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    • 1. 发明申请
    • CHEMICAL VAPOR DEPOSITION REACTOR FOR PREPARATION OF POLYSILICON
    • 化学气相沉积反应器制备多晶硅
    • WO2010110551A2
    • 2010-09-30
    • PCT/KR2010001677
    • 2010-03-18
    • SUSUNGTECH CO LTDHANKOOK SILICON CO LTDYOUN SOON KWANGJUNG JAE CHULKIM TAE SOOKIM TAE HYUNGYOU SUN ILKIM KYUNG HO
    • YOUN SOON KWANGJUNG JAE CHULKIM TAE SOOKIM TAE HYUNGYOU SUN ILKIM KYUNG HO
    • C23C16/455H01L21/205
    • C23C16/24C01B33/035C23C16/4418C23C16/4557
    • The present invention relates to a chemical vapor deposition reactor for preparation of polysilicon. The chemical vapor deposition reactor for preparation of polysilicon according to the present invention comprises: a base plate; a bezel for creating an enclosed hot zone between the base plate; a heating section for heating the hot zone; inlet and outlet openings via which a reaction gas is supplied and discharged into and from the hot zone; and a heat exchange section formed inside the bezel, thereby allowing the reaction gas that is supplied into the hot zone via the inlet opening to absorb heat energy transferred to the bezel and to thus cool the temperature of the bezel and simultaneously supplying the reaction gas into the hot zone in a heated state. As such, heat energy that is lost outside after being transferred to the bezel can be minimized, and power consumption for maintaining the temperature of the hot zone can be reduced since the reaction gas that has absorbed the heat energy is supplied into the hot zone in the heated state.
    • 本发明涉及一种用于制备多晶硅的化学气相沉积反应器。 根据本发明的用于制备多晶硅的化学气相沉积反应器包括:基板; 用于在基板之间形成封闭的热区的边框; 用于加热热区的加热部分; 入口和出口通过其供应反应气体并从热区排出; 以及形成在所述边框内部的热交换部,由此使经由所述入口开口供给到所述热区域的反应气体吸收传递到所述边框的热能,从而冷却所述边框的温度,同时将所述反应气体供给到 热区处于加热状态。 因此,能够将被转移到挡板外面的热能最小化,因为能够吸收热能的反应气体被供给到热区内,所以能够降低维持热区温度的功率消耗 加热状态。
    • 2. 发明申请
    • HERMETIC CONTAINER FOR THERMAL CONVERSION REACTION
    • 用于热转化反应的密封容器
    • WO2010107262A3
    • 2010-12-23
    • PCT/KR2010001686
    • 2010-03-18
    • SUSUNGTECH CO LTDHANKOOK SILICON CO LTDYOUN SOON KWANGJUNG JAE CHULKIM TAE SOOKIM TAE HYUNGYOU SUN ILKIM KYUNG HO
    • YOUN SOON KWANGJUNG JAE CHULKIM TAE SOOKIM TAE HYUNGYOU SUN ILKIM KYUNG HO
    • B01J19/26B01J19/32C01B33/107
    • C01B33/107B01J4/002B01J19/02B01J19/24B01J2219/00094B01J2219/00135B01J2219/00159B01J2219/0286C01B33/035
    • The present invention relates to a hermetic container for a thermal conversion reaction. The hermetic container according to the present invention comprises: a base plate on which utilities are installed; a bezel for forming an enclosed hot zone between the base plate and itself; a heater disposed in the hot zone; an inlet and an outlet for feeding and discharging a reaction gas into and from the hot zone; and a heat exchanger provided inside the bezel for allowing the reaction gas being fed into the hot zone via the inlet to absorb heat energy that is transferred to the bezel such that the temperature of the bezel cools down and also the reaction gas is fed into the hot zone in heated state. Accordingly, in the process of feeding the reaction gas into the hot zone through the heat exchanger provided inside the bezel, heat energy that is transferred from a heater of the hot zone to the bezel and then lost to outside is absorbed by the reaction gas being fed into the hot zone, such that the bezel is prevented from overheating to a temperature above the critical temperature; and because the reaction gas is heated by absorbing the heat energy that was lost to outside the bezel and then fed into the hot zone, power consumption of the heater can be lowered.
    • 本发明涉及一种用于热转化反应的密封容器。 根据本发明的气密容器包括:其上安装有设备的基板; 用于在基板与其自身之间形成封闭热区的挡板; 设置在热区中的加热器; 用于将反应气体供入热区和从热区排出的入口和出口; 以及设置在边框内的热交换器,用于允许经由入口将反应气体供给到热区中,以吸收传递到边框的热能,使得边框的温度冷却并且还将反应气体供给到 热区处于加热状态。 因此,在通过设置在表圈内部的热交换器将反应气体供给到热区的过程中,从热区的加热器传递到表圈然后流失到外部的热能被反应气体吸收 进料到热区中,使得防止挡板过热至临界温度以上的温度; 并且因为反应气体通过吸收损失到玻璃框外部的热能然后进入热区而被加热,所以加热器的功耗可以降低。