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1. 发明申请

WO2003089368A3 LOW TEMPERATURE METHOD FOR FORMING A MICROCAVITY ON A SUBSTRATE AND ARTICLE HAVING SAME 审中-公开
公开(公告)号：WO2003089368A3
公开(公告)日：2003-10-30
申请号：PCT/US2003/011848
申请日：2003-04-17
申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN , NAJAFI, Khalil , STARK, Brian, H.
发明人： NAJAFI, Khalil , STARK, Brian, H.
IPC分类号： B81B7/00
摘要： A low temperature method for forming a microcavity on a substrate and article having same are provided which utilize electroplated films. The method is particularly useful to package microelectromechanical systems (MEMS) in vacuum on the wafer level and provide sealed feedthroughs to the outside world. The method may be performed in a batch process to substantially reduce cost and to form metal diaphragms. Furthermore, the method is performed at near room temperature, which provides more flexibility in the manufacturing process. The method enables substantial cost savings in the production of vacuum-sealed MEMS. Many feedthroughs can be incorporated into the package to transfer signals in and out of the package. One significant advantage of this method is that it does not require bonding of a second substrate, which reduces the system cost.

2. 发明申请

WO2003089368A2 LOW TEMPERATURE METHOD FOR FORMING A MICROCAVITY ON A SUBSTRATE AND ARTICLE HAVING SAME 审中-公开
标题翻译：用于形成基板上的微观结构的低温方法
公开(公告)号：WO2003089368A2
公开(公告)日：2003-10-30
申请号：PCT/US2003/011848
申请日：2003-04-17
申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN , NAJAFI, Khalil , STARK, Brian, H.
发明人： NAJAFI, Khalil , STARK, Brian, H.
IPC分类号： B81B7/00
CPC分类号： B81C1/00333 , B81C2203/0136 , B81C2203/0145 , Y10T428/13
摘要： A low temperature method for forming a microcavity on a substrate and article having same are provided which utilize electroplated films. The method is particularly useful to package microelectromechanical systems (MEMS) in vacuum on the wafer level and provide sealed feedthroughs to the outside world. The method may be performed in a batch process to substantially reduce cost and to form metal diaphragms. Furthermore, the method is performed at near room temperature, which provides more flexibility in the manufacturing process. The method enables substantial cost savings in the production of vacuum-sealed MEMS. Many feedthroughs can be incorporated into the package to transfer signals in and out of the package. One significant advantage of this method is that it does not require bonding of a second substrate, which reduces the system cost.
摘要翻译：提供了一种用于在基板上形成微腔的低温方法及使用电镀膜的制品。该方法特别适用于将微机电系统（MEMS）在真空中封装在晶片级上，并向外界提供密封的馈通。该方法可以以间歇方式进行，以显着降低成本并形成金属隔膜。此外，该方法在接近室温下进行，这在制造过程中提供了更大的灵活性。该方法能够在真空密封的MEMS的生产中节省大量成本。许多馈通可以并入到包装中以将信号传入和传出包装。该方法的一个显着优点是不需要第二衬底的结合，这降低了系统成本。

3. 发明申请

WO2007143058A3 METHODS FOR TRAPPING CHARGE IN A MICROELECTROMECHANICAL SYSTEM AND MICROELECTROMECHANICAL SYSTEM EMPLOYING SAME 审中-公开
公开(公告)号：WO2007143058A3
公开(公告)日：2007-12-13
申请号：PCT/US2007/012878
申请日：2007-05-31
申请人： ROBERT BOSCH GMBH , LUTZ, Markus , PARTRIDGE, Aaron , STARK, Brian, H.
发明人： LUTZ, Markus , PARTRIDGE, Aaron , STARK, Brian, H.
IPC分类号： H01L21/00
摘要： Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.

4. 发明申请

WO2007143129A2 MICROELECTROMECHANICAL SYSTEMS HAVING STORED CHARGE AND METHODS FOR FABRICATING AND USING SAME 审中-公开
标题翻译：具有储存电荷的微电子机电系统及其制造方法和使用方法
公开(公告)号：WO2007143129A2
公开(公告)日：2007-12-13
申请号：PCT/US2007/012997
申请日：2007-06-01
申请人： ROBERT BOSCH GMBH , LUTZ, Markus , PARTRIDGE, Aaron , STARK, Brian, H.
发明人： LUTZ, Markus , PARTRIDGE, Aaron , STARK, Brian, H.
IPC分类号： H01L21/00
CPC分类号： B81B3/0086 , B81B3/0021
摘要： Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.
摘要翻译：许多发明被公开。一些方面涉及用于和/或制造MEMS的MEMS，和/或用于在设置在室中的机械结构上提供，存储和/或捕获电荷的方法。各种结构可以设置在室中并用于在机械结构上供应，储存和/或捕集电荷。在一些方面，采用易碎连接件，热离子电子源和/或可移动机械结构。可破坏的连接件可以包括保险丝。在一个实施例中，可移动机械结构被驱动以共振。在一些方面，电荷使得换能器将振动能转换成电能，其可用于为电路，设备和/或其他目的供电。在一些方面，电荷用于改变机械结构的谐振频率和/或产生可能是排斥性的静电力。

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