生的干涉图。 数据处理器(18,180)处理所记录的图像以产生至少一部分样品表面的表面轮廓和表面高度图中的至少一个。 可以控制参考路径以补偿诸如振动,热效应和空气湍流的环境影响。 数据处理器可以使用图形处理单元来并行地处理像素数据。