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    • 2. 发明申请
    • SPATIAL LIGHT MODULATOR MIRROR METAL HAVING ENHANCED REFLECTIVITY
    • 具有增强反射率的空间光调制器镜面金属
    • WO2008030846A3
    • 2008-07-03
    • PCT/US2007077594
    • 2007-09-05
    • TEXAS INSTRUMENTS INCNEIDRICH JASON MBARRON LANCE W
    • NEIDRICH JASON MBARRON LANCE W
    • G02B26/00
    • G02B5/085G02B5/0808G02B26/0833
    • In accordance with the teachings of the invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the invention, a light processing system includes a light source operable to provide a light beam along a light path and a spatial light modulator (100) positioned in the light path, the spatial light modulator comprising an array of pixel elements, each pixel element comprising a deformable micro-mirror (104a,b) operable to reflect the light beam in at least one direction. At least a portion of each deformable micro-mirror comprises an Al-Cu alloy. A controller (102) electrically connected to the spatial light modulator is operable to provide electrical signals to the spatial light modulator to cause the spatial light modulator to selectively deform the pixel elements, thereby selectively reflecting incident light beams along a projection light path.
    • 根据本发明的教导,提供了具有增强的反射率的空间光调制器镜面金属。 在本发明的特定实施例中,光处理系统包括可操作以沿着光路提供光束的光源和位于光路中的空间光调制器(100),空间光调制器包括像素元件阵列 ,每个像素元件包括可操作以在至少一个方向上反射光束的可变形微镜(104a,b)。 每个可变形微镜的至少一部分包括Al-Cu合金。 电连接到空间光调制器的控制器(102)可操作以向空间光调制器提供电信号以使空间光调制器选择性地变形像素元件,从而选择性地沿入射光路反射入射光束。
    • 5. 发明申请
    • SLOPING ELECTRODES IN A SPATIAL LIGHT MODULATOR
    • 在空调光调制器中滑动电极
    • WO2008017005A3
    • 2009-01-15
    • PCT/US2007075017
    • 2007-08-02
    • TEXAS INSTRUMENTS INCGONG CUILINGHORNBECK LARRY JNEIDRICH JASON M
    • GONG CUILINGHORNBECK LARRY JNEIDRICH JASON M
    • G01B9/02
    • G02B26/0841
    • A method of tilting a micromirror (218) includes forming a substrate (202), a micromirror outwardly from the substrate, and at least one electrode (212a) inwardly from the micromirror. The method further includes applying, by the at least one electrode, electrostatic forces sufficient to pivot the micromirror about a pivot point. In addition, the method includes providing the at least one electrode with a sloped outer surface (210a). The sloped outer surface has a first end and a second end. The second end is closer to the pivot point than the first end, and the first end is closer to the substrate than the second end. The method also includes providing at least a portion of the at least one electrode with material properties that at least partially contribute to the sloped profile of the sloped outer surface.
    • 倾斜微反射镜(218)的方法包括从衬底向外形成衬底(202),微反射镜以及从微反射镜向内的至少一个电极(212a)。 该方法还包括通过至少一个电极施加足以将微反射镜绕枢轴点枢转的静电力。 此外,该方法包括为至少一个电极提供倾斜的外表面(210a)。 倾斜的外表面具有第一端和第二端。 第二端比第一端更靠近枢转点,并且第一端比第二端更靠近衬底。 所述方法还包括提供所述至少一个电极的至少一部分具有至少部分地有助于所述倾斜外表面的倾斜轮廓的材料特性。