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    • 1. 发明申请
    • A PROCESS FOR LARGE-SCALE PRODUCTION OF CdTe/CdS THIN FILM SOLAR CELLS, WITHOUT THE USE OF CdCl2
    • CdTe / CdS薄膜太阳能电池大规模生产的方法,没有使用CdCl2
    • WO2006085348A2
    • 2006-08-17
    • PCT/IT2006/000053
    • 2006-02-02
    • SOLAR SYSTEMS & EQUIPMENTS S.R.L.ROMEO, NicolaBOSIO, AlessioROMEO, Alessandro
    • ROMEO, NicolaBOSIO, AlessioROMEO, Alessandro
    • H01L31/18
    • H01L31/1836Y02E10/50
    • A process for the large-scale production of CdTe/CdS thin film solar cells, said films being deposited as a sequence on a transparent substrate, comprising the steps of : depositing a film of a transparent conductive oxide (TCO) on said substrate; depositing a film of CdS on said TCO film; depositing a film of CdTe on said CdS film; treating said CdTe film with a Chlorine-containing inert gas; depositing a back-contact film on said treated CdTe film. The Chlorine -containing inert gas is a Chlorof luorocarbon or a Hydrochlorof luorocarbon product and the treatment is carried out in a vacuum chamber at an operating temperature of 380-4200C. The Chlorine released as a result of the thermal dissociation of the product reacts with solid CdTe present on the cell surface to produce TeCl2 and CdCl2 vapors. Any residual CdCl2 is removed from the cell surface by applying vacuum to the vacuum chamber while keeping the temperature at the operating value.
    • 一种用于大规模生产CdTe / CdS薄膜太阳能电池的方法,所述薄膜按顺序沉积在透明基板上,包括以下步骤:在所述基板上沉积透明导电氧化物薄膜(TCO); 在所述TCO膜上沉积CdS膜; 在所述CdS膜上沉积CdTe膜; 用含氯惰性气体处理所述CdTe膜; 在所述处理的CdTe膜上沉积背接触膜。 含氯的惰性气体是氯氟烃或氟氯烃产品,处理在真空室中,工作温度为380-4200℃。 由于产物的热解解释放的氯与细胞表面上存在的固体CdTe反应产生TeCl 2和CdCl 2蒸气。 通过对真空室施加真空,同时将温度保持在工作值,从电池表面除去任何残留的CdCl 2。