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1. 发明申请

WO2016083609A3 LASER-BASED SEPARATION METHOD 审中-公开
标题翻译：基于激光的分离
公开(公告)号：WO2016083609A3
公开(公告)日：2016-09-22
申请号：PCT/EP2015077980
申请日：2015-11-27
申请人： SILTECTRA GMBH
发明人： BEYER CHRISTIAN , RICHTER JAN
IPC分类号： B23K26/00 , B23K26/402
CPC分类号： H01L21/7813 , B23K26/0006 , B23K26/0057 , B23K26/38 , B23K2201/40 , B23K2203/56 , H01L21/78 , H01S5/0201
摘要： The invention relates to a method for creating a detachment area (2) in a solid (1), in particular for detaching the solid (1) along the separating region (2). Said solid portion (12) that is to be detached is thinner than the solid body (1) from which the solid portion (12) has been removed. According to the invention, said method preferably comprises at least the following steps: the crystal lattice of the solid (1) is modified by means of a modifying agent, in particular by means of at least one laser, in particular a pico- or femtosecond laser. The modifications, in particular the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) which is to be detached, several modifications (9) are created in the crystal lattice, said crystal lattice penetrates, following said modifications (9), in the areas surrounding the modifications (9), at least in one particular part.
摘要翻译：本发明涉及一种方法，用于在固定体（1）产生一释放部（2），特别是用于固体本体的部件（1）沿着所述释放部（2），剥离，固体部分（12）比以固体含量薄（12）还原的固体本体（1）。根据本发明，该方法优选地包括至少以下步骤：通过至少一个激光通过改性剂的装置修改所述固体本体（1）的结晶晶格中，特别是，特别是皮秒或飞秒激光器，其中所述修饰，特别是在表面上的激光束（5）该要分离的固体部分（12）到固体本体（1）穿透，与若干修饰（9）在晶格中产生，晶格作为修饰的结果（9）周围的在每种情况下的比例至少是修饰（9）的区域的区域正在进入。

2. 发明申请

WO2016113030A4 SPLITTING OF A SOLID USING CONVERSION OF MATERIAL 审中-公开
标题翻译：通过织物转化的固体
公开(公告)号：WO2016113030A4
公开(公告)日：2016-11-17
申请号：PCT/EP2015077979
申请日：2015-11-27
申请人： SILTECTRA GMBH
发明人： BEYER CHRISTIAN
IPC分类号： B23K26/00 , B23K26/402
CPC分类号： B23K26/0057 , B23K2203/56
摘要： The invention relates to a method for creating a detachment zone (2) in a solid (1) in order to detach a solid portion (12), especially a solid layer (12), from the solid (1), said solid portion (12) that is to be detached being thinner than the solid from which the solid portion (12) has been removed. The method according to the invention preferably comprises at least the steps of: providing a solid (1) which is to be processed and which is made of a chemical compound; providing a LASER light source; and subjecting the solid (1) to LASER radiation from the LASER light source so that the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) that is to be cut off; the LASER radiation controlling the temperature of a predefined portion of the solid (1) inside the solid (1) in a defined manner such that a detachment zone (2) or a plurality of partial detachment zones (25, 27, 28, 29) is formed; characterized in that the temperature produced by the laser beams in a predefined portion of the solid (1) is so high that the material forming the predefined portion is subject to modifications (9) in the form of a predetermined conversion of material.
摘要翻译：本发明涉及一种方法，用于在固定体（1）产生一释放部（2）以除去固体部分（12），特别是固体本体（1）中，剥离的固体层（12），固体部分（12）比由固体含量减少的固体部分（12）更薄。根据本发明的方法优选地包括至少以下步骤：提供待处理的固体（1），其中固体（1）由化学化合物组成; 提供激光光源; 使所述固体本体（1）与所述激光光源的激光辐射，其中，所述激光束穿透在一个表面（5）分离出的固体部分（12）到固体本体（1），其中所述激光辐射的固体本体的预定比例（1 ）（固体本体1的内部），以形成（2）或更多的子分离区（25，回火27，28，29）被定义的释放区域，其特征在于：（在由所述激光束，从而产生的固体主体1）的温度的预定部分高于预定比例形成材料以预定转换形式进行修改（9）。

3. 发明申请

WO2016083610A3 SPLITTING OF A SOLID USING CONVERSION OF MATERIAL 审中-公开
标题翻译： SOLID STATE除以物质转化
公开(公告)号：WO2016083610A3
公开(公告)日：2016-09-22
申请号：PCT/EP2015077981
申请日：2015-11-27
申请人： SILTECTRA GMBH
发明人： RICHTER JAN , BEYER CHRISTIAN , RIESKE RALF
IPC分类号： B23K26/00 , B23K26/402
CPC分类号： B23K26/0057 , B23K2203/50 , B23K2203/56 , H01L21/78
摘要： The invention relates to a method for creating a detachment zone (2) in a solid (1) in order to detach a solid portion (12), especially a solid layer (12), from the solid (1), said solid portion (12) that is to be detached being thinner than the solid from which the solid portion (12) has been removed. According to the invention, the method comprises at least the steps of: providing a solid (1) which is to be processed and which is preferably made of a chemical compound; providing a LASER light source; subjecting the solid (1) to LASER radiation from the LASER light source so that the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) that is to be cut off; the LASER radiation is applied in a defined manner to a predefined portion of the solid (1) inside the solid (1) such that a detachment zone (2) or a plurality of partial detachment zones (25, 27, 28, 29) is formed; the method is characterized in that a number of modifications (9) is successively created in the crystal lattice by the applied laser radiation, and the crystal lattice fissures at least partially in the regions surrounding the modifications (9) as a result of the modifications (9), said fissures in the region of the modifications (9) predefining the detachment zone (2) or a plurality of partial detachment zones (25, 27, 28, 29).
摘要翻译：本发明涉及一种方法，用于在固定体（1）产生一释放部（2）以除去固体部分（12），特别是固体本体（1）中，剥离的固体层（12），固体部分（12）比减小，以固体含量（12）的固体稀释剂。根据本发明，该方法包括至少如下步骤：待加工提供固体本体（1），其中所述固体本体（1）优选由化学化合物; 提供一激光源; 使所述固体本体（1）与所述激光光源的激光辐射，其中，所述激光束穿透在一个表面（5）分离出的固体部分（12）到固体本体（1），其中所述激光辐射的固体本体的预定比例（1 ）被施加（在实心主体1的内部），形成释放区（2）或更多的子分离区（25，27，28，29），通过激光冲击依次若干修改（9）在晶格中产生，其特征在于，其中晶格如（9）的区域，在每个情况下，至少在进入其一部分的修改周围，其特征在于，由于在汽提部分（2）是预定的或更多个部分分离区域的修饰（9）的区域中的裂纹的区域的修改（9）的结果，（25， 27，28，29）可以被指定。

4. 发明申请

WO2016113030A3 SPLITTING OF A SOLID USING CONVERSION OF MATERIAL 审中-公开
公开(公告)号：WO2016113030A3
公开(公告)日：2016-09-09
申请号：PCT/EP2015077979
申请日：2015-11-27
申请人： SILTECTRA GMBH
发明人： BEYER CHRISTIAN
IPC分类号： B23K26/00 , B23K26/402
CPC分类号： B23K26/0057 , B23K2203/56
摘要： The invention relates to a method for creating a detachment zone (2) in a solid (1) in order to detach a solid portion (12), especially a solid layer (12), from the solid (1), said solid portion (12) that is to be detached being thinner than the solid from which the solid portion (12) has been removed. The method according to the invention preferably comprises at least the steps of: providing a solid (1) which is to be processed and which is made of a chemical compound; providing a LASER light source; and subjecting the solid (1) to LASER radiation from the LASER light source so that the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) that is to be cut off; the LASER radiation controlling the temperature of a predefined portion of the solid (1) inside the solid (1) in a defined manner such that a detachment zone (2) or a plurality of partial detachment zones (25, 27, 28, 29) is formed; characterized in that the temperature produced by the laser beams in a predefined portion of the solid (1) is so high that the material forming the predefined portion is subject to modifications (9) in the form of a predetermined conversion of material.

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